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研究生:張肇恩
研究生(外文):Zhao-En Chang
論文名稱:石墨烯薄膜製程之研究
論文名稱(外文):Investigation of Thin Film Process of Graphene.
指導教授:薛英家
口試委員:何獻南葉永輝
口試日期:2013-07-23
學位類別:碩士
校院名稱:國立中興大學
系所名稱:精密工程研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2013
畢業學年度:101
語文別:中文
論文頁數:53
中文關鍵詞:石墨烯單層奈米碳管導電膜靜電吸附自我組裝
外文關鍵詞:graphenesingle-walled carbon nanotubesconductive thin film.
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因石墨烯與奈米碳管具有優異的機械性質及高強度、高靭性、高硬度、高導熱性、高導電性等獨等性質,成為目前熱門的新興材料,其應用範圍相當廣泛,本研究探討石墨烯與奈米碳管的導電性在導電薄膜方面的探討。

三維的單層奈米碳管經過酸處理後,可得到類似石墨烯的二維平面晶體,本論文使用化學方式製備的石墨烯及酸處理單層奈米碳管,以逐層靜電吸附自我組裝(Layer-by-Layer, LBL)製程成膜,再以浸泡硝酸及加熱處理得到最佳化的導電性薄膜。

利用LBL可控制成膜層數的流程,選定不同層數的石墨烯及單層奈米碳管導電膜,經過優化處理得到最佳參數,再比較兩者之間的穿透度和片電阻。
Grapheneand carbon nanotubes are the emerging reinforcement materials which haveexcellentmechanical properties and high strength, toughness, hardness, head conductivity and electric conductivity. Because of wide range of applications, in this study, we exploit the electric conductivity discussion of the conductive thin film.

Thethree dimensions Single-walled Carbon Nanotubes (SWNTs) after acid treatment could be get a similar two-dimensional crystals of grephene. In this thesis,the conductive thin filmsof graphene by chemical method and SWNTs by acid treatmenthave coated throughLayer-by Layer process. Thin films were doped in the glass substrate through immersion acid and heat process to get the optimizing conductive.

To exploit the thin film formation process coulbd be controlled by LBL method,soselectedthe difference of graphene and SWNTs films by LBL to get the optimal parameters after optimized process,and then compared the correlation between the transmittance and sheet resistance.
致謝 i
摘要 ii
Abstract iii
表目錄 vii
圖目錄 viii
第一章 緒論 1
一、 前言 1
二、 研究動機與目的 1
第二章 文獻回顧 3
一、 石墨烯簡介 3
二、 石墨烯的特性 4
(一)導電性 4
(二)化學性質 5
(三)機械特性 6
(四)其它特性 6
三、 石墨烯製備方式 8
(一)固態法 8
1. 機械剝離法 8
2. 碳化矽(SiC)熱裂解法 8
(二)液態法 9
1. 氧化還原法 9
2. 超音波震盪法 10
3. 多層靜電吸附自我組裝(Layer-By-Layer, LBL) 11
4. 奈米碳管表面改質 13
5. 後處理-浸泡硝酸及加熱處理 15
(三)氣態法 15
1. 化學氣相沉積(Chemical vapor deposition, CVD)法 15
2. 電弧放電法 16
第三章 實驗設備與流程 17
一、 實驗材料與設備 17
(一)實驗材料 17
(二)實驗設備 20
(三)量測設備 23
二、 實驗流程 25
(一)氧化石墨烯的製備及還原 26
(二)奈米碳管改質方式 31
(三)多層靜電吸附自我組裝(Layer-By-Layer, LBL) 33
(四)後處理-浸泡硝酸及加熱處理 36
第四章 實驗結果與討論 37
一、 製備氧化石墨烯及石墨烯成品 37
二、 成膜試片導電性分析 40
(一)氧化石墨烯先鍍層再還原 40
(二)氧化石墨烯先還原再鍍層 41
(三)Smalley及Hummers酸化改質奈米碳管 43
三、 試片穿透度比較 44
四、 比較試片浸泡硝酸的導電性 45
五、 比較試片加熱後的導電性 46
六、 比較試片製程差異性 48
第五章 結論和未來展望 49
一、 結論 49
二、 未來展望 50
參考文獻 51
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