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研究生:蘇昱豪
研究生(外文):Yu-Hou Su
論文名稱:光環型共振腔之干涉式生醫感測
論文名稱(外文):Interferometric Biosensor by Optical Ring Resonator
指導教授:徐世祥
指導教授(外文):Shih-Hsiang Hsu
口試委員:徐世祥
口試日期:2012-07-27
學位類別:碩士
校院名稱:國立臺灣科技大學
系所名稱:電子工程系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:75
中文關鍵詞:干涉式生醫感測光環型共振腔
外文關鍵詞:Interferometric BiosensorOptical Ring Resonator
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絕緣層上製作矽波導具有較低成本、可用於通訊傳輸波段與互補式金屬氧化物半導體標準製程相容的廣大優點。同時波導中的矽與埋藏氧化層之間有高折射率差,可使元件線寬能縮至次微米等級。一般在生物感測應用方面,光環形共振器通常利用覆蓋層的折射率變化引起共振波長飄移。此論文中,光纖Mach-Zehnder干涉儀和寬頻譜光源的低同調干涉系統(OLCI)被使用來量測光學環型共振腔之干涉條紋圖案或干涉封包。由於小線寬之光學環型共振腔,具有較長等效長度,此舉將使得兩路徑干涉臂的光程差,因覆蓋層折射率變化影響更為顯著。
我們同時運用波長1.3μm的DFB雷射,來產生干涉圖(Interferogram),以形成穩定的光學尺,此光學尺波峰之間距為1.3μm,來校準形成干涉條紋圖案之步進馬達,之每步距離精準度可達到19.3nm。
與目前糖尿病感測技術相比,矽線波導的光學環型共振腔擁有覆蓋層及感應區域,元件面積狹小等優勢,因這些條件使矽線波導被廣泛的提出。在本篇論文中,我們使用的矽基材晶圓及步進曝光機(I-line stepper)製作出光學環形共振腔感測原件,其Q值為30000,等效長度為1.7mm,元件對葡萄糖溶液靈敏度與感測極限可分別達到0.00279m/RIU及1.1x10-5 (RIU)。長度8mm之矽線直波導元件對葡萄糖溶液產生之干涉封包,也同時用來作比較與驗證。
綜合以上所述,我們在絕緣層上覆矽晶圓上的光學環形共振腔且利用干涉技術測量葡萄糖變化,有較顯良好的解析度和靈敏度。成熟的互補式金屬氧化物半導體製程技術應用在生醫感測可提供較低成本,體積較小及輕量化。
The silicon superiority is successfully demonstrated on its low cost, transparency in telecommunication wavelengths, CMOS compatible processing, and the high index contrast for a small footprint. Moreover, the silicon-on-insulator (SOI) platform is currently offering the potential of constructing and processing photonic integrated circuits on the massive electronics fabrication infrastructure. In biosensing applications, the optical ring resonator is typically using the resonating wavelength shift induced by the cladding layer refractive index change. Here, the optical low-coherence interferometry (OLCI) including a fiber-optic Mach-Zehnder interferometer and a continuous-wave broadband source was utilized to characterize the optical ring resonator using spatially-localized interference fringe patterns or interferograms. The narrow linewidth optical rign resonator owns the longer effect length. Therefore, the optical path difference between two interferometer arms was more easily detected by the cladding layer refractive index change. A 1.3μm wavelength distributed feedback laser implemented in an optical ruler assisted stepper motor could achieve 19.3 nm resolved characterization.
Compared with the current diabetes sensing technologies, a silicon-wire waveguide based optical ring resonator demonstrates the big advantage of extensive evanescent filed in the cladding layer and the superior properties of small foot print besides the wider sensing region. In this thesis, we utilized the SOI as a substrate and stepper aligner process to fabricate the biophotonic ring sensor with Q=30000 and effective length=1.7mm. The sensitivity and sensing limitation could achieve 0.00279m/RIU and 1.1x10-5, respectively. The interferogram calibrated by the stepper motor combined with optical ruler on a 8(mm)-millimeter long fiber sensing arm then experimentally demonstrated a 2.46x10-6 refractive index unit (RIU) high sensitive biosensing.
In summary, the optical ring resonator interferometric biosensors on SOI chips were proposed to significantly improve the prevailing glucose sensing resolution and sensitivity. This technology could be delivered using the mature CMOS processing for low cost, small size, and light weight in biophotonic sensing applications.
摘要
Abstract
目錄
圖目錄
表目錄
第一章 緒論
1.1 簡介
1.2 研究動機
1.3 論文架構
第二章 次微米矽線波導介紹
2.1 矽線波導介紹
2.2 波導結構
2.3 單多模條件
2.4 傳播損耗
2.5 側壁粗糙度
第三章 環形共振腔
3.1 環形共振腔理論分析
3.2 關鍵耦合
3.3 多模干涉設計與模擬
第四章 製程與量測介紹
4.1 SOI製程晶圓介紹
4.2 波導製作流程
4.3 微影技術
4.4 低同調干涉技術
第五章 量測結果與結論
5.1 干涉量測與實驗架構
5.2 結論
5.3 未來展望
參考文獻
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