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研究生:李文欽
研究生(外文):Wen-Chen Li
論文名稱:新型砷化鎵銦光二極體製作與應用
論文名稱(外文):A Novel InGaAs PhotodiodeFabrication and Its Application
指導教授:陳啟文陳啟文引用關係
指導教授(外文):Chii-Wen Chen
口試委員:吳孟奇簡鳳佐
口試委員(外文):Meng-Chyi WuFeng-Tso Chien
口試日期:2013-06-20
學位類別:碩士
校院名稱:明新科技大學
系所名稱:電子工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2013
畢業學年度:101
語文別:中文
論文頁數:51
中文關鍵詞:光二極體砷化鎵銦
外文關鍵詞:PHOTODIODEINGAAS
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本研究利用MOCVD將磷化銦/砷化銦鎵(InGaAs)成長於磷化銦之基板的磊晶片,進行鋅擴散之研究與後續製程設計以達在近紅外光波段具有高響應度(Responsivity)並且低暗電流(Dark current)之大面積紅外光感測器,並把製作而成的檢測器進行實際應用。
光感測器的吸收波長範圍在0.9~1.7μm,利用InGaAs可大範圍吸收波長的特性,設計四個大面積主動區,在設計光罩時需預先考慮受光區是否會被其他線材、蓋子等元件所使用的器材所影響,並且在不增加後續製程難度的情況下,使光電流能夠盡可能的變大,為此目的需對受光區域的面積做最有效率的應用。
為了使應用上更佳的便利,設計的光感測器為一個1x4的長方形矩陣,在此矩陣中我們為了確保擴散時濃度的均勻性,我們使用快速熱退火機(Rapid Thermal Annealing)進行擴散,而在各種擴散方式中,發現於鈍化後的再次低溫擴散,可以有極低的暗電流,元件完成後有200pA 的暗電流於逆偏5V的情況下,其暗電流密度達1.3 x 10-7 A/cm2。
在應用上,我們發現當與光源的距離上增加時,光感測器產生的光電流,則是呈非線性的減少。故利用鎢絲燈泡接近元件吸收範圍的特性,應用於光線透過皮膚進入光感測器中,四個主動區分別產生不同的光電流大小,藉由光電流之間的差異性,來探討皮膚中的水份與光感測器之間的關係。

In this study, a two-dimension array of InGaAs photodiode with 0.9~1.7nm absorption wavelength was presented. By using the characteristic of wide wavelength range in InGaAs material, we designed several active regions in our novel devices for inducing expected photocurrent. While the distances between light source and these several equal-area active regions increases, we found the current generated in photodiode decreases non-linearly. Furthermore, this device was applied on detecting skin physiology, when the tungsten bulk light source penetrated through skin and was absorbed by photodiode, there had individual different currents in each equal-area active regions, and the relationship between photocurrent and moisture in skin will be interpreted.
摘要 I
Abstract II
誌謝 III
圖目錄 V
表目錄 VII
第一章 緒論 1
1.1 歷史 1
1.2 紅外線的應用 1
1.3 研究動機 2
第二章 光電二極體特性和定理 3
2.1 光二極體的操作模式 3
2.2 P-I-N 光二極體 4
2.3光二極體特性與定理 4
2.3.1暗電流 5
2.3.2 量子效率與響應度 8
2.3.3 探測靈敏度 9
第三章 元件設計與製作 10
3.1元件結構 10
3.2 光罩設計 12
3.3元件製作 14
3.3.1實驗器材 15
3.3.2 Zinc擴散 17
3.3.3 P-Metal 製作 19
3.3.4 抗反射層製作 21
3.3.5 電性量測 22
3.3.5 均勻性量測 23
第四章 光二極體應用 24
4.1糖水量測 24
4.2皮膚量測 32
第五章 結論 45
第六章 未來研究方向 46
參考文獻 47
作者簡介 50

參考文獻
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