跳到主要內容

臺灣博碩士論文加值系統

(35.175.191.36) 您好!臺灣時間:2021/08/01 00:53
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

我願授權國圖
: 
twitterline
研究生:張婉珍
研究生(外文):Wan-Chen Chang
論文名稱:AA/DMC兩性聚電解質合成技術及其於CMP級二氧化矽研磨粉體分散穩定性應用研究
論文名稱(外文):Synthesis of AA/DMC amphoteric polyelectrolyte block copolymer and its application to the dispersion of CMP silicon oxide
指導教授:陳志恆陳志恆引用關係
口試委員:周正堂洪儒生徐治平林景崎
口試日期:2011-12-30
學位類別:碩士
校院名稱:國立臺北科技大學
系所名稱:資源工程研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2011
畢業學年度:100
語文別:中文
論文頁數:88
中文關鍵詞:二氧化矽膠體穩定性化學機械研磨分散兩性聚電解質
外文關鍵詞:SiO2 colloid stabilityChemical Mechanical PolishingDispersionamphoteric polyelectrolyte
相關次數:
  • 被引用被引用:1
  • 點閱點閱:142
  • 評分評分:
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
本研究中以自由基聚合法合成之兩性聚電解質,主要是由兩種單體所構成。陰離子部分的單體-丙烯酸(Acrylic acid, AA)和陽離子部分的單體-丙烯醯氧乙基三甲基氯化銨(methacryloxyethyltrimethyl ammonium chloride, DMC)。實驗中藉著調整合成的兩性聚電解質中兩種單體莫耳比例,使其應用時帶有不同陰陽離子比。將合成後之聚電解質以FTIR、IC、AA、NMR、GPC來作為分子結構上的確認。並以合成後之兩性聚電解質應用於二氧化矽粉體在酸性及鹼性條件下的分散,在矽晶圓CMP製程應用方面(pH 10),二氧化矽膠體分散液中聚電解質(AA:DMC=1:4)、(AA:DMC=2:3)、(AA:DMC=3:2)及(AA:DMC=4:1) 的最適添加量分別為12wt%、14wt%、10wt%及14wt%。穩定性會隨著陰離子區段的比例增加而增加。與一般使用界面活性劑相比之下添加量較少。在酸性條件下(pH 3),二氧化矽膠體分散液中聚電解質(AA:DMC=1:4)、(AA:DMC=2:3)、(AA:DMC=3:2)及(AA:DMC=4:1)的最適添加量分別為1.7wt%、2.5wt%、2.6wt%及1.9wt%,穩定性會隨著陽離子區段的比例增加而增加。

A series of amphoteric polyelectrolyte block copolymers with different molecular cationic and anionic segment ratio were prepared by the radical copolymerization of acrylic acid (AA) as anionic monomer with methacryloxyethyltrimethyl ammonium chloride (DMC) as cationic monomer. By adjusting the ratio of anionic and cationic monomers, the synthesized amphoteric polyelectrolyte had different The result showed that when particle dispersion was applied in different dissociation, the amphoteric polyelectrolyte had different anionic-group/ cationic group content. The structures and properties of the amphoteric polyelectrolyte were confirmed by FTIR、IC、AA、NMR、GPC. Then, the amphoteric polyelectrolyte was used by using for the disperse dispersion of SiO2 particles of in acid or basic in solution. For silicon wafer CMP application (pH=10), the SiO2 particles can be dispersed by the addition of optima amount of polyelectrolyte (AA:DMC=1:4), (AA:DMC=2:3), (AA:DMC=3:2) and (AA:DMC=4:1) in 12wt%、14wt%、10wt% and 14wt%, respectively. The amount of added polyelectrolyte was significantly lower than that of conventional surfactant. At pH=10, it was found that the stability of SiO2 particles increased with increasing anionic-group content. In the acid conditions (pH=3), the SiO2 particles can be dispersed by the addition of optima amount of polyelectrolyte (AA:DMC=1:4), (AA:DMC=2:3), (AA:DMC=3:2) and (AA:DMC=4:1) in 1.7wt%、2.5wt%、2.6wt%及1.9wt%, respectively. At pH 10, it was found that the stability of SiO2 particles increased with increasing cationic-group content.


目 錄
中文摘要...i
英文摘要...ii
誌謝......iv
目錄......v
表目錄....vii
圖目錄....ix
第一章 前言....1
1.1 聚電解質....1
1.1.1 聚電解質分類....1
1.1.2 聚電解質應用....3
1.2 奈米二氧化矽.....5
1.3 研究目的....5
第二章 文獻回顧與理論基礎....6
2.1 嵌段聚合物....6
2.1.1 溶液聚合法....6
2.1.2 乳化聚合法....7
2.1.3 分散聚合法....9
2.1.4 原子轉移自由基聚合法....10
2.2 奈米顆粒分散原理與機制....11
2.2.1 膠體定義及懸浮液....11
2.2.2 膠體的形狀....13
2.2.3 膠體的表面電荷....14
2.2.4 顆粒表面特性 ....15
2.2.5 膠體穩定狀態 ....16
2.2.6 顆粒分散模式 ....17
2.2.7 分散劑的影響....23
2.2.7.1 分散劑種類....24
2.2.7.2 分散劑的吸附....25
2.3 聚電解質分散劑 ....26
2.3.1 聚電解質分散劑基本性質 ....26
2.3.2 聚電解質絮凝機制....27
2.3.3 聚電解質絮凝機制影響因素....28
2.3.4 兩性聚電解質........30
2.4 分散效果評估........33
2.4.1 表面電位....33
2.4.2 粒徑分佈....34
2.4.3 沉降作用....34
第三章 實驗方法與步驟....36
3.1 實驗流程....36
3.2 實驗藥品....37
3.3 實驗儀器....38
3.4 實驗方法....39
3.4.1 合成兩性聚電解質及性質分析....39
3.4.2 奈米級二氧化矽粉體性質分析....43
3.4.3 研磨液配置及分散行為分析....44
第四章 實驗結果與討論....45
4.1兩性聚電解質性質分析....45
4.1.1 單體特性....45
4.1.2 聚電解質特性 ....47
4.1.3 兩性聚電解質結構....51
4.1.4 兩性聚電解質分子量....53
4.1.5 兩性聚電解質TGA....56
4.2 奈米級CMP二氧化矽粉末性質....57
4.2.1 奈米級CMP二氧化矽微觀及晶相結構分析....57
4.2.2 奈米級CMP二氧化矽官能基特性分析.... 57
4.2.3 奈米級CMP二氧化矽分散行為....59
4.3 兩性聚電解質對於CMP級二氧化矽粉體穩定性之影響....63
4.3.1 利用不同莫爾比兩性聚電解質對pH10之分散液影響....64
4.3.1.1 (AA:DMC=1:4)兩性聚電解質對pH10之分散影響... 64
4.3.1.2 (AA:DMC=2:3)兩性聚電解質對pH10之分散影響... 66
4.3.1.3 (AA:DMC=3:2)兩性聚電解質對pH10之分散影響... 68
4.3.1.4 (AA:DMC=4:1)兩性聚電解質對pH10之分散影響... 70
4.3.2 利用不同莫爾比兩性聚電解質對pH3之分散液影響...... 71
4.3.2.1 (AA:DMC=1:4)兩性聚電解質對pH3之分散影響.... 71
4.3.2.2 (AA:DMC=2:3)兩性聚電解質對pH3之分散影響.... 72
4.3.2.3 (AA:DMC=3:2)兩性聚電解質對pH3之分散影響.... 73
4.3.2.4 (AA:DMC=4:1)兩性聚電解質對pH3之分散影響.... 74
4.4 兩性聚電解質二氧化矽分散液沉降實驗 ................76
第五章 結論 ....79
參考文獻....81
附錄
A 兩性聚電解質1H-NMR....88
B 兩性聚電解質13H-NMR....88


1.王儷穎,在聚電解質溶液中的有效電荷, 碩士論文,國立中央大學, 桃園, 2006
2.J. Choi and M. F. Rubner, "Influence of the Degree of Ionization on Weak Polyelectrolyte Multilayer Assembly," Macromolecules, Vol.38, No. 1, 2005, pp. 116-124
3.I. Pochard, A. Foissy and P. Couchot, " Conductometric and microcalorimetric analysis of the alkaline-earth/alkali-metal ion exchange onto polyacrylic acid," Colloid & Polymer Science, Vol.277, No. 9, 1999, pp. 818-826
4.S.W. Cranford, C. Ortiz, M. J. Buehler, " Mechanomutable properties of a PAA/PAH polyelectrolyte complex: rate dependence and ionization effects on tunable adhesion strength," Soft Matter, Vol. 6, 2010, pp.4175-4188
5.斌華, 黃婉霞, 劉雪峰, "納米SiO2的光學特性研究," 材料科學與工程學報, Vol 21, No. 4, 2003, pp. 514-517
6.宋曉嵐, 王海波, 吳雪蘭, "納米顆粒分散技術的研究與進展," 化工進展,Vol 24, No. 1, 2005, pp. 47-52
7.趙志翰, 有機螢光物質的合成與分析, 碩士論文, 國立成功大學, 2005
8.艮文娟,馬文石,孫海燕, "兩性分子P(AMPS—CO—DMC)的合成、表徵及性能研究, " 應用化工, Vol.38, No. 6, 2009, pp. 850 -853
9.彭曉宏,盤思偉,沈家瑞, "氧化還原引發體系對 DMC/DM/AA 三元水溶液聚合的影響," 石油化工, Vol. 25, No. 8, 1999, pp. 543-547
10.薛冬樺,王記華, 蘇雪峰, 徐昆, 吳修利, 張文德,王丕, " P( AA – DAC) 兩性聚電解質水凝膠的合成及性質," 高等學校化學學報, Vol.29 , No. 1, 2008, pp.212-216
11.S. Lu, R. Liu, X. Sun , "A Study on the Synthesis and Application of an Inverse Emulsion of Amphoteric Polyacrylamide as a Retention Aid in Papermaking," Journal of Applied Polymer Science, Vol. 84, No.2, 2002, pp. 343-350
12.晏溶, 萬金泉, "納米級兩性聚丙烯醯胺造紙助劑的合成及其性能研究," 造紙科學與技術, Vol. 29, No. 1, 2010, pp.50-54
13.D. Wang, Z. Q. Song, S. B. Shang, "Characterization and Biodegradability of Amphoteric Superabsorbent Polymers, " Journal of Applied Polymer Science, Vol. 107, No. 6, 2008, pp. 4116–4120
14.Y. Wu, C. Wang, Jun Xu , "Aqueous Dispersion Polymerization of Amphoteric Polyacrylamide," Journal of Applied Polymer Science, Vol. 115, No. 2, 2010, pp. 1131-1137
15.陶征紅,彭曉宏,李立, 林裕衛,陳小剛, "泡沫體系分散聚合制備兩性聚丙烯醯胺,"石油化工, Vol. 35, No. 9, 2006, pp. 877-880
16.K. E. J. Barrett, Dispersion polymer in organic medis, New York, London:Wiley,1974
17.S. Xu, R. Wu, X. Huang, L. Cao, J. Wang, "Effect of the anionic-group /cationic-group ratio on the swelling behavior and controlled release of agrochemicals of the amphoteric, superabsorbent polymer poly(acrylic acid-co-diallyldimethylammonium chloride), " Journal of Applied Polymer Science, Vol. 102, No. 2, 2006, pp. 986-991
18.X. Li, Q. Dong, P. He, "Synthesis and Water Absorbency of Polyampholytic Hydrogels with Antibacterial Activity," Journal of Applied Polymer Science, Vol. 112, No. 1, 2009, pp. 439-446
19.靳麗強,徐清華,郭寶鈴,張廣渠, "兩性丙烯酸樹脂複鞣劑的合成及應用,"中國皮革,Vol.33, No. 15, 2004, pp. 3-6
20.M. Kamigaito, T. Ando, M. Sawamoto, "Metal-catalyzed living radical polymerization," Vol. 101, No. 12, 2001, pp. 3689-3745
21.K. Matyjaszewski, J. Xia, "Atom transfer radical polymerization, " Vol. 101, No. 9, 2001, pp. 2921-2990
22.J. S. Wang, K. Matyjaszewski, "Controlled/"living" radical polymerization. Atom transfer radical polymerization in the presence of transition-metal complexes," Vol. 127, No. 20, 1995, pp. 5614-5615
23.徐開鴻、高濂、孫靜、劉陽橋, "奈米粉體的分散及表面改性",五南出版社,2005
24.張家彰, 奈米級二氧化鋯膠體對微米級膠體容易穩定度影響的討論, 碩士論文, 私立東海大學, 台中, 2010
25.王英齡, 不同粒徑膠體粒子在多價電解質溶液的膠體沉降實驗, 碩士論文, 私立東海大學, 台中, 2006
26.G. D. Parfitt, Dispersion of Powders in Liquids, New Jersey, Applied Science Publishers, Inc., 1981.
27.D.H. Napper, "Polymeric Stabilization of Colloidal Dispersions,"Academic Press Inc., San Diego (1983)
28.雷大同、陳瑞祥,膠體懸浮液之流變性質研究,陶業雜誌,1991。
29.T. Gonzalez-Carreno, M. P. Morales, M. Gracia, C. J. Serna, "Preparation of uniform γ-Fe2O3 particles with nanometer size by spray pyrolysis," Mater. Lett., Vol. 18, No. 3, 1993, pp. 151-155.
30.D. Myers, "Surfaces, Interfaces, and Colloids", Wiley-VCH, 1999.
31.E. J. W. Verwey, J. Th. G. Overbeek, "Theory of the Stability of Lyophobic Colloids, "Elsevier, 1948
32.R. H. Ottewill, "Stability and instability in disperse systems," J. Colloid Inter. Sci., Vol. 58, 1977, pp.357-373.
33.D. H. Napper, "Polymeric Stabilization of Colloidal Dispersions," Academic Press Inc., San Diego, 1983.
34.B. Vincent, "The effect of adsorbed polymers on dispersion stability," Advanced in Colloid and Interface Science, Vol. 4, 1974, pp. 193-277.
35.E. D. Goddard and B. Vincent, Polymer Adsorption and Dispersion Stability, ACS Symposium series 240, Washington, D. C., 1984.
36.Th. F. Tadros, The Effect of Polymer on Dispersion Properties, Academic Press, London, 1982.
37.I. Piirma, Polymer Surfactants, New York:Marcel Dekker Inc., 1992.
38.Drew Myers "Surface, Interface, and Colloid : Principles and Applications, 2nd. Ed., " John Wiley&Sons. New York, 1999
39.R. J. Hunter, Foundations of colloid science, New York:OXFORD science publications, 1987.
40.T. K. Wang and R. Audebert, "Flocculation mechanisms of a silica suspension by some weakly cationic polyelectrolytes," J. Colloid Interface, Vol. 199, 1987, pp.459-465
41.S. Biggs, M. Habgood, G. J. Jameson, "Aggregate structures formed via a bridging flocculation mechanism," Chem. Eng. J., Vol. 80, No. 1, 2000, pp.13-22
42.L. Spinosa, P. A. Vesilind, Sludge into Biosolids: Processing, Disposal and Utilization, UK, IWA science publications, 2001
43.謝坤男, 聚電解質特性對污泥調理脫水之影響, 碩士論文, 國立台灣科技大學, 台北, 2004
44.R. Hogg, "Flocculation and dewatering, "International Journal of Mineral Processing, Vol.58, No.1-4, 2000, pp.223-236
45.N. Bohm and W. M. Kulicke, " Optimization of the use of polyelectrolytes for dewatering industrial sludge of various origins, "Colloid Polym. Sci., Vol. 275, No. 1, 1997, pp.73-81
46.O.J.Rojas, M.Ernstsson, R.D.Neuman, P.M.Claesson, " Effect of polyelectrolyte charge density on the adsorption and desorption behavior on mica, " Langmuir, Vol.18, No.5, 2002, pp.1604-1612
47.S. Y. Lee, J. Gregory, "The effect of charge density and molecular mass of cationic polymers on flocculation kinetics in aqueous solution, " Water Supply, Vol. 9 , 1991, pp.11-17
48.R. I. S. Gill, T. M. Herrington, "The Flocculation of Kaolin Suspension Using Polyethylenimine and Cationic Polyacrylamides of the Same Molar Mass but Different Charge Density," Colloids Surface, Vol.287, 1987, pp. 41-52
49.S. Y. Lee, J. Gregory, "The effect of charge density and molecular mass of cationic polymers on flocculation kinetics in aqueous solution, " Water Supply, Vol. 9 , 1991, pp.11-17
50.K.Glinel, A. Moussa, A. M. Jonas, A. Laschewsky, "Influence of polyelectrolyte charge density on the formation of multilayers of strong polyelectrolytes at low ionic strength," Langmuir, Vol. 18, No. 4, 2002, pp. 1408-1412
51.K. E. Bremmell, G. J. Jameson, S. Biggs, " Polyelectrolyte adsorption at the solid/liquid interface interaction forces and stability," Colloids Surfaces A, Vol. 139, No. 2, 1998, pp.199-211
52.S. T. Dubas, J. B. Schlenoff, " Factors controlling the growth of polyelectrolyte multilayers, " Macromolecules, Vol. 32, No. 24, 1999, pp.8153-8160
53.P. Somasundaran, X. Yu, " Flocculation/dispersion of suspensions by controlling adsorption and conformation of polymers and surfactants, "Adv. Colloid Interface Sci., Vol. 53, 1994, pp.33-49
54.I. L.Chang, C. P.Chu, D.J.Lee, "Filtration followed by expression characteristics of polymer flocculated clay sludge, " Journal of Colloid and Interface Science, Vol. 185, 1997, p. 335-340.
55.G. Kramer and P. Somasundaran, " Conformational behavior of polyelectrolyte complexes at the solid/liquid interface, " Langmuir, Vol.18, No. 24, 2002, pp. 9357-9361
56.S. L. Clark, M. F. Montague, and P. T. Hammond, " Ionic effects of sodium chloride on the templated deposition of polyelectrolytes using layer-by-layer ionic assembly, "Macromolecules, Vol. 30, No. 23, 1997, pp.7237-7244
57.S. T. Dubas, J. B. Schlenoff, " Factors controlling the growth of polyelectrolyte multilayers, "Macromolecules, Vol. 32, No. 24, 1999, pp. 8153-8160
58.B. Cabot, A. Deratani, A. Foissy, " Adsorption of poly(vinylimidazoles) onto silica surfaces, " Colloids Surfaces A., Vol. 139, No. 3, 1998, pp. 287-297
59.K. A. Vaynberga, N. J. Wagnera, R. Sharmab, P. Marticb, " Structure and extent of adsorbed gelatin on acrylic latex and polystyrene colloidal particles, " Journal of Colloid and Interface Science, Vol. 205, No.1, 1998, pp.131-140
60.B. Mahlting, J. F. Gohy, R. Jerome, M. Stamm, " Diblock polyampholytes at the silicon-water interface: adsorption as a function of block ratio and molecular weight, " Journal of Polymer Science Part B: Polymer Physics, Vol.39, No. 6, 2001, pp. 709-718
61.S. Neyret, L. Ouali, F. Candau, E. Pefferkorn, " Adsorption of polyampholytes on polystyrene latex: effect on colloid stability, "Journal of Colloid and Interface Science, Vol. 176, No. 1, 1995, pp.86-94
62.W. A. Bowman, M. Rubinstein, J.S. Tan, " Polyelectrolyte-gelatin complexation: light-scattering study, " Macromolecules, Vol. 30, No. 11, 1997, pp. 3262-3270
63.Y. Kamiyama, J. Israelachvili, " Effect of pH and salt on the adsorption and interactions of an amphoteric polyelectrolyte," Macromolecules, Vol. 25, No. 19, 1992, pp. 5081-5088
64.A.V.Dobrynin, S.P.Obukhov, M.Rubinstein, " Long-range multichain adsorption of polyampholytes on a charged surface," Macromolecules, Vol. 32, No. 17, 1999, pp. 5689-5700
65.Q. Zhang and W. Li , "Dispersion and rheological properties of concentrated silicon aqueous suspensions, " Powder Technology, Vol. 161, No. 2, 2006, pp. 130-134
66.王銳, 武榮瑞, 張大省, 徐僖, "PET/納米SiO2複合材料製備, " 高分子材料科學與工程, Vol. 18, No. 4, 2002, pp.182-184
67.劉吉延, 邱驥, 索相波, "不同分散劑對納米SiO2水中分散的影響, " 裝甲兵工程學報, Vol. 22, No. 1, 2008, pp. 81-82
68.牛永效, 王毅, 王思德, 付建飛, 聚丙烯酸鈉對鈉米SiO2分散穩定性能的影響, 東北大學學報, Vol. 29, No. 11, 2008, pp. 1641-1644
69.牛永效, 王毅, 王思德, 付建飛, "矽酸鈉和PAM對納米SiO2分散性能的影響, "東北大學學報, Vol. 28, No. 5, 2007, pp. 680-682
70.韓妮可, 以聚乙烯胺分散ZnO奈米粒子於水溶液系統, 碩士論文, 成功大學, 台南, 2009
71.陳衍生, 以螯合功能型高分子製備螢光CdS奈米複合微粒之研究, 碩士論文,南台科技大學, 台南, 2004
72.N. Das, H.S. Maiti, " Effect of Size Distribution of the Starting Powder on the Pore Size and its Distribution of Tape Cast Alumina Microporous Membranes, " Journal of the European Ceramic Society, Vol. 19, No. 3, 1999, pp. 341-345
73.M. R. B. Romdhanea, S. Bakloutia, J. Bouaziza, T. Chartier, J. F. Baumard, " Dispersion of Al2O3 concentrated suspensions with new molecules able to act as binder, " Journal of the European Ceramic Society, Vol. 24, No. 9, 2004, pp. 2723-2731
74.http://www.pharmainfo.net/free-books/pharmaceutical-suspensionsa-review
75.馬立治, 武德珍, 張強, "羧基中和程度對聚丙烯酸鈉分散性能的影響," 鞍山師範學院學報, Vol. 30, No. 1, 2003, pp. 46-47
76.J. Zhu, G. Zhang, J. Li, " Preparation of amphoteric polyacrylamide flocculant and its application in the treatment of tannery wastewater, " Journal of Applied Polymer Science, Vol. 120, No. 1, 2010, pp. 518-523
77.Y. Wu, C. Wang, J. Xu, "Aqueous dispersion polymerization of amphoteric polyacrylamide, "Journal of Applied Polymer Science, Vol. 115, No. 2, 2010, pp. 1131-1137
78.沈忠, 連虹艷, 周藝峰, 聶王焰, "硫酸銨水溶液中分散聚合法製備兩性共聚物P(AM-co-AA-co-DAC-co-DMC), "高分子學報, Vol. 1, No. 5, 2010, pp. 530-535
79.陳新, "GPC原理介紹, "復旦大學高分子科學系, 上海
80.張春曉, 張萬喜, 劉健, 白福臣, 潘振遠, "丙烯酸和丙烯醯胺共聚合的竟聚率測定及其共聚物的吸濕性能研究, "功能材料, Vol. 41, Vol. 6, 2010, pp. 943-947
81.M.M. Hessien, M.M. Rashad, R.R. Zaky, E.A. Abdel, K.A. El-Barawy, "Controlling the synthesis conditions for silica nanosphere from semi-brurned rise straw," Materials Science and Engineering B, vol. 162, 2009, pp. 14-21
82.楊復, 不同界面活性劑奈米二氧化矽膠體穩定性影響及矽晶圓研磨效率分析, 碩士論文, 國立臺北科技大學, 台北, 2010


連結至畢業學校之論文網頁點我開啟連結
註: 此連結為研究生畢業學校所提供,不一定有電子全文可供下載,若連結有誤,請點選上方之〝勘誤回報〞功能,我們會盡快修正,謝謝!
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top