臺灣博碩士論文加值系統

在用於R2R製程(Roll-to-Roll processing)中的超薄玻璃會因為邊緣的微裂紋而導致玻璃的破裂。因此，雷射劈裂的技術被使用來劈開這些微裂紋。本研究藉由COMSOL Multiphysics模擬雷射劈裂過程的熱傳現象，考慮有相變化的發生下模擬出玻璃的溫度場並用來預測玻璃的劈裂邊緣及劈裂停止點。結果顯示劈裂邊緣溫度介於800 K到900 K而且穩定劈裂深度之溫度小於應變點溫度。此外結果顯示在最佳的雷射功率(34 W)下，相變化深度與劈裂邊緣的距離小於121μm，此可運用於劈裂停止點的預測。
整體來說，研究結果增加了對於雷射劈裂溫度分佈與熱傳行為的了解，有助於R2R製程在超薄玻璃的應用。

In R2R (Roll-to-Roll) processing of ultrathin glass, the presence of edge micro-cracks causes glass to split. Accordingly, a laser peeling technique is used to peel off the cracks prior to rolling. This study simulates the heat transfer phenomena during the laser peeling process by means of COMSOL Multiphysics simulations. With phase change in simulation, the results obtained for the temperature field within the glass enable the peeling boundary and peeling stop position to be predicted. It is shown that the peeling boundary temperature is in the range of approximately 800 ~ 900 K and the maximum temperature of stable peeling depth is lower than the temperature of strain point. In addition, the results show that the distance between the phase change region and the peeling boundary is smaller than 121μm in the optimal laser power 34 W. This could be applied to predict the peeling stop position.
Overall, the results in this study achieve further understanding in laser peeling of temperature distribution and heat transfer behavior which enhances the application of the R2R processing of ultrathin glass.

摘要........................................................................................................................... i
Abstract..................................................................................................................... ii
Acknowledgments..................................................................................................... iii
Contents.................................................................................................................... iv
List of Tables............................................................................................................ vii
List of Figures.......................................................................................................... viii
Nomenclature.......................................................................................................... xiii
Ch. 1 Introduction.................................................................................................... -1-
1-1 Research Motivation and Background.............................................................. -1-
1-2 Literature Review.............................................................................................. -2-
1-2.1 Laser Peeling Technology............................................................................. -2-
1-2.2 Ultrathin Glass............................................................................................... -9-
1-2.3 R2R (Roll-to-Roll) Processing...................................................................... -10-
1-2.4 COMSOL Multiphysics................................................................................. -13-
1-3 Research Goal................................................................................................ -15-
1-4 Thesis Construction........................................................................................ -16-
Ch. 2 Fundamental Principles…........................................................................... -18-
2-1 Laser Radiation Principle................................................................................ -18-
2-1.1 Properties of Laser Radiation...................................................................... -18-
2-1.2 CO2 Lasers.................................................................................................. -20-
2-1.3 Gaussian Laser Sources.............................................................................. -23-
2-2 Heat Transfer Theory...................................................................................... -30-
2-2.1 Governing Equations................................................................................... -30-
2-2.2 Phase Change............................................................................................. -31-
2-2.3 Boundary Conditions.................................................................................... -33-
Ch. 3 Numerical Methods...................................................................................... -37-
3-1 COMSOL Sample Verification........................................................................ -37-
3-2 Numerical Model............................................................................................. -44-
3-2.1 Model........................................................................................................... -44-
3-2.2 Mesh............................................................................................................ -44-
3-2.3 The Independent Test of Spatial Grid.......................................................... -44-
3-3 Numerical Model Setting................................................................................. -49-
3-3.1 Physical Model............................................................................................. -49-
3-3.2 Phase Change............................................................................................. -49-
3-3.3 Governing Equations of Numerical Method................................................. -52-
3-4 Numerical Program Procedures...................................................................... -54-
3-5 Numerical Parameters.................................................................................... -56-
Ch. 4 Results and Discussion............................................................................... -59-
4-1 Physical Observation and Discussion of Laser Peeling.................................. -59-
4-2 Simulation Results.......................................................................................... -64-
4-2.1 Gaussian Heat Source................................................................................. -64-
4-2.2 Phase Change............................................................................................. -64-
4-2.3 Temperature Distribution............................................................................. -67-
4-2.4 Heat Transfer Analysis................................................................................. -71-
4-3 Peeling Boundary............................................................................................ -78-
4-3.1 Peeling Boundary Prediction....................................................................... -78-
4-3.2 Cooling Rate................................................................................................ -83-
4-4 Peeling Stop Position...................................................................................... -88-
Ch. 5 Conclusions and Future Work..................................................................... -93-
5-1 Conclusions.................................................................................................... -93-
5-2 Future Work.................................................................................................... -94-
References............................................................................................................ -95-
Vita........................................................................................................................ -99-

1.G. Allcock, “Experimental observations and analysis of CO2 laser-induced microcracking of glass, IEEE Journal of Applied Physics, Vol. 78, pp. 7295 – 7303, 1995.

2.C. H. Tsai, H. W. Chen, “Laser Cutting of Thick Ceramic Substrates by Controlled Fracture Technique, ELSEVIER Journal of Materials Processing Technology, Vol. 136 , pp. 166 – 173, 2003.

3.H. Y. Zheng, T. Lee, “Studies of CO2 laser peeling of glass substrates, IOP Journal of Micromechanics and Microengineering, Vol. 15, Number 11, 2005.

4.Y. Z. Wang, J. Lin, “Characterization of the laser cleaving on glass sheets with a line-shape laser beam, ELSEVIER Optics ＆ Laser Technology, Vol. 39, pp. 892 – 899, 2007.

5.L. Ç. Özcan, V. Tréanton, R. Kashyap, L. Martinu, “High-Quality Flat-Top Micromachining of Silica by a CW CO2 Laser, IEEE Photonics Society, Vol. 19, pp. 459 – 461, 2007.

6.C. K. Chung, S. L. Lin, “CO2 laser micromachined crackless through holes of Pyrex7740 glass, ELSEVIER International Journal of Machine Tools and Manufacture, Vol. 50, pp. 961 – 968, 2010.

7.Z. K. Wang, H. Y. Zheng, “Investigation on CO2 laser irradiation inducing glass strip peeling for microchannel formation, AIP Biomicrofluidics, Vol. 6, Issue 1, 2012.

8.A. Plichta, A. Weber, A. Habeck, “Ultrathin Flexible Glass Substrates, MRS Proceedings, Vol. 769, pp. 1557 – 1561, 2003.

9.S. Hoehla, S. Garner, M. Hohmann, O. Kuhls, X. Li, A. Schindler, N. Fruehauf, “Full Color AM-LCDs on Flexible Glass Substrates, Corning Incorporated, 2010.

10.“Corning Gorilla Glass 2, Corning Incorporated, 2012.

11.“Corning Gorilla Glass, Corning Incorporated, 2010.

12.A. Weber, S. Deutschbein, A. Plicht, A. Habeck, “Thin glass-polymer systems as flexible substrates for displays, SID Symposium Digest of Technical Papers, Vol. 33, pp. 53 – 55, 2002.

13.G. P. Crawford, Flexible Flat Panel Displays: John Wiley and Sons Ltd, 2005.

14.Industrial Technology Research Institute of Taiwan (ITRI) Available:
http://www.itri.org.tw/chi/msl/p4.asp?RootNodeId=070＆NavRootNodeId=0733＆NodeId=073322＆ArticleNBR=3045.

15.D. J. Money Available: http://www.moneydj.com/kmdj/news/NewsViewer.aspx?a=ebc7664d-313d-4434-9425-31ca2e5cc66f.

16.鄭中緯, 沈威志, 陳政雄, 李依如, “平面顯示器製程設備技術專輯, 機械工業雜誌 315期, pp. 52 – 55, 2009.

17.楊憲東, 陳煜傑, 黃國興, “軟電R2R製程設備傳輸動態分析與控制, 機械工業雜誌 339期, pp. 36 – 42, 2011.

18.“Introduction to COMSOL Multiphysics, COMSOL Incorporated, 1998.

19.“Heating with a Moving Laser, COMSOL Incorporated, 2008.

20.“Phase Change, COMSOL Incorporated, 2008.

21.R. Klein, Laser Welding of Plastics: Wiley-VCH, 2011.

22.“Gaussian Beam Optics, Available: http://www.cvimellesgriot.com/.

23.J. E. Shelby, Introduction to Glass Science and Technology: Royal Society of Chemistry, 2005.

24.R. Lehman, “Overview of Glass Properties, Rutgers University, Available: http://www.ifsc.usp.br/~lavfis/BancoApostilasImagens/ApEfFotoelastico/Photoelastic-PropertyOverHandout.pdf.

25.D. Rosenthal, A New Method of Determining Thermal Diffusivity at Various Temperatures: Los Angeles Engineering, 1946.

26.楊天祥,溫昌達,陳國聲,屈子正, 雷射劈裂超薄玻璃邊緣微裂紋模擬, 財團法人工業技術研究院南分院FY101分包學界研究計畫期末報告, 2012.

27.S. Inaba, S. Oda, K. Morinaga,Heat capacity of oxide glasses measured by AC calorimetry, Journal of Non-Crystalline Solides, Vol. 306, pp.42 – 49, 2002.