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研究生:張恬嘉
研究生(外文):Tien-Chia Chang
論文名稱:整合CMOS-MEMS晶片與塑膠微流體基板之細胞計數系統
論文名稱(外文):Cell counting systems with integrated CMOS-MEMS chip and micro-fluidic plastic substrate
指導教授:黃榮堂黃榮堂引用關係
指導教授(外文):Jung-Tang Huang
口試委員:施文彬呂志誠蔡定江
口試委員(外文):Wen-Pin ShihChih-Cheng LuTing-Chiang Tsai
口試日期:2012-07-17
學位類別:碩士
校院名稱:國立臺北科技大學
系所名稱:機電整合研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:75
中文關鍵詞:CMOS-MEMS微機電製程微粒計數微流道封裝
外文關鍵詞:CMOS-MEMSMEMSBiochipParticles countingMicro-fluidic Channel package
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本研究主要是利用CMOS-MEMS製程技術與微機電製程技術製作微粒計數器。此研究主要分成三大部分製作,分別為(1)CMOS-MEMS計數晶片:經由台積電0.35μm 2P4M之製程方式代工製作,其上整合了計數結構以及放大電路。(2)微流道晶片:以塑膠片為基材,製作出與計數晶片配對之下電極與微流道。(3)計數晶片與微流道晶片整合:塑膠片鑽孔後將晶片嵌入其內,再利用PDMS將多餘的空隙填滿,最後以二甲基矽氧烷(poly-dimethylsiloxane;PDMS)為密封蓋,將計數晶片與微流道晶片密封。
  此計數裝置應用柯特爾原理為基礎,設計此計數晶片結構,當微粒通過計數晶片之結構孔洞時,使得結構孔洞內的穩定電流值產生變化,視微粒為一電阻,因此會造成計數孔洞的電流下降,而計算電流下降次數,即可獲得微粒數量。首先設計電極結構並利用模擬軟體CFD-RC模擬電極電場與粒子的運動,在依模擬的結果與應用之計數理論來設計製作計數裝置。本研究已成功的在CMOS-MEMS計數晶片上達成計算微粒之可行性,並且成功利用晶片上之放大電路量測出微粒通過於結構之訊號。

This study mainly used CMOS-MEMS process technology and Micro-Electro-Mechanical Systems (MEMS) technology to produce particle counters. This study divided into three parts, namely (1) CMOS-MEMS counting chip: CMOS-MEMS counting chips were manufactured by TSMC 0.35 μm 2P4M processes, which integrated the counting structure with amplifying circuit. (2) Micro-fluidic channel chip: Utilizing the plastic as the substrate, and produced the under electrodes and Micro-fluidic channel which matched with the CMOS-MEMS counting chip. (3) CMOS-MEMS counting chip and Micro-fluidic channel chip combination: The plastic substrate combines the functions of the sample injection area, separating structure, flow resistor, detection area, micro-fluidic channel, and capillary pump. Polydimethylsiloxane (PDMS), a polymer, and the plastic substrate are bonded to realize excellent biocompatibility.
Fundamentally, this counting device is based on Coulter principle, when particles passed through the counting structure, the steady electric current will decrease. Counting the number of decreased current will get the number of particles. First, we designed the electrode structure, and used the simulation software called CFD-RC to simulate the electric field and the particles’ movement. According to the result of simulation and the principle of counting, we produced the counting device.
Successfully, this study has proven the feasibility of counting particles by using the CMOS-MEMS counting chip, and measured the current signal of particles passing through the micropore structure by amplifying circuit.

摘 要 i
ABSTRACT ii
誌 謝 iv
目 錄 v
表目錄 viii
圖目錄 ix
第一章 緒論 1
1.1 研究背景 1
1.1.1 研究動機 1
1.1.2 生物微粒檢驗技術 2
1.1.3 微機電與CMOS-MEMS系統 5
1.1.4 微機電封裝 7
1.2 文獻回顧 8
1.2.1 生物微粒計數 8
1.2.2 毛細力 10
1.2.3 IC晶片與微流道封裝 12
1.3研究方法 16
1.3.1 研究方法 16
1.3.2 研究目的 17
第二章 原理與模擬 19
2.1微粒計數原理 19
2.2操控原理 21
2.2.1毛細作用的基本方程式 21
2.2.2 公式推導 23
2.3微粒運動模擬 24
2.4轉阻抗放大器電路原理 26
2.4.1 四種不同的放大器形式 26
2.4.2 轉阻抗放大器特性 28
第三章 晶片設計製作與封裝 29
3.1 晶片設計簡介 29
3.2 CMOS-MEMS 計數晶片設計與製作 30
3.2.1 CMOS-MEMS計數器晶片佈局與製作 30
3.2.2 CMOS-MEMS計數晶片製程 32
3.3微流道晶片設計與製作 39
3.3.1微流道製作 39
3.4 CMOS-MEMS計數晶片與微流道晶片封裝 42
3.4.1 封裝方式一 42
3.4.2 封裝方式二 43
第四章 計數晶片量測結果與討論 45
4.1結構量測 45
4.1.1量測儀器設備 45
4.1.2 不同介質與環境的影響 48
4.1.3 實驗樣本 49
4.1.4 量測實驗步驟 50
4.1.5 量測結果 50
4.1.6計算驗證 54
4.2結構封裝量測 54
4.3電路量測 62
4.3.1量測儀器設備 62
4.3.2 電路量測 63
4.3.3 電路與結構量測 65
4.4 討論 66
第五章 結論與未來展望 68
5.1 結論 68
5.2 未來展望 68
參考文獻 71
符號彙編 74
作者簡介 75

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