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研究生:TrinhXuanHung
研究生(外文):Hung-XuanTrinh
論文名稱:兩 種 用 於 光 學 平 面 量 測 之 偏 極 相 移 式 牛 頓 干 涉 儀
論文名稱(外文):Two polarization phase-shifting Newton interferometers for plane optical surface measurements
指導教授:陳亮嘉林世聰林世聰引用關係
口試委員:葉勝利范光照
口試日期:2012-07-19
學位類別:碩士
校院名稱:國立臺北科技大學
系所名稱:自動化科技研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:英文
論文頁數:42
中文關鍵詞:Polarization phase shifting interferometerNewton interferometerthin-film polarizerOptical shop testingSurface profile measurement
外文關鍵詞:Polarization phase shifting interferometerNewton interferometerthin-film polarizerOptical shop testingSurface profile measurement
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Based on a special polarizing beam-splitter (SPBS) developed, two new polarization phase shifting Newton interferometers are proposed for plane optical surface measurements in this thesis. The first one is composed of a polarizer, the SPBS, a sample in contact with the special SPBS, a broadband quarter-wave plate, an analyzer, and a CCD camera. After the SPBS splits the incident beam for passing through the polarizer into a S-beam and a P-beam, the SPBS and sample further reflect these two beams to pass through the quarter-wave plate and analyzer to generate a Newton interference pattern on the CCD camera, and a rotation of the polarization gives the interference pattern a phase shift equal to double of the rotation. A setup was constructed to realize the interferometer. The experimental results are obtained and proved to validate the feasibility of the development.
The second interferometer is almost the same as the first one, except that the gap between the SPBS and sample is enlarged and there is a Savart phase compensation module placed in front of the polarizer. The compensation module is employed to compensate the phase lag of the P-beam due to the gap enlargement. And both the designs of the compensation module and gap enlargement are capable of removing the error due to polarization leaking of the SPBS. A setup of the second interferometer was also installed. The experimental results have confirmed the capability of the proposed method in minimizing measured errors caused by the polarization leaking problem.


Based on a special polarizing beam-splitter (SPBS) developed, two new polarization phase shifting Newton interferometers are proposed for plane optical surface measurements in this thesis. The first one is composed of a polarizer, the SPBS, a sample in contact with the special SPBS, a broadband quarter-wave plate, an analyzer, and a CCD camera. After the SPBS splits the incident beam for passing through the polarizer into a S-beam and a P-beam, the SPBS and sample further reflect these two beams to pass through the quarter-wave plate and analyzer to generate a Newton interference pattern on the CCD camera, and a rotation of the polarization gives the interference pattern a phase shift equal to double of the rotation. A setup was constructed to realize the interferometer. The experimental results are obtained and proved to validate the feasibility of the development.
The second interferometer is almost the same as the first one, except that the gap between the SPBS and sample is enlarged and there is a Savart phase compensation module placed in front of the polarizer. The compensation module is employed to compensate the phase lag of the P-beam due to the gap enlargement. And both the designs of the compensation module and gap enlargement are capable of removing the error due to polarization leaking of the SPBS. A setup of the second interferometer was also installed. The experimental results have confirmed the capability of the proposed method in minimizing measured errors caused by the polarization leaking problem.


Abstract i
Acknowledgement iii
Table of Contents iv
List of Tables vi
List of Figures vii
Chapter 1 Introduction 1
1.1 Phase-shifting interferometers 1
1.1.1. The phase-shifting interferometers with PZT phase-shifter 1
1.1.2. Phase shifting interferometer with rotatable analyzer 2
1. 2 Newton interferometers 4
1.3 Motivation 5
1.4 Thesis structure 6
Chapter 2 First Polarization phase-shifting Newton interferometer for plane optical surface measurements 7
2.1 Configuration 7
2.2 Measurement theory 8
2.3 Experiment setup 12
2.3.1 Light source module 13
2.3.2 Interferometer 14
2.3.3 Image processing system 19
Chapter 3 Experimental results of the first polarization phase-shifting Newton interferometer 23
3.1 Validity and feasibility examinations 23
3.2 Discussions 25
Chapter 4 Second Polarization phase-shifting Newton interferometer for plane optical surface measurements 27
4.1 Configuration 27
4.2 Measurement theory 28
4.3 Experiment setup 30
4.3.1 Light source module 31
4.3.2 Interferometer 32
4.3.3 Image processing system 32
Chapter 5 Experimental results of the second polarization phase-shifting Newton interferometer 33
5.1 Interference pattern comparison 33
5.2 The validity and feasibility examinations 36
Chapter 6 Conclusions and Future research 38
6.1 Conclusions 38
6.2 Future Research 39
References 41


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