臺灣博碩士論文加值系統

本篇論文介紹了一種撓性架構的雙軸壓電致動撓性平台，用此平台可以達到精密定位控制的目的。但是壓電致動器有非線性的遲滯現象，所以當撓性平台移動時，會因為遲滯現象產生誤差，減少精密定位的精度。為了補償這誤差，本論文提出以前饋控制器為基礎的順滑模態控制器來補償遲滯現象產生的誤差。本論文中將用新穎的演算法，電荷搜尋演算法來尋找建構遲滯模型所需要的最佳化形變參數，並且完成撓性平台的完整建模。將電荷搜尋演算法所得到的參數建構出遲滯模型後，藉此設計出前饋控制器，並結合順滑控制理論完成順滑控制器。最後除了比對模擬與實驗的結果是否一致外，透過實驗證明此論文所設計的控制器可有效的消除撓性平台X軸、Y軸以及雙軸同動時的位移誤差量，達到精密定位控制的目的。

This paper presents a micropositioner which utilizes a monolithic flexure-based mechanism and is actuated by the embedded piezoelectric actuators to achieve the translations in the X- and Y-axes. Due to the nonlinear hysteresis of piezoelectric actuators, flexure-based mechanism has error of displacement as it moves. To compensate this error, the paper uses a feedforward based sliding mode controller. This paper use a novel algorithm Charge system search to identify the optimal parameters which construct the Bouc-Wen and Duhem Model. Finally, using the feedforward based sliding mode controller with force feedback control can eliminate the hysteresis error successfully.

中文摘要 i
英文摘要 ii
誌謝 iii
目錄 iv
表目錄 vi
圖目錄 vii
第一章 緒論 1
1.1 研究背景 1
1.2 研究目的 2
1.3 文獻回顧 3
1.4 本文大綱 6
第二章 參數最佳化演算法 8
2.1 基因演算法 8
2.2 粒子群演算法 8
2.3 電荷搜尋演算法 9
2.3.1 電荷搜尋演算法之基本概念 10
2.3.2 電荷搜尋演算法之計算流程 12
2.4 改良的電荷搜尋演算法 19
第三章 雙軸壓電致動撓性平台 27
3.1 壓電致動撓性平台系統 27
3.2 壓電致動撓性平數學模型 30
3.2.1 壓電致動撓性平之物理模型 30
3.2.2 壓電致動撓性平之遲滯模型 32
3.2.3 遲滯模型之討論 35
第四章 順滑模態控制器之設計 43
4.1 順滑模態控制之原理 43
4.1.1 等效控制律的設計 44
4.1.2 切換控制律的設計 46
4.1.3 具有模擬力回授的順滑模態控制器 48
4.2 積分型順滑面控制 49
4.3 以前饋控制器為基礎的順滑模態控制器 51
4.4 順滑模態控制器之模擬結果 54
第五章 實驗結果與討論 64
5.1 單軸致動控制實驗 64
5.2 雙軸同動控制實驗 78
第六章 結論 85
6.1 結論 85
6.2 未來展望與建議 86
參考文獻 87

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