矽奈米線電晶體壓阻性質與低頻雜訊分析
研究生：梁鐵籌 指導教授：康定國博士
正修科技大學電子工程研究所
摘 要
本論文主要是針對矽奈米線電晶體的壓阻性質與其低頻雜訊量測分析這兩部分做研究與討論。首先是探討矽奈米線電晶體的壓阻性質，也就是使用四點式晶圓彎曲技術對矽奈米線施加外部單軸向的機械應力，並利用應變規的變化量來直接測得矽奈米線所受到的應力大小，並且萃取出矽奈米線電晶體的壓阻係數為46×10-11 Pa-1以及應變計數值為65，這個數值相當接近矽基塊的壓阻性質。

第二部份則是對矽奈米線電晶體進行低頻雜訊量測及分析，也就是運用上半部份我們所萃取到應變計數值，以及我們量測到的雜訊大小，進而評估低頻雜訊分析中的訊雜比值，以及觀察關係奈米線電晶體施加不同的應力後壓阻性質改變與雜訊振福的關係，進而瞭解矽奈米線晶體在施加應力後低頻雜訊的物理機制。

Study on Piezoresistive Properties and Low Frequency Noise Characteristics of Silicon Nanowire Transistors
Student: Tie-Chou Liang Advisor: Ting-Kuo Kang
Department of Electronic Engineering
Cheng Shiu University
Kaohsiung County, Taiwan, Republic of China
Abstract
In this thesis is to study the piezoresistive properties of silicon nanowire transistors and its low frequency noise characteristics . Firstly, we discuss the piezoresistive properties of SiNWFETs through a simple four-point bending technique (4PB). The 4PB can apply an external uniaxial mechanical stress on SiNWFETs. The magnitude of mechanical stress can be directly measured by a foil strain gauge mounted on the surface of SiNWFETs. The piezoresistive coefficient(π) of 39×10-11 Pa-1 and gauge factor(GF) of 65 for SiNWFETs can be obtained. The π and GF appear to be consistent with the piezoresistive properties of SiNWFETs.

The second part is to explore the low frequency noise characteristics of SiNWFETs. Based we extracted into the strain gauge values and the noise amplitude (A), thereby obtaining the SNR value of the noise analysis. And then we observed relationship between SiNW’s resistance changes and Low-frequency noise magnitude when we applied stress to the SiNWFETs. Finally we understand the physical mechanism of Low-frequency noise in SiNWFETs can be changed when the stress is applied to SiNWFETs.

目錄
論文摘要(中文) Ⅰ
論文摘要(英文) Ⅱ
致謝 Ⅲ
目錄 Ⅴ圖目錄 Ⅶ
表目錄 Ⅸ第一章 緒論
1-1 研究背景與動機 1
1-2 論文架構 7
第二章 矽奈米線
2-1 矽奈米線製程 9
2-2 矽奈米線電性量測 15
第三章 低頻雜訊-應力量測系統
3-1 低頻雜訊量測系統 18
3-2 應力量測系統 21
3-3 有限元素法應力量測模擬 27
3-4 低頻雜訊-應力量測系統 28
第四章 矽奈米線電晶體之壓阻性質
4-1 矽奈米線電晶體結構 30
4-2 矽奈米線電晶體壓阻性質 32
4-3 矽奈米線電晶體應變計數值 40
第五章 矽奈米線電晶體雜訊量測與分析
5-1 矽奈米線電晶體低頻雜訊量測 48
5-2 矽奈米線電晶體SNR定義與公式 52
5-3 矽奈米線電晶體雜訊量測分析 56
第六章 結論與未來展望
6-1 結論 68
6-2 未來展望 70
參考文獻 72

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