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研究生:周峯聖
研究生(外文):Feng-Sheng Chou
論文名稱:反射式與分光式波板之設計與研製
論文名稱(外文):Design and Fabrication for Reflective-typewaveplate and Beam splitting waveplate
指導教授:任貽均
口試委員:蔡淑雲吳俊傑陳學禮李偉
口試日期:2012-07-17
學位類別:碩士
校院名稱:國立臺北科技大學
系所名稱:光電工程系研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:56
中文關鍵詞:偏極轉換非均向性薄膜光學特性Berreman運算法
外文關鍵詞:偏極轉換非均向性薄膜光學特性Berreman運算法
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本研究使用電子槍蒸鍍系統與斜向沉積技術(OAD)鍍製具有斜向結構五氧化二鉭(Ta2O5)在銀反射鏡上,組態為(入射介質/非均向性薄膜/銀反射鏡),因五氧化二鉭(Ta2O5)的光學特性可產生高偏極轉換效果,因此希望能藉由銀反射鏡能加強其偏極轉換效果,最後成為反射式偏極轉換器.
本實驗運用斜向沉積技術(OAD),改變不同的厚度(1400~2600nm)且搭配不同的沉積角度(α=70,72.5,75)來調變雙軸晶體Ta2O5的光學特性,將此非均向性薄膜鍍製在均向性的銀反射鏡上,發現可藉由調變Ta2O5薄膜的厚度控制其傳播向位,沉積角度控制等效折射率,觀察研究其造成的偏極轉換效果.理論上我們使用Berreman矩陣來分析光的特徵波在Ta2O5非均向性薄膜傳播時與經由銀反射時所產生的相位變化.並藉此理論的分析與模擬來設計並製造出廣波域(400~700nm)與廣角度(入射角00~400)的反射式偏極轉換器。最後利用此反射時由Ta2O5所產生偏極轉換的概念,搭配分光鏡來設計出一新穎的分光式波板。


In this work, an anisotropic film is applied to on a silver mirror to form the configuration (incident medium/ anisotropic thin film/silver mirror), to generate the broadband and wide angle phase retardation. According to this configuration, the polarization conversion is very high at small angle, which act as a reflective-type polarization converter.
Experimentally we apply the oblique angel deposition technique to fabricate the anisotropic Ta2O5 film. By changing the different thickness from 1400nm to 2600nm and varied deposition angle of Ta2O5 biaxial film to modify it’s optical properties, and study the polarization conversion of it. Theoretically, we use the Berreman calculus to gradually analyze the eigen-waves that propagate within an anisotropic Ta2O5 film to demonstrate phase retardation can be achieved by the propagation and reflection of eigen-waves from the silver surface. Base on the theory, we can design and manufacture the broadband and wide angle reflective-type polarization converter in the visible regime. Base on the design methods of reflective-type waveplate and beam splitter, we develop a novel optical device called beam splitting waveplate.


目 錄

中文摘要 i
英文摘要 ii
誌謝 iii
目錄 iv
表目錄 v
圖目錄 vi
第一章 緒論 1
1.1 前言 1
1.2 非均向性光學薄膜 3
1.3 非均向性介質的偏極轉換現象 6
1.4 非均向性光學薄膜與分光鏡 8
1.4 實驗目的 10
第二章 原理介紹 11
2.1 空間軸與主軸之定義及轉換 11
2.2 Fresnel’s方程式 13
2.3 材料中傳遞的特徵電磁場 14
2.4 波板原理 17
2.5 中性分光鏡 19
2.5.1 介電質膜分光鏡..............................................................20
2.6 分光式波板 21


第三章 實驗架構與量測系統 23
3.1蒸鍍系統 23
3.2 量測系統 24
3.2.1 穿透式光譜儀量測系統....................................................25
3.2.2 穿透式光譜儀校正程序....................................................25
3.3 反射率角頻譜量測系統 26
3.3.1 反射率角頻譜量測系統校正程序..................................26
3.4 單波長反射率角頻譜量測系統.................................................27
3.4.1 單波長反射式角頻譜系統校正程序 28
3.5橢圓偏光儀量測系統 29
3.5.1 橢偏儀校正程序 30
第四章 實驗結果分析與成因討論 31
4.1 單層斜向柱狀結構之製鍍 31
4.1.1 單層斜柱鍍製在銀反射鏡上 34
4.1.2 入射角為小角度時之偏極轉換成因討論 40
4.2 單層斜柱非均向薄膜分光式波板之設計 43
4.2.1 單層斜柱非均向薄膜分光式波板之製作樣品 47
第五章 結論 53
參考文獻 54

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