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研究生:陳明山
研究生(外文):Ming-Shan Chen
論文名稱:微鑽針被覆多層類鑽碳膜之鑽削性能與微孔品質之研究
論文名稱(外文):The drilling performance and hole quality of multilayer diamond-like carbon deposited on micro-drill
指導教授:高文顯高文顯引用關係
指導教授(外文):Wen-Hsien Kao
學位類別:碩士
校院名稱:建國科技大學
系所名稱:自動化工程系暨機電光系統研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2013
畢業學年度:101
語文別:中文
論文頁數:98
中文關鍵詞:類鑽碳印刷電路板微孔鑽削性能
外文關鍵詞:Diamond like carbonPrinted circuit boardMicro-drills performance
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本研究利用非平衡磁控濺鍍系統,以固體碳靶、甲烷、乙炔及鋯靶,被覆含鋯氫類鑽碳膜於微鑽針上研究其在印刷電路板的鑽削性能。研究鍍膜共分為三階段:第一階段為改變鋯靶電流,第二階段為改變中介層層數,第三階段,因為第二階段鍍層硬度太低所做的調整參數,可達到較高的硬度。被覆鍍膜之微鑽針在印刷電路板微鑽孔試驗,可以獲得較高的微鑽針壽命及改善微鑽孔品質。經實驗與分析結果顯示,被覆類鑽碳鍍層之微鑽針根據其直徑磨耗量、釘頭大小與孔壁粗糙度作評估均可改善微孔品質與提升微鑽針壽命,以S3鍍層的改善最多,可提升3倍壽命,達到鑽削至6000孔以上,可作為印刷電路板微鑽孔鑽針應用之鍍層。
The study is to research the drilling performance of a-C:H:Zr coatings prepared by sputtering graphite ,zirconium targets ,CH4 and C2H2 used unbalanced magnetron sputtering system. The stusy contains three stages .The objective is study the influence of Zr target current on the drilling properties of coatings in the first stage. It change the interlayer was from one multilayer to four multilayer in the second stage. Base on the second stage, results the coating hardness is low. In order to improve the hardness, the coating have been designed a multilayer structure. It contain both hard and soft layer in the multilayer coating in the third stage. The drilling performance of the coated micro-drills is evaluated by conducting high-speed through-hole drilling tests using printed circuit board (PCB) specimens. The service life of the coated micro-drills is assessed utilizing three different criteria, namely the nail head ratio, surface roughness of the drilled hole, and diameter of drilled hole, respectively. The result display that the S3 coating process the test drilling performance and the highest drilling life time. It can improve the life time of drilling above 6000 holes drilled.
總目錄
摘要 I
Abstract II
致謝 III
總目錄 IV
表目錄 IX
頁次 IX
圖目錄 X
第一章 緒論 1
1-1前言 1
第二章 理論基礎與文獻回顧 3
2-1類鑽碳基本性質 3
2-2類鑽碳成膜法 3
2-3利用非平衡磁控濺鍍法製DLC膜的特性 4
2-4 DLC鍍覆在微鑽針上之特性 6
2-5 微鑽孔 7
2-6微鑽針 7
2-6-1鑽孔機 7
2-6-2微鑽針磨耗 8
2-6-3小直徑鑽孔加工 9
2-7微孔孔壁粗糙度與釘頭大小觀察 10
2-8微鑽針壽命標準 11
2-8-1釘頭壽命標準之影響因子 11
2-8-2孔壁粗糙度壽命標準之影響因子 12
2-8-3孔徑大小壽命標準之影響因子 13
2-8-4刀角與刀腹磨耗壽命標準之影響因子 13
2-8-5微鑽針折損因素 14
第三章 實驗方法與步驟 16
3-1實驗目的 16
3-2實驗流程 16
3-3實驗方法與規劃 17
3-3-1濺鍍參數與鍍膜安排 17
3-3-2實驗材料 17
3-3-3 附著性實驗 17
3-3-3-1 壓痕實驗 17
3-3-3-2 刮痕試驗 18
3-3-4 奈米硬度實驗 18
3-3-5微鑽削試驗 18
3-3-6直徑磨耗測試 19
3-3-7微切片觀察釘頭大小與孔壁粗糙度測試 19
3-3-8刀腹與刀角磨耗測試 23
3-3-9 孔徑大小尺寸量測 23
3-4實驗設備 23
第四章 實驗結果與討論 25
4-1第一階段含鋯鍍層之濺鍍時改變電流大小之實驗結果與討論 25
4-1-1鍍層硬度及附著性 25
4-1-1-1 壓痕試驗 25
4-1-1-2 刮痕試驗 25
4-1-2微鑽針直徑磨耗 25
4-1-3微鑽針平均刀腹與刀角磨耗 26
4-1-4微孔釘頭大小 27
4-1-5孔壁粗糙度 27
4-1-6孔徑大小 27
4-2第二階段含鋯鍍層之濺鍍時改變鍍層層數之實驗結果與討論 28
4-2-1鍍層硬度及附著性 28
4-2-1-1 壓痕試驗 28
4-2-1-2 刮痕試驗 28
4-2-2微鑽針直徑磨耗 29
4-2-3微鑽針平均刀腹與刀角磨耗 29
4-2-4微孔釘頭大小 30
4-2-5孔壁粗糙度 30
4-2-6微孔孔徑大小 31
4-3第三階段含鋯鍍層之濺鍍時改變鍍層層數之實驗結果與討論 31
4-3-1鍍層硬度及附著性 31
4-3-1-1 壓痕試驗 31
4-3-1-2 刮痕試驗 32
4-3-2微鑽針直徑磨耗 32
4-3-3微鑽針平均刀腹與刀角磨耗 32
4-3-4微孔釘頭大小 33
4-3-5孔壁粗糙度 33
4-3-6微孔孔徑大小 34
4-4微鑽針磨耗面 34
4-5微鑽孔磨耗表面 35
第五章 結論與未來展望 36
5-1結論 36
5-2未來展望與建議 36
第六章 參考文獻 37

表目錄
頁次
表2- 1 孔位彎曲精度的原因 43
表3- 1 Deposition parameter of a-C:H coatings(first stage) 43
表3- 2 Deposition parameter of a-C:H coatings(second stage) 44
表3- 3 Deposition parameter of a-C:H coatings(third stage) 45
表4- 1 The Nano-indenter hardness of a-C:H coatings 46
表4- 2 Adhesion analysis of a-C:H coatings 46

圖目錄
頁次
圖3- 1 實驗流程圖 47
圖3- 2 FR-4雙面板之疊構圖(a)4層板(b)6層板 48
圖3- 3 微鑽針各部位名稱示意圖 49
圖3- 4壓痕附著性等級示意圖 49
圖3- 5 實驗鑽削參數 50
圖3- 6實驗架構示意圖 50
圖3- 7切片取樣 51
圖3- 8釘頭與孔壁粗糙度量測之切片灌膠 52
圖3- 9磨片順序與砂紙番號示意圖 (虛線為磨除區) 53
圖3- 10刀角、刀腹磨耗示意圖 55
圖4- 1第一階段鍍層鑽2000、4000和6000孔後之直徑磨耗 56
圖4- 2第一階段鍍層鑽2000、4000和6000孔後之平均刀腹磨耗 56
圖4- 3第一階段鍍層鑽6000孔後之刀腹磨耗實際圖形 57
圖4- 4第一階段鍍層鑽2000、4000和6000孔後之刀角磨耗 57
圖4- 5第一階段鍍層鑽4000孔後之微鑽針表面型態 58
圖4- 6第一階段鍍層鑽2000、4000和6000孔後之釘頭大小 58
圖4- 7第一階段鍍層微鑽針鑽6000孔之釘頭大小SEM圖 59
圖4- 8第一階段鍍層鑽2000、4000和6000孔後之孔壁粗糙度 60
圖4- 9第一階段鍍層微鑽針鑽6000孔後孔壁粗糙度SEM圖: 61
圖4- 10第一階段鍍層鑽2000、4000和6000孔後之孔徑大小 62
圖4- 11第一階段鍍層鑽6000孔後之孔徑實際圖形 63
圖4- 12第二階段鍍層鑽2000、4000和6000孔後之直徑磨耗 64
圖4- 13第二階段鍍層鑽2000、4000和6000孔後之刀腹平均磨耗 64
圖4- 14第二階段鍍層鑽 6000孔後平均刀腹磨耗實際圖形 65
圖4- 15第二階段鍍層鑽2000、4000和6000孔後之刀角磨耗 65
圖4- 16第二階段鍍層鑽2000、4000和6000孔後之釘頭大小 66
圖4- 17第二階段鍍層微鑽針鑽6000孔之釘頭大小SEM圖 67
圖4- 18第二階段鍍層鑽2000、4000和6000孔後之孔壁粗糙度 68
圖4- 19第二階段鍍層微鑽針鑽6000孔後孔壁粗糙度SEM圖: 69
圖4- 20第二階段鍍層鑽2000、4000和6000孔後之孔徑大小 70
圖4- 21第二階段鍍層鑽6000孔後之孔徑實際圖形 71
圖4- 22第三階段鍍層鑽2000、4000和6000孔後直徑磨耗 72
圖4- 23第三階段鍍層鑽2000、4000和6000孔後刀腹平均磨耗 72
圖4- 24第三階段鍍層鑽6000孔後平均刀腹磨耗實際圖形 73
圖4- 25第三階段鍍層鑽2000、4000和6000孔後刀角磨耗 73
圖4- 26第三階段之微鑽針表面型態 74
圖4- 27第三階段鍍層鑽2000、4000和6000孔後之釘頭大小 74
圖4- 28第三階段鍍層微鑽針鑽6000孔之釘頭大小SEM圖 75
圖4- 29第三階段鍍層鑽2000、4000和6000孔後之孔壁粗糙度 76
圖4- 30第三階段鍍層微鑽針鑽6000孔後孔壁粗糙度SEM圖 77
圖4- 31第三階段鍍層鑽2000、4000和6000孔後之孔徑大小 78
圖4- 32第三階段鍍層鑽6000孔後之孔徑實際圖形 79
圖4- 33 uncoated 微鑚針在鑽2000、4000、6000與10000孔後的磨耗情形之SEM圖 80
圖4- 34 10000孔微鑽針磨耗面SEM圖 81
圖4- 35 Uncoated 10000孔微鑽針EDS圖 82
圖4- 36 未鑽孔微鑽針EDS圖 83
圖4- 37 M2 10000孔微鑽針EDS圖 84
圖4- 38鑽削10000孔後孔緣磨損情形 85

1.R. Arvind Singh, Kyounghwan Na, Jin Woo Yi, Kwang-Ryeol Lee, Eui-Sung Yoon, "DLC nano-dot surfaces for tribological applications in MEMS devices", Applied Surface Science, Vol. 257 (2011) 3153-3157
2.Bharat Bhushan, "Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices", Microelectronic Engineering, Vol. 84 (2006) 387-412.
3.James C. Sung , Ming-Chi Kan, Michael Sung, "Fluorinated DLC for tribological applications" Int. Journal of Refractory Metals &; Hard Materials ,Vol. 27 (2009) 421–426
4.R. Paul, S. Dalui, S.N. Das, R. Bhar, A.K. Pal, "Hydrophobicity in DLC films prepared by electrodeposition technique", Applied Surface Science, Vol. 255 (2008) 1705-1711
5.Bharat Bhushan,"Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: recent developments",Diamond and Related Materials,vol 8(1999)1985-2015
6.A.A. Voevodin, M.S. Donley, J.S. Zabinski,"Pulsed laser deposition of diamond-like carbon wear protective coatings: a review",Surface and Coatings Technology,92(1997)42-49
7.Camino, A.H.S. Jones., D. Mercs,D.G. Teer, “High performance sputtered carbon coatings for wear resistant applications”, Vaccum,52 (1999) 125-131.
8.D.Y. Wang, C.L. Chang, W.Y. Ho, “Characterization of hydrogen-free carbon films deposited by pulsed plasma technology”, Thin Solid Films, 355-356 (1999) 246-251.
9.P. Villiger, C. Sprecher, J.A. Peters,“Parameter optimization of Ti-DLC coatings using statistically based methods”, Surface and Coatings Technology, 116-119 (1999) 585-590.
10.V.N. Inkin, G.G. Kirpilenko, A.A. Dementjev, K.I. Maslakov,“A superhard diamond-like carbon film”, Diamond and Related Materials,9 (2000) 715-721.
11.T. Okada, S. Yamada, Y. Takeuchi., T. Wada, “Formation of carbon nitride films with high N/C ratio by high-pressure radio frequency magnetron sputtering”, Journal of Applied Physics, 78 (1995) 7416-7418.
12.N. Axen, G.A. Botton, et al., “Incorporation of nitrogen in sputtered carbon films”, Surface and Coatings Technology , 2-3 (1996) 262-268.
13.R. Kaltofen, T. Sebald, G. Weisc, “Plasma diagnostic studies to the carbon nitride film deposition by reactive r.f. magnetron sputtering”, Thin Solid Films, 290-291 (1996) 112-119.
14. H. Gruger, D. Selbmann, E. Wolf,A. Leonhard, B.Arnold, “CNχ-layers prepared by plasma assisted chemical vapour deposition”, Surface and Coatings Technology, 86-87 (1996) 409-414.
15. S. Veprek, J. Weidmann, F. Glatz, “Plasma chemical vapor deposition and properties of hard Cr3N4 thin films”,Journal of Vacuum Science &; Technology, 13 (1995) 2914-2919.
16. R. Padiyath, S.V. Babu, “ Incorporation of nitrogen into diamond-like carbon films”, Diamond and Related Materials, 3 (1994) 210-221.
17. M. Diani, A. Mansur, L. Kubler, J.B. Bischoff, D. Bolmont, “Search for carbon nitride CNx compounds with a high nitrogen content by electron cyclotron resonance plasma deposition”, Diamond Related Materials, 3 (1994) 264-269.
18. M. Lu, A. Bensaoula, A. Schultz,“ Formation of carbon nitride films on Si(100) substrates by electron cyclotron resonance plasma assisted vapor deposition ”, Applied Physics Letters, 65 (1994) 696-698.
19. H. Liu, A. Tanaka, T. Kumagai, “Influence of sliding mating materials on the tribological behavior of diamond-like carbon films”, Thin Solid Films, 352 (1999) 145-150.
20. I.S. Trakhtenberg, A.B. Vladimirov, A.P. Rubshtein, “Improved-quality needles with a diamond-like coating (DLC) for stitching machines and their production technology”, Diamond and Related Materials, 8 (1999) 1765-1769.
21. Ahmad, P. D. Maguire, P. Lemoine, S. S. Roy, J. A. McLaughlin, "Deposition of carbon films onto metal and silicon substrates by filtered cathodic vacuum arc, plasma enhanced CVD and unbalanced magnetron sputtering", Diamond and Related Materials, Vol. 13 (2004) 1346-1349
22. Ahmad, P. D. Maguire, P. Lemoine, S. S. Roy, J. A. McLaughlin, "Deposition of carbon films onto metal and silicon substrates by filtered cathodic vacuum arc, plasma enhanced CVD and unbalanced magnetron sputtering", Diamond and Related Materials, Vol. 13 (2004) 1346-1349
23. Hirotaka Ito, Kenji Yamamoto, Masabumi Masuko, "Thermal stability of UBM sputtered DLC coatings with various hydrogen contents", Thin Solid Films, Vol. 517 (2008) 1115-1119
24. Ahmad, S.S. Roy, P.D. Maguire, P. Papakonstantinou, J.A. McLaughlin, "Effect of substrate bias voltage and substrate on the structural properties of amorphous carbon films deposited by unbalanced magnetron sputtering",Thin Solid Films, Vol. 482 (2005) 45-49
25. Yawei Hu , Liuhe Li , Xun Cai , Qiulong Chen , Paul K. Chu, “Mechanical and tribological properties of TiC/amorphous hydrogenated carbon composite coatings fabricated by DC magnetron sputtering with and without sample bias ” ,Diamond &; Related Materials, 16 (2007) 181–186.
26. J. Robertson,"Diamond-like amorphous carbon"Materials Science and Engineering: R: Reports vol.37(2002)192-281
27. 金原粲,白木靖寬,吉田真史,“薄膜工程學”,(2004), p 1-7~1-13.
28. J. Robertson,"Properties of diamond-like carbon"Surface and Coatings Technology vol.50 (1992)185-203
29. C.W. Chu , Jason S.C. Jang , H.W. Chen , T.L. Chuang, “ Enhanced wear resistance of the Cr-based thin film coating on micro drill by doping with W–C–N” , Thin Solid Films, 517 (2009) 5197–5201.
30. James C. Sung, Ming-Chi Kan, Michael Sung, “ Fluorinated DLC for tribological applications” ,Int.Journal of Refractory Metals &; Hard Materials, 27 (2009) 421-426.
31. S. Ma¨ndl, R. Gu¨ nzel, B. Rauschenbach, R. Hilke b, E. Kno¨ sel, K. Ku¨nanz,“ Characterization of drills implanted with nitrogen plasma immersion ion implantation” ,Surface and Coaings Technology, 103-104 (1998) 161-167.
32. M. Zolgharni, B.J. Jones, R. Bulpett, A.W. Anson, J. Franks, “ Energy efficiency improvements in dry drilling with optimised diamond like carbon coatings” , Diamond &; Related Materials, 17 (2008) 1733–1737.
33. Jean M. Dascha, Carolina C. Ang, Curtis A. Wong, Yang T. Cheng, Anita M. Weiner, Leo C. Leva, Erkan Konca, “ A comparison of five categories of carbon-based tool coatings for dry drilling of aluminum” ,Surface &; Coaings Technology, 200 (2006) 2970-2977.
34. Xiaozhong Song, Junghsen Lieh, David Yen, “Application of small-hole dry drilling in bimetal part” , Journal of Materials Processing Technology, 186 (2007) 304–310.
35. James C. Sung , Ming-Chi Kan, Michael Sung, "Fluorinated DLC for tribological applications" Int. Journal of Refractory Metals &; Hard Materials Vol. 27 (2009) 421–426
36. 李鎮日,“影響鑽頭之乾切削壽命探討” , 民國69年,國立成功大學碩士論文.
37. 朱惠民,“固質潤滑劑應用於微孔鑽製特徵研究”,民國70年,國立成功大學碩士論文.
38. M.C. Kang, S.K. Je , K.H. Kim, B.S. Shin , D.H. Kwon , J.S. Kim ,"Cutting performance of CrN-based coatings tool deposited by hybrid coating method for micro drilling applications" Surface &; Coatings Technology 202 (2008) 5629–5632
39. M.C. Kang , H.S. Tak , Y.K. Jeong, H.W. Lee, J.S. Kim,"Properties and tool performance of ta-C films deposited by double-bend filtered cathodic vacuum arc for micro drilling applications"Diamond &; Related Materials 19 (2010) 866–869
40. H.Y. Ueng, C.TGuo, K.-H. Dittrich, “ Development of a hybrid coating process for deposition of diamond-like carbon films on microdrills”,Surface &; Coatings Technology, 200 (2006) 2900-2908.
41. H.Y. Ueng, C.T. Guo, “Diamond-like carbon coatings on microdrill using an ECR-CVD system”,Applied Surface Science, 249 (2005) 246-256.
42. Eiichi Aoyama, Hiromich Nobe, Toshiki Hirogaki ,“Drilled hole damage of small diameter drilling in printed wiring board”,Journal of Materials Processing Technology, 118 (2001) 436 – 441.
43. J.P. Davim , Pedro Reis , “Study of delamination in drilling carbon fiber reinforced plastics (CFRP) using design experiments”,Composite Structures, 59 (2003) 481-487.
44. L.J. Zheng, C.Y. Wang, L.Y. Fu, L.P. Yang, Y.P. Qu, Y.X. Song,"Wear mechanisms of micro-drills during dry high speed drilling of PCB"Journal of Materials Processing Technology 212 (2012) 1989– 1997
45. 白蓉生,“電路板微切片手冊” ,民國95年,p104~107
46. H.Y. Ueng,T, C.T. Guo, K.-H. Dittrich, "Development of a hybrid coating process for deposition of diamond-like carbon films on microdrills" Surface &; Coatings Technology 200 (2006) 2900– 2908
47. 童家慶,“PCB製程與問題改善”,民國94年,p123~124.
48. 楊長林,黃榮華,邱垂康,“應用六標準差技術提昇印刷電路板鑽孔製程能力之研究”, Journal of Quality, 16 (2009) 23- 41.
49. Aoyama, H. Inoue, T. Hirogaki, H. Nobe, Y. Kitahara, T.Katayama,"Study on small diameter drilling in GFRP",Composite Structures,32(1995)567-573
50. A. Leyland, A. Matthews, “On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour”, Wear 246(2000) 1-11
51. Masao Kamiya, Hideto Tanoue , Hirofumi Takikawa , Makoto Taki ,Yushi Hasegawa , Masao Kumagai ,” Preparation of various DLC films by T-shaped filtered arc deposition and the effect of heat treatment on film properties” Vacuum 83 (2009) 510-514.

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