臺灣博碩士論文加值系統

本研究主要目的為開發一高精度微型CNC綜合加工機之主要結構，包括機台的主體架構、Z軸以及具微調式XY共平面平台等三大部分。為了使機台具備高精度的加工與量測，以雙拱型結構作為機台之主體架構，經有限元素分析軟體驗證雙拱型結構之剛性，其變形量僅有0.171μm。機台主要功能有高速微銑削、C軸微放電加工和三次元量測；在Z軸的設計上，採用QC 50型轉接頭，以達成機台功能手動快速切換之目的；為了減輕Z軸馬達的負擔，採取同軸式配重塊設計，可有效地利用空間並降低機台的整體體積。本研究使用具有高精度與低震動的線性馬達驅動XYZ三軸，搭配解析度為50nm的光學尺作為回授控制，並採用微調式XY軸共平面平台，使之能達成長行程定位與短行程微調的精密定位，其XY軸之行程皆可達到80mm。
綜合上述三大部分的設計，本研究已成功開發一高精度微型CNC綜合加工機的結構，機台整體大小為485mm × 485mm × 448mm，經都卜勒雷射干涉儀作精度測試，其堆疊式平台的X和Y軸精度分別約為4μm和3μm，Z軸精度則可達3μm以內。

The purpose of this study is to develop the structures of a high-precision micro CNC machine. The main structures of the machine include a body structure, a Z axis, and an XY coplanar stage with fine-tuning. In order to possess high precision machining and measurement, a dual-arch structure was used as the body structure. The stiffness of the dual-arch structure was verified by finite element analysis. Its largest deformation is only 0.171μm. The main functions of the developed machine are high-speed micro-milling, C-axis micro-EDM, and 3D CMM. The Z-axis design adopted a QC 50-type adapter to achieve a manually rapid switch of functions. To decrease the loading on the Z-axis motor, a co-axial counterweight design was employed to effectively take advantage of space and reduce the overall size of the machine. In this study, the XYZ axes were driven by linear motors with high precision and low vibration. An optical encoder with a resolution of 50nm was equipped for feedback control. And an XY coplanar stage was designed to achieve the precise position of long stroke position and short stroke of fine-tuning. The long stroke of the XY axes is 80mm each.
Assembling the aforementioned design of three components, this study has successfully developed the main structures of a high-precision micro CNC machine. The overall size of the machine is 485×485×448 mm3. Through precision tests of the machine by a laser Doppler interferometer, the X- and Y-axis precisions of the stacked platform are about 4μm and 3μm, respectively, and Z-axis precision is within 3μm.

摘要 .............................................................................................................. iv
Abstract .......................................................................................................... v
目 錄 ............................................................................................................. vi
表目錄 ............................................................................................................ viii
圖目錄 ............................................................................................................ ix
第一章 緒論 ........................................................................................................ 1
1.1 研究 動機與目的 ................................................................................................ 1
1.2 相關文獻回顧 ................................................................................................... 2
1.3 研究方法與內容概要 ............................................................................................. 8
1.4 論文架構 ....................................................................................................... 9
第二章 機台的結構設計 ............................................................................................. 11
2.1 機台整體的設計概念與流程 ...................................................................................... 11
2.2 機台的骨架設計 ................................................................................................ 13
2.3 Z 軸之設計概念 ................................................................................................ 15
2.4 XY 共平面台之設計概念 共平面台之設計概念 ............................................................... 23
2.4.1 共平面之定義 ................................................................................................ 23
2.4.2 第一代共平 面台之設計 ....................................................................................... 23
2.4.3 第二代共平面台之設計 ........................................................................................ 24
2.4.4 第三代共平面台之設計 ........................................................................................ 26
2.4.5 最新一 代平面台之設計 ....................................................................................... 28
第三章 機台的結構分析 ............................................................................................. 32
3.1 有限元素分析 .................................................................................................. 32
3.1.1 分析流程 .................................................................................................... 32
3.1.2 網格元素 .................................................................................................... 33
3.2 靜態分析 ...................................................................................................... 34
3.2.1 傳統機台之 L型結構分析 ...................................................................................... 34
3.2.2 雙拱形結構分析 .............................................................................................. 38
3.2.3 XY 共平面台分析 ............................................................................................. 41
3.3 動態分析 ...................................................................................................... 48
3.3.1 模態分析 .................................................................................................... 48
3.3.2 簡諧響應分析 ................................................................................................ 51
第四章 機台的組裝與定位控 制 ...................................................................................... 53
4.1 機台的組裝要點 ................................................................................................ 53
4.1.1 Z軸的組裝 ................................................................................................... 53
4.1.2 XY 共平面台的組裝 ........................................................................................... 56
4.2 三軸之定位控制 ................................................................................................ 60
4.2.1 運動控制卡 .................................................................................................. 60
4.2.2 定位程式設計 ................................................................................................ 61
第五章 實驗量測結果與討論 ......................................................................................... 63
5.1 實驗設備的架與量測方法 ........................................................................................ 63
5.1.1 雷射都卜勒干涉儀 ............................................................................................ 63
5.1.2 量測方法 .................................................................................................... 65
5.2 機台的量測結果與補償方法 ...................................................................................... 67
第六章 結論與未來展望 ............................................................................................. 71
6.1 結論 .......................................................................................................... 71
6.2 未來展望 ...................................................................................................... 72
參考文獻 .......................................................................................................... 73

[1] K. Takamasu, et al., "Basic concepts of nano-CMM (Coordinate Measuring Machine with Nanometer Resolution)," China Bilateral Symposium on Advanced Manufacturing Engineering, pp. 155-158, 1999.
[2] K. Takamasu, et al., "Development of Nano-CMM and Parallel-CMM," International Dimensional Metrology Workshop, May 1999.
[3] K. Takamasu, et al., "Friction drive system for Nano-CMM," Proc. Mechatronics 2000, pp. 21-23, Sep 2000.
[4] M.M.P.A. Vermeulen, et al., "Design of a High-Precision 3D-Coordinate Measuring Machine," Annals of the CIRP, vol. 47, pp. 447-450, 1998.
[5] Theo A.M. Ruijl and Jan van Eijk, "A Novel Ultra Precision CMM based on Fundamental Design Principles," American Society for Precision Engineering, June 2003.
[6] I. Schmidt, et al., "Incestigations and caculations into decreasing the uncertainty of a nanopositioning and nanomeasuring machine," Measurement Science & Technology, vol. 18, pp. 482-486, Feb 2007.
[7] G. Jager, et al., "The Metrological Basis and Operation of Nanopositioning and Nanomeasuring Mechine NMM-1," Tm-Technisches Messen, vol. 76, pp. 227-234, 2009.
[8] R.J. Hocken, et al., "Dynamics and Control of the UNCCMIT SubAtomic Measuring Machine," Annals of the CIRP, vol. 50, pp. 373-376, 2001.
[9] S.W. Kim, "New Design of Precision CMM based upon Volumetric Phase- Measuring Interferometry," Annals of the CIRP, vol. 50, pp. 357-360, 2001.
[10] Ivano Beltrami, et al., "Micro- and nanoelectric-discharge machining," Journal of Materials Processing Technology, vol. 149, pp. 263-265, 2004.
[11] K.C. Fan, et al., "Study of a noncontact type micro-CMM with arch-bridge and nanopositioning stages," Robotics and Computer-Integrated Manufacturing, vol.23, pp. 276–284, 2007.
[12] 范光照、張郭益，精密量測，高立圖書有限公司，民國98年。
[13] 柯志遠，高精度奈米級微型三軸移動台結構之設計與組裝方法，國立台灣大學機械工程研究所碩士論文，2010。
[14] C. Renner, et al., "A vertical piezoelectric inertial slider," Review of Seientific Instruments, vol. 61, pp. 965-967, Mar 1990.
[15] 李輝煌，工程分析，高立圖書有限公司，民國98年。
[16] Huei-Huang Lee, Finite Element Simulations with ANSYS Workbench 12, Schroff Development Corp, 2010.
[17] DMC-18x2 User Manual, 2005.