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研究生:余承恩
研究生(外文):Chen-En Yu
論文名稱:利用後處理氧化鋅共摻鎵鋁薄膜玻璃製作的有機太陽能電池特性
論文名稱(外文):Post-treated Gallium and Aluminum Co-doped Zinc Oxide Films Prepard to Produce Organic Solar Cells
指導教授:張慎周
指導教授(外文):Shang-Chou Chang
口試委員:林天財蕭育仁
口試委員(外文):Tien-Chai LinYu-Jen Hsiao
口試日期:2014-07-04
學位類別:碩士
校院名稱:崑山科技大學
系所名稱:電機工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2014
畢業學年度:102
語文別:中文
論文頁數:109
中文關鍵詞:氧化鋅共摻鎵鋁有機太陽能電池
外文關鍵詞:Gallium and Aluminum Co-doped Zinc OxideOrganic Solar Cells
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本研究利用GAZO薄膜進行微波氫及氫氮混合電漿後處理,分別改變氣體壓力及電漿功率後,應用於有機太陽能電池之陽極,其結構為GAZO/ PEDOT:PSS / P3HT:PCBM / Ca/Al製作元件,希望藉以微波氫電漿及氫/氮電漿的處理,增加載子傳輸而提升填充因子,並提升光穿透率進而提升短路電流密度(Jsc),使光電轉換效率(PCE)提升。
量測微波電漿由X-ray繞射觀察薄膜晶格結構,掃描式電子顯微鏡、觀察薄膜表面微結構,霍爾量測其電性,光譜儀量測光穿透率探討微波氫及氫/氮電漿處理後續利用不同後處理的GAZO製作有機太陽能電池並量測其特性,比較利用不電漿處理的透明電極影響差異。
實驗結果發現微波氫電漿退火電漿功率為400 W、氣體壓力為20 Torr時,獲得最高的功率轉換效率0.76%,在微波氫/氮電漿退火電漿功率為400 W、壓力20 Torr時,獲得最高轉換效率0.82%,而當微波氫/氮電漿經功率增加到600 W、氣體壓力25 Torr,因為給予能量過強,導致薄膜結構晶格扭曲,因此電性變差而導致載子難易移動,使元件片轉換效率變差,從實驗結果得知使用GAZO作為陽極應用於有機高分子太陽能電池元件上,加入氮氣後有助於氫原子密度及熱能增加,因此微波氫/氮電漿會比未處理及微波氫電漿相同條件處理後得到更多額外的能量,使得GAZO薄膜的光電為結構特性有所改善,造成短路電流密度增加,提升有機高分子太陽能電池元件的功率轉換效率。

This work applied gallium and aluminum co-doped zinc oxide films (GAZO) plasma treated in hydrogen or hydrogen/nitrogen atmosphere. The plasma treated GAZO films were following used to fabricate organic solar cells in structure of GAZO/ PEDOT:PSS / P3HT:PCBM / Ca/Al. The device characteristics of organic solar cells made from plasma treated GAZO films with different recipe were compared. The results indicate the highest power conversion efficiency of 0.76% can be obtained under for GAZO films plasma treated in hydrogen atmosphere with plasma power of 400W and process pressure of 20 torr; the highest power conversion efficiency of 0.82% can be obtained under for GAZO films plasma treated in hydrogen/nitrogen atmosphere with plasma power of 400W and process pressure of 20 torr.
總目錄
頁數
中文摘要 i
英文摘要 iii
致謝 iv
總目錄 v
圖目錄 ix
表目錄 xv

第一章緒論 1
1.1前言 1
1.2太陽能電池種類 3
1.3研究動機與目的 6
1.4相關文獻回顧 7
第二章理論基礎 9
2.1透明導電膜介紹 9
2.1.1透明導電膜之光性質 9
2.1.2透明導電膜之電性質 10
2.2氧化鋅材料特性介紹 12
2.3有機太陽能電池介紹 13
2.3.1有機太陽能電池結構 13
2.3.2有機太陽能電池工作原理 16
2.3.3有機太陽能電池材料介紹 20
2.3.4有機太陽能電池特性分析 24
2.4電漿 26
2.5微波氫氣電漿機制 27
第三章實驗方法與步驟 28
3.1實驗流程 33
3.2後製程系統及製作有機太陽能電池 35
3.2.1後製程腔體 35
3.2.2微波氫氣電漿退火 36
3.2.3製作有機太陽能電池 36
3.3薄膜特性分析 38
3.3.1膜厚分析儀器 39
3.3.2 X-ray 繞射分析 40
3.3.3掃描式電子顯微鏡 41
3.3.4霍爾電性分析 42
3.3.5光譜分析 43
3.4有機太陽能電池使用儀器 44
第四章結果與討論 47
4.1微波電漿功率維持400 W,氣體種類(純氫、氫氣/氮氣比例1:1),並改變氣體壓力(15 Torr、20 Torr、25 Torr)處理十分鐘,後續製作有機太陽能電池 47
4.1.1 有機太陽能電池特性分析 47
4.1.2塗佈主動層之光吸收分析 51
4.1.3薄膜結構分析 53
4.1.4 薄膜表面分析 56
4.1.5 薄膜電性分析 60
4.1.6 薄膜電阻率與有機太陽能電池轉換效率之比較 63
4.1.7 薄膜光學分析 65
4.1.8光電性質綜合比較 68
4.1.9討論 69
4.2微波電漿氣體壓力維持20Torr,氣體種類(純氫、氫氣/氮氣比例1:1),並改變電漿功率(200 W、400 W、600 W)處理十分鐘 75
4.2.1 有機太陽能電池特性分析 75
4.2.2塗佈主動層之光吸收分析 79
4.2.3薄膜結構分析 81
4.2.4 薄膜表面分析 85
4.2.5 薄膜電性分析 89
4.2.6 薄膜電阻率與有機太陽能電池轉換效率之比較 92
4.2.7 薄膜光學分析 94
4.2.8光電性質綜合比較 97
4.2.9討論 98
第五章結論 104
參考文獻 106

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