臺灣博碩士論文加值系統

本論文中，藉由製作徑向p-n接面微米孔洞陣列結構，使太陽電池增加載子收集效率，而提升短路電流及能量轉換效率﹔並探討微米孔洞陣列結構對太陽入射光之光捕抓效益。

本研究設計四種不同間距的微米孔洞陣列結構，由光阻圖案化定義形成微米結構區塊，接著使用銀催化濕式化學蝕刻完成；在蝕刻時間10 min，直徑10 μm間距40 μm的微米孔洞陣列結構，其平均全反射率降至8.85%。並使用溶膠凝膠法 ( Sol-gel method ) 調配不同的有機溶劑混和磷酸，接著使用旋塗摻雜 ( Spin-on-doping ) 技術製作p-n接面，其中以混和甲醇 ( Methanol ) 達到最好附著效果，其磷擴散深度在0.2 μm內摻雜濃度皆有1017 cm-3以上。

結合上述兩種方式，成功地製作週期性微米孔洞陣列矽太陽電池，其最佳能量轉換效率為9.02%，短路電流為25.5 mA/cm2。

In this thesis, we investigate the infiuence of micro-hole array structure on effect of light trapping, and the effect of solar cell’s efficiency as well. The design of radial p-n junction in micro-hole array was assumed to increase the carrier collection efficiency by horizontal carrier transport. This will improve short circuit current in a solar cell and hence the efficiency.
The micro-hole array structures were accomplished by silver catalyzed wet chemical etching. Four different pitches were designed for micro-hole array with diameter and space is 10 min 10 μm and 40 μm respectively. After micro-hole array fabrication, the solar spectrum weighted total reflection was decreased to around 8.85%. In contrast, the planar Si exhibit reflection around 40%. By used sol-gel method deploy different organic solvents mixed phosphoric, and then fabricate p-n junction by spin-on-doping technique. It find H3PO4：methanol mixture provides the most adherent result, diffusion depth of 0.2 μm and doping concentration is 1017 cm-3.
The fabrication of periodic micro-hole array silicon solar cells is successful. The best performance in terms of power conversion efficiency of 9.02% and the largest short circuit density of 25.5 mA/cm2.

誌謝 i
摘要 ii
Abstract iii
目錄 iv
圖目錄 vi
表目錄 ix
第一章 緒論 1
1.1 前言 1
1.2 太陽電池發展簡介 3
1.2.1 第一代太陽電池 6
1.2.2 第二代太陽電池 7
1.2.3 第三代太陽電池 7
1.3 研究動機 8
1.3.1 文獻回顧 8
第二章 太陽電池工作原理 12
2.1 太陽光光譜 12
2.2 太陽電池工作原理 14
2.3 太陽電池之光學設計原理 23
2.3.1 四分之一抗反射薄膜原理 23
2.3.2 金字塔結構之抗反射原理 25
2.3.3 次波長結構之抗反射原理 26
2.4 銀催化濕式化學蝕刻反應機制 28
第三章 實驗方法與步驟 30
3.1 實驗材料介紹 30
3.1.1 實驗基板 30
3.1.2 週期性微米孔洞陣列之光罩 30
3.2 實驗流程 33
3.2.1 週期性微米孔洞陣列製作流程 33
3.2.2 磷玻璃溶膠溶液製作p-n二極體之製作流程 46
3.2.3 週期性微米孔洞陣列矽太陽電池製作流程 49
3.3 實驗機台與量測儀器介紹 52
3.3.1 手套箱 ( Glove box ) 52
3.3.2 高真空蒸鍍機 ( High vacuum thermal evaporation，TE ) 53
3.3.3 旋轉塗佈機 ( Spin coator ) 54
3.3.4 高溫爐管 ( Furnace ) 54
3.3.5 太陽電池I-V量測系統 54
3.3.6 太陽電池外部量子效率量測系統 (EQE) 55
3.3.7 紫外光可見光近紅外光光譜儀 55
3.3.8 四點探針量測儀 ( Four-point probe tester ) 56
3.3.9 場發射掃描式電子顯微鏡 ( FFSEM ) 56
3.3.10 展阻量測系統 ( Spreading Resistance Probe System ) 56
第四章 實驗結果與討論 57
4.1 週期性微米孔洞陣列結構於矽表面 57
4.1.1 數據分析 58
4.2 磷酸混和溶液製作p-n接面 66
4.2.1 數據分析 67
4.3 週期性微米孔洞陣列矽太陽電池 73
4.3.1 磷擴散溫度與不同間距之影響 73
4.3.2 數據分析 74
4.3.3 不同孔洞深度之影響 81
4.3.4 數據分析 82
第五章 結論 88
參考文獻 89

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