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研究生:吳智忠
研究生(外文):Chih-Chung Wu
論文名稱:磁控濺鍍鉻鋁矽氮化物薄膜於鋁合金壓鑄用模具鋼上之製程探討與性質研究
論文名稱(外文):Process and Property investigations of Cr-Al-Si-Ncoating on the tool steel for aluminum die casting bypulsed DC magnetron sputtering
指導教授:楊永欽副教授
口試委員:李志偉教授張世賢副教授
口試日期:2012-06-13
學位類別:碩士
校院名稱:國立臺北科技大學
系所名稱:材料及資源工程系研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:59
中文關鍵詞:鉻鋁矽氮化物耐腐蝕熔融A380 鋁合金
外文關鍵詞:CrAlSiNanti-corrosion performancemolten A380 aluminum alloy
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本研究在工具鋼H13 表面,用脈衝直流磁控濺射沉積系統鍍製四種不同的鉻
鋁矽氮化物(CrAlSiN)薄膜,矽含量分別為(1.6%、4.4%、7.5%、10.8%)的薄膜,薄
膜的結晶結構以低掠角X 光射線繞射儀鑑定,薄膜的表面與橫斷面形貌以場發射
掃描式電子顯微鏡觀察;本研究再利用壓痕儀進行薄膜的硬度與楊氏係數測量,
鍍膜的附著性與耐磨性分別使用刮痕試驗機、HRC-DB 與磨耗試驗機測試,並且
透過鋁合金融湯680℃浸泡試驗來檢測鍍製於工具鋼H13 薄膜的抗熱侵蝕與抗沾
粘性。由實驗結果發現,鉻鋁矽氮化物薄膜的顯微結構與機械特性受矽含量所影
響,鉻鋁矽氮化物(CrAlSiN)薄膜的晶粒尺寸隨矽含量增加而減小,工具鋼H13 的
鉻鋁矽氮化物(CrAlSiN)鍍膜的耐腐蝕藉由在攝氏680℃下浸泡在A380 鋁合金液中
持續2、4、6 小時進行比較,分析鍍層的表面與橫切面。而結論是在熔融A380 鋁
合金液中的耐腐蝕性和矽(Si)的含量有相關性的影響。

In this study, the surface coatings used different Si content respectively(1.6 %,4.4
%,7.5 %,10.8 %). Coatings were fabricated on the H13 tool steels by pulsed DC
magnetron sputtering systems,. The crystalline structure of thin film was determined by
glancing angle X-ray diffractmeter (XRD). The surface and cross-sectional
morphologies of thin films were examined by a field emission scanning electron
microscopy (FE-SEM). The hardness and Young''s modulus of thin film were evaluated
by a nanoindenter. The adhesion and tribological properties of coatings were
determined by the scratch tester and pin-on-disk wear tester, respectively. It was found
that the microstructure and mechanical properties of CrAlSiN thin films were
influenced by the silicon content. The grain size of CrAlSiN thin film decreased with
increasing Si contents. The anti-corrosion performance of CrAlSiN coated H13 tool
steels were evaluated by immersion in molten A380 aluminum alloy at 680℃ for 2, 4
and 6 hrs. The surface and cross-sectional morphologies of aluminum dipped coatings
were further examined. It was concluded that the Si had relative influences on the
corrosion resistance in molten A380 aluminum alloy。

目錄
摘要 ....................................................I
ABSTRACT ..............................................II
誌謝 .................................................III
目錄 ................................................. IV
圖目錄 ...............................................VII
表目錄 .................................................X
第一章 緒論 ...........................................1
1.1 前言 ...............................................1
1.2 研究目的與動機 .....................................2
第二章 文獻回顧 ........................................3
2.1 壓鑄工業創新與發展 .................................3
2.2 模具失效的成因 .....................................6
2.3 模具失效的解決之道 .................................6
2.3.1 模具燒附機制 .....................................7
2.4 物理氣相蒸鍍(PVD)...................................8
2.4.1 濺鍍(Sputter) ....................................8
2.4.1.1 濺鍍機制 .......................................9
2.4.2 直流放電型態 ....................................10
2.4.3 DC直流濺鍍沉積 ..................................10
2.4.4 RF射頻濺鍍沉積 ..................................11
2.4.5 脈衝直流磁控濺鍍系統 ............................12
2.5 奈米薄膜材料 ......................................15
2.5.1 薄膜材料與奈米薄膜材料 ..........................15
2.5.2 奈米薄膜材料的特性 ..............................15
2.5.3 Hall–Petch 理論.................................17
2.5.4 薄膜的組織 ......................................20
2.5.5 奈米複合薄膜 ....................................21
第三章 實驗設備與研究方法 ............................23
3.1 實驗材料 ..........................................23
3.2 實驗流程 ..........................................23
3.2.1 試片製作 ........................................24
3.2.2 熱處理 ..........................................25
3.2.3 試片鍍膜前之前處理 ..............................26
3.3 濺鍍系統 (Sputtering system) ......................26
3.3.1 CrAlSiN鍍膜的製備 ...............................27
3.3.2 鍍膜製程 ........................................28
3.4 鍍膜性質分析 ......................................29
3.4.1 微結構分析實驗 ..................................29
3.4.1.1 成份分析試驗 ..................................29
3.4.1.2 XRD相結構試驗 .................................30
3.4.1.3 表面粗糙度試驗 ................................30
3.4.1.4 橫切面形貌試驗 ................................30
3.4.2 機械性質分析試驗 ................................31
3.4.2.1 薄膜附著品質試驗 ..............................31
3.4.2.2 磨耗試驗 ......................................32
3.4.2.3 奈米刮痕試驗 ..................................32
3.4.3 鋁液熔蝕試驗 ....................................34
3.4.3.1 微結構及成份試驗 ..............................35
3.4.3.2 抗鋁湯沾黏性試驗 ..............................35
第四章 結果與討論 ...................................36
4.1 鍍膜分析 ..........................................36
4.1.1 XRD相結構分析成份分析............................37
4.1.2 表面粗糙度分析 ..................................38
4.1.3 SEM橫切面形貌分析 ...............................39
4.2 機械性質分析 .....................................40
4.2.1 硬度試驗分析 ....................................41
4.2.2 磨耗試驗分析 ....................................43
4.2.3 奈米刮痕試驗(薄膜附著性試驗)分析 ................44
4.3 鋁液浸泡分析 .......................................48
4.3.1抗鋁湯沾黏分析 ....................................48
4.3.2 微結構成份分析 ...................................51
第五章 結論 .........................................55
參考文獻 .....................................56


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