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研究生:許建中
研究生(外文):Hsu Chien-Chung
論文名稱:奈米圖案化藍寶石基板提升氮化鎵二極體發光效率
論文名稱(外文):Nano-patterned sapphire substrates enhanced the light efficiency of GaN light emitting diodes
指導教授:龔吉和
口試委員:吳國梅林奇鋒
口試日期:2012-07-23
學位類別:碩士
校院名稱:國立聯合大學
系所名稱:光電工程學系碩士班
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:67
中文關鍵詞:圖案化藍寶石基板
外文關鍵詞:NPSS
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  • 下載下載:3
  • 收藏至我的研究室書目清單書目收藏:0
本論文的內容,主要是探討氮化鎵(GaN)發光二極體,利用奈米轉印方式來製備奈米圖案化藍寶石基板(NPSS),並與其它不同的藍寶石基板作其比較。在奈米圖案化基版的參數比較中,我們發現週期為800 nm 的藍寶石基版,其二極體發光效率高於週期為600 nm之基版。此外,在不同結構的藍寶石基版比較中,我們發現在注入電流為20mA的條件下,平坦藍寶石基板(CSS)之功率為17.8mW,微米圖案化藍寶石基板(PSS)為23.56mW,增加了32.4%;而奈米圖案化藍寶石基板(NPSS)之功率為24.3mW,增加了36.5%,也高於PSS基版4.1%。而在注入電流為200mA的條件下,NPSS相較於週期800nm,其發光效率提升更高達42.2%,顯示利用NPSS所製成之氮化鎵LED元件有較高的發光效率。
In this study, we discussed light extract, ion efficiency of GaN-based light emitting diodes (LEDs) with nano-patterned sapphire substrates (NPSS) which were prepared by nano-imprint lithography. Compare with various period of NPSS, we found that the NPSS with the period of 800 nm shown higher efficiency that the NPSS with the period of 600 nm. Compare with various sapphire substrates, the LEDs with NPSS exhibited higher efficiency resulted from better light extraction ability of NPSS. Under the injection current of 20 mA, the power of LED with common sapphire substrate (CSS), patterned sapphire substrate (PSS), and NPSS was 17.8 mW, 23.56 mW and 24.3 mW, respectively. Compare with the LED with PSS, the power of the device with NPSS was improved 36.5%. Furthermore, under the injection current of 200 mA, the power improvement of NPSS to period of 800nm was 42.2%. It indicated that the efficiency of LED could be improved with NPSS.
目錄
摘要---------------------------------------------------------------------------I
Abstract------------------------------------------------------------------II
致謝---------------------------------------------------------------------III
目錄-------------------------------------------------------------------------IV
圖目錄------------------------------------------------------------------------VI
表目錄----------------------------------------------------------------------------IX
第一章 緒論--------------------------------------------------1
1-1發光二極體------------------------------------------------1
1-2研究動機------------------------------------------------------6
第二章 奈米壓印簡介----------------------------------------------------------------14
2-1奈米轉印緣由------------------------------------------------------------14
2-2奈米轉印微影技術的方法------------------------------------------------17
2-3抗沾黏處理---------------------------------------------------------22
第三章 實驗設備----------------------------------------------------------23
3-1壓印機---------------------------------------------------------------23
3-2濺鍍機----------------------------------------------------------24
3-3 電漿耦合式反應離子蝕刻機------------------------------------------------26
第四章 實驗流程--------------------------------------------------------------------28
4-1模子製備----------------------------------------------------------------28
4-2圖案化藍寶石基板-------------------------------------------------------31
第五章 實驗分析儀器----------------------------------------------------------------33
5-1原子粒探針顯微鏡-------------------------------------------------------33
5-2掃描式電子顯微鏡------------------------------------------------------35
5-3接觸角分析儀------------------------------------------------------------37
5-4 螢光激發光譜-----------------------------------------------------------39
5-5電激發光-----------------------------------------------------------39
驗結果與討論---------------------------------------------------------------------40
6-1鎳版-------------------------------------------------------------------40
6-2模子轉印--------------------------------------------------------------------41
6-3圖案化藍寶石基板壓印--------------------------------------------------------41
6-4圖案化藍寶石基板蝕刻--------------------------------------------------------43
6-5圖案化藍寶石基板磊晶--------------------------------------------------------47
6-6螢光光譜量測---------------------------------------------------------------48
6-7電性量測--------------------------------------------------------------49
6-8接觸腳量測--------------------------------------------------------------53
第七章 結論與未來展望---------------------------------------------------------------54
第八章未來展望---------------------------------------------------------------------55
參考文獻--------------------------------------------------------------------------56



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