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Because the production technology is developing continuously, the quality of production and precision is demanded rigor and rigor. Therefore, controlling the cleanliness is very important during the process of production. In order to make a better production environment, the cleanroom must be developed and set all kinds of standards to meet the required level of cleanroom for process and production requirement. Recently, the High-Tech industry is fast flourishing in Taiwan. The related indices such as value output, exports, employees and R&D expenses showed that the High-Tech industry has become the primary contributor of economic development. Therefore, energy consumption management in the High-Tech industry deserves more attention, especially for Taiwan which energy is shortage. The study define the method of calculating energies to be consumed by semiconductor manufacturing equipment as well as in a clean room when the semiconductor manufacturing equipment is used in order to grasp energy consumption of plant utilities for the equipment and items related to the equipment.
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