跳到主要內容

臺灣博碩士論文加值系統

(44.222.104.206) 您好!臺灣時間:2024/05/29 22:42
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

: 
twitterline
研究生:王魏鴻
研究生(外文):Wang, Wei-Hung
論文名稱:陽極氧化鋁模板輔助生長奈米柱陣列磁性質研究
論文名稱(外文):Magnetic Properties of Electroless-Plated Nanorod arrays Fabricated by Anodic Aluminum Oxide Template
指導教授:曾院介
指導教授(外文):Tseng, Yuan-Chieh
學位類別:碩士
校院名稱:國立交通大學
系所名稱:材料科學與工程學系
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:101
語文別:中文
論文頁數:95
中文關鍵詞:陽極氧化鋁無電鍍沉積奈米陣列
外文關鍵詞:anodic aluminum oxideelectroless depositionnanorod-array
相關次數:
  • 被引用被引用:1
  • 點閱點閱:296
  • 評分評分:
  • 下載下載:16
  • 收藏至我的研究室書目清單書目收藏:0
本研究以不同陽極氧化處理條件在矽基板上有效控制陽極氧化鋁形
貌,並成功在矽基板上製作出大孔徑的AAO模板。利用無電鍍鎳磷反
應,在矽基板上生長不同孔徑的奈米柱陣列以及薄膜。透過掃描式電
子顯微鏡(SEM)、穿透式電子顯微鏡(TEM)觀察試片之表面形貌以及微
觀結構;使用能量散佈分析儀(EDS)探討化學成分之變化,震動樣品
磁量測儀(VSM)則用來比較各試片的微結構以及磁學特性。我們發現
無電鍍鎳磷為2-3nm鎳奈米晶的超順磁結構,而透過快速退火處理可
以誘發晶粒沿長軸成長提升飽和磁化率以及矯頑磁場,產生超順磁-
鐵磁相轉換;增加退火時間會致使晶粒成長,故造成不同條件之試片
有相異磁性質,暗示磁性的改變是由更微觀的結構改變所驅動。經由
XMCD與sum rule計算出微觀磁矩的磁性貢獻程度(spin moment、
orbital moment)發現無電鍍鎳磷的鐵磁性主要來源為自旋磁矩
(spin moment)的貢獻,而經退火處理後自旋磁矩提升亦可驗證增加
退火時間的確可以提升鐵磁性。
In this study, we demonstrate a successful control of the morphology and
pore size of anodic aluminum oxide (AAO) template on silicon substrates with
proper anodizing conditions. These AAO templates enabled the fabrications of
electroless-deposited Ni thin films, and Ni nano-arrays with tunable diameter.
Samples’ surface morphologies were probed using a scanning electron
microscope (SEM, JSM 6500F) operated at 15 kV. A high resolution
transmission electron microscope (HRTEM, JEM-2100F, operated at 200 keV)
was used to probe the atomic-scale images. Compositions were identified by an
energy-dispersive x-ray spectrometry (EDX). Magnetic properties were
analyzed by a vibrating sample magnetometer (VersaLab, quantum design
manufacture). XAS spectra were collected over Ni L2 and L3 edges with a total
electron yield mode (TEY) at BL11A of National Synchrotron Radiation
Research Center (NSRRC). XMCD signals were collected along with XAS by
reversing the x-ray helicity to probe the spin-polarization state of the arrays.
XMCD signals were taken under an applied field of 1 Tesla.
The results show that the magnetic properties were highly dependent on
microstructure and crystallinity. The as-plated sample exhibited a
superparamagnetic behavior and it transformed into ferromagnetic upon
post-annealing process.TEM and VSM results confirmed the grain growth upon
heat treatment, which led to the enhancements of saturation magnetization and
coercivity.
Finally, XMCD sum rules were operated to estimate spin and orbital
moments of the samples. The results show that spin moment dominated the
magnetic properties.
中文摘要 .................................................................................................................................i
Abstract ........................................................... .............. .............. .............................................i
致謝…..................................................... .............. ..................................................................iii
總目錄........................................................... .............. ............................................................iv
圖目錄..................................................................................................................................... vii
表目錄........................................................................................................................................x
第一章 諸論..............................................................................................................................1
1-1 研究背景.............................................................................................................................1
1-2 磁性基礎原理介紹.............................................................................................................2
1-2-1 磁性來源 ......................................................................................................................2
1-2-2 磁性性質..........................................................................................................................3
第二章 文獻回顧......................................................................................................................8
2-1 陽極氧化鋁.. ....................................................................................... ............................8
2-1-1 陽極氧化鋁製程原理.. .................................................................................................8
2-1-2 陽極氧化鋁成長機制............................................ .......... .......... .......... ..................... 10
2-1-3 鋁的陽極電化學行為 ...................................................... .......................................... 12
2-2 無電鍍鎳鍍層法........................................................... .......... .......... ............................ 13
2-2-1 無電鍍法簡介............................................ .......... .......... .......... ................................. 13
2-2-2 無電鍍鎳磷法 ................................... .......... .............................................................. 15
2-2-2-1 無電鍍鎳磷法之鍍液組成........................... .......... .......... ...................................... 15
2-2-2-2 反應機制......................................................... .......... .......... .................................... 17
2-2-2-3 析鍍速率與穩定因子................................ .......... .................................................... 19
第三章 實驗流程與分析儀器介紹.............................. ......................................................... 27
3-1 實驗流程圖 ................................................................. ...................................................27
3-2 陽極氧化鋁製程 .............................................................................................................28
3-2-2 兩階段陽極氧化鋁處理........................................ .......... ........................................... 29
3-3 無電鍍鎳磷析鍍法................................................................. .......... ............................. 30
3-3-1 鍍液配製................................................................. .......... .......................................... 30
3-3-2 無電鍍鎳磷析鍍步驟.......................................... .......... .......... .................................. 31
3-4 移除AAO 與熱退火處理..................................... .......... ................................................31
3-5 分析儀器原理與介紹........................................... .......... .......... .................................... 32
3-5-1 掃描式電子顯微鏡.............................................. .......... ..............................................32
3-5-2 穿透式電子顯微鏡............................................... .......... ............................................ 33
3-5-4震動樣品磁量儀................................................... .......... .......... ................................... 34
3-5-3 X 光磁圓偏振二向性.......................................... .......... ...........................................35
第四章 實驗結果與討論.................................................... .......... .......... ..............................43
4-1 前言 ................................................................................ ................................................43
4-1-1 目的 .......................................................................... ...................................................43
4-1-2 實驗製備與量測 ................................................. ........................................................43
4-1-3 分析 .......................................................................................... .................................. 44
4-2 於矽基板上製備不同孔徑之AAO......................................... .......... .......... .................. 46
4-2-1 陽極處理過程的電流─時間曲線分析................... .......... .......... ...............................46
4-2-2 電壓與孔徑、孔間距之關係.................................... .......... ..........................................49
4-2-3 外加電壓與合適電解液濃度............................ .......... .......... .......... ......................... 50
4-2-4 改變擴孔時間調整孔徑與阻障層.................................... .......... .......... .................. 52
4-3 無電鍍鎳磷奈米柱的微結構與磁性質........................ .......... .......................................58
4-3-1 剛沉積....................................................... .......... .......... .......... .......... .......... ............ 58
4-3-2 氮氣退火..................................... .......... .......... .......... .......... .......... .......... ................65
4-4 磁圓偏振二向性對鐵磁鎳奈米柱的研究.......... .......... .................................................82
4-4-1 前言.......................... .......... .......... .......... .......... .......... ............................................. 82
4-3-2 分析....................... .......... .......... .......... .......... .......... .......... .......... ...........................82
第五章 結論.......................................................... .......... .......... .......... .......... ..................... 88
參考文獻...................................................... .......... .......... .......... .......... ............................... 89

〔1〕張立德,奈米材料,五南圖書出版股份有限公司,2002年
〔2〕白春禮,納米科技現在與未來,凡異出版社,2002年
〔3〕黃德歡,改變世界的納米技術,瀛舟出版社,2002年
〔4〕Yong Wang, Faxian Xiu, Ya Wang1,Jin Zou1,Ward P Beyermann, Yi Zhou,Kang L Wang, "Coherent magnetic semiconductor nanodot arrays", Nanoscale Research Letters,6,134,2011
〔5〕Yat Li, Fang Qian, Jie Xiang, Charles M. Lieber, "Nanowire electronic and optoelectronic devices", Materialstoday,9,10,18,2006
〔6〕Chun-Chao Huang, Chih-Chieh Lo, Yuan-Chieh Tseng, Chien-Min Liu, Chih Chen, "Magnetostructural phase transition in electroless-plated Ni nanoarrays", J. Appl. Phys. 109,113905,2011
〔7〕C. M. Das, P. K. Limaye, A. K. Grover, A. K. Suri, "Preparation and Characterization of Silicon Nitride Codeposited Electroless Nickel Composite Coatings", J. Alloys Compd. 436,328,2007
〔8〕A. Pineirio-Jimenez,C. Vilialobos-Gutierrez,M. H. Staia, E. S.Puchi-Cabrera, "Tensile and Fatigue Properties of 6063-T6 Aluminium Alloy Coated with Electroless Ni-P Deposit", Mater. Sci. Technol.,23, 253,2007
〔9〕W. X. Zhang, N. Huang, J. G. He, Z. H. Jiang, Q. Jiang, J. S. Lian, "Electroless Deposition of Ni–W–P Coating on AZ91D Magnesium Alloy", Appl. Surf. Sci. , 253 , 5116,2007
〔10〕J. L. Jiang, H. Q. Lu, L. X. Zhang, N. P. Xu, "Preparation of Monodisperse Ni/PS Spheres and Hollow Nickel Spheres by Ultrasonic Electroless Plating", Surf. Coat. Technol. , 201,7174,2007
〔11〕K. Arima, H. Hara, J. Murata, T. Ishida, R. Okamoto, K. Yagi, Y. Sano,H. Mimura, K. Yamauchi, "Atomic-Scale Flattening of SiC Surfaces by Electroless Chemical Etching in HF Solution with Pt Catalyst", Appl. Phys. Lett.,90, 202106,2007
〔12〕L. Y. Zhao, A. C. L. Siu, J. A. Petrus, Z. H. He, and K. T. Leung, "Interfacial Bonding of Gold Nanoparticles on a H-terminated Si(100) Substrate Obtained by Electro- and Electroless Deposition", JACS ,129, 5730,2007
〔13〕J. B. Jun, M. S. Seo, S. H. Cho, J. G. Park, J. H. Ryu, K. D. Suh, "Synthesis of Monodisperse Nickel-Coated Polymer Particles by Electroless Plating Method Utilizing Functional Polymeric Ligands", J. Appl. Polym. Sci., 100,3801,2006
〔14〕M. Spasovaa, U. Wiedwalda, M. Farlea, T. Radeticb, U. Dahmenb,M.
Hilgendorffc, M. Giersigc, "Temperature dependence of exchange anisotropy in monodisperse cobalt nanoparticles with a cobalt oxide shell",J. Magn. Magn. Mater.,272,1508,2004
〔15〕A.Mumtaz, K.Maaz, B.Janjua, S.K.Hasanain, M.F.Bertino, " Exchange bias and vertical shift in CoFe2O4 nanoparticles", J. Magn. Magn. Mater., 313, 266, 2007
〔16〕Oscar Iglesias, Amilcar Labarta,Xavier Batlle, "Exchange Bias Phenomenology and Models of Core/Shell Nanoparticles", Journal of
Nanoscience and Nanotechnology, 8,2761,2008.
〔17〕Dmitri Routkevitch, Alexander N. Govyadinov, Peter P. Mardilovich, "High aspect ratio, High resolution ceramic MEMS" MEMS.,2,39,2000
〔18〕Jessensky O,Muller F,Gosele U. "Self-organized formation of hexagonal pore arrays in anodic alumina", Applied Physics Letters,72,10,1173,1998
〔19〕Gâlcă, Aurelian C., Kooij,E.Stefan, Wormeester,Herbert, Salm, Cora, Leca, Victor, Rector, Jan H., Poelsema, Bene,"Structural and optical characterization of porous anodic aluminum oxide", J. Appl. Phys. , 94,7, 4296, 2003
〔20〕Daniel Lo,R. Arief Budiman,"Fabrication and Characterization of Porous Anodic Alumina Films from Impure Aluminum Foils", Journal of The Electrochemical Society,154,1,c60-c66, 2006
〔21〕Li A P, Muller F, Birner A, Nielsch K, Gosele U, "Hexagonal pore arrays with a 50–420 nm interpore distance formed by self-organization in anodic alumina", Journal of Applied Physics,84,11,6023,1998
〔22〕G. E. Thompson,"Porous anodic alumina: fabrication, characterization and applications", Thin solid films.,297,1,192,1997
〔23〕O. Jessensky, F. Müller, U. Gösele, "Self-organized formation of hexagonal pore arrays in anodic alumin", Appl. Phys. Lett., 72, 1173 , 1998
〔24〕G. E. Thompson, "Porous anodic alumina: fabrication, characterization and applications", Thin solid films., 297,1, 192,1997
〔25〕D. Almawlawi, K. A. Bosnick, A. Osika, M. Moskovits, "Fabrication of nanometer-scale patterns by ion-milling with porous anodic alumina masks, "Adv. Mater. ,12,17,1252,2000
〔26〕Sunil Kumar Thamida and Hsueh-Chia Chang, "Nanoscale pore formation dynamics during aluminum anodization", CHAOS, 12, 1, 240, 2002
〔27〕 Mc Cafferty, Edward, Introduction to Corrosion Science 1st Edition.,springer,2010,
〔28〕楊聰仁,無電鍍鎳及其應用,國璋出版社,1987。
〔29〕蔡定侃,「無電鍍 NiP析鍍於矽基材及應用於生長奈米碳纖之研究」,國立交通大學,博士論文,2004。
〔30〕許擇倫, 「以無電鍍法製備純鈷金屬薄膜及空心奈米管之研究」, 國立中央大學,碩士論文,2007。
〔31〕A. Brenner, G.E. Riddell, "Deposition of nickel and cobalt by chemical reduction", J. Res. NBS,37,1,31,1946
〔32〕黃飛雄, "無電鍍鎳特性與應用",工業技術85期,pp.24~28,1981
〔33〕K-P. Han,Y. Wu,"A Super High Speed Electroless Nickel Plating Process," Trans. Institute Metal Finishing,74,3,91,1996
〔34〕J-L. Fang, Y. Wu, K-P. Han, "Acceleration Mechanism of Thioglycolic Acid for Electroless Nickel Deposition," Plating and Surface Finishing, 84, 91,1997
〔35〕X. Chen, J. Yi. , G. Qi, F. Liu, "Electroless Nickel Bath for Wafer Bumping: Influence of Additives," International Symposium on Electronic Materials and Packaging,12,2000
〔36〕H. Li,W. Wang,H. Chen,"Surface Morphology and Electronic State Characterization of Ni-P Amorphous Alloy Films," Journal of Non-Crystalline Solids, 281, 31,2001
〔37〕X. Haowen and Z. Bangwei, "Wettability of Amorphous Electroless Nickel-Porous-Based Deposits," Metal Finishing, 99,1, 40, 2001.
〔38〕X. Haowen and Z. Bangwei, "Autocatalytic Deposition of Nickel-Tin-Copper-Phosphorus Amorphous Alloys," Metal Finishing, 97,10, 35,1999
〔39〕L. F. Spencer, "Electroless Nickel Plating - A Review," Metal Finishing,72,12,58,1974.
〔40〕G. O. Mallory , J. B. Hajdu, Electroless Plating: Fundamentals and Applications, AESF, Orlando, Florida, 1990.
〔41〕Chien-Min Liu, Yuan-Chieh Tseng, Chih Chen,Ming-Chieh Hsu, Tzu-Yzan Chao, Yu-Ting Cheng, " Superparamagnetic and ferromagnetic Ni nanorod arrays fabricated on Si substrates using electroless deposition" Nanotechnology, 20,415073,2009
〔42〕T. J. Gay,F. B. Dunning,” Extrapolation procedures in Mott electron polarimetry” Rev. Sci. Instrum.,63,1,1635,1992
〔43〕Grzegorz D. Sulka, Wojciech J. Stepniowski, "Structural features of self-organized nanopore arrays formed by anodization of aluminum in oxalic acid at relatively high temperatures", Electrochimica Acta, 54,14, 3683,2009
〔44〕李常鉉, 「以陽極氧化鋁模板在矽基材上輔助成長奈米結構材料」,國立交通大學材料科學與工程研究所,碩士論文,2005。
〔45〕Tsai T. K.,Chao C. G., "The growth morphology and crystallinity of electroless NiP deposition on silicon",Appl. Surf. Sci., 233,1-4, 180,2004
〔46〕汪建民,材料分析,中國材料科學學會,1996。
〔47〕B. D. Cullity, C. D. Graham, "Introduction to Magnetic Materials", 2nd Edition,2009
〔48〕David Jiles, "Magnetism and Magnetic Materials" , Chapman & Hall,1991
〔49〕黃迪靖,陳駿,張春富,吳文斌,鍾世俊,「半金屬磁性氧化物之能譜研究」,物理雙月刊,22,6,606,2000。
〔50〕J. L. Erskine and E. A. Stern, "Calculation of the M23 magneto-optical absorption spectrum of ferromagnetic nickel", Phys. Rev. B,1212,11,5016,1975
〔51〕C. T. Chen, F. Sette, Y. Ma, and S. Modesti, "Soft-x-ray magnetic circular dichroism at the L2,3 edges of nickel", Phys. Rev. B , 42,11,7262, 1990
〔52〕B. T. Thole, Massimo Altarelli, Xindong Wang , " X-ray circular dichroism and local magnetic fields", Phys. Rev. Lett, 70,5,694 , 1993
〔53〕C. T. Chen , Y. U. Idzerda , H.-J. Lin,G. Meigs , A. Chaiken, G. A. Prinz , G. H. Ho , " Element-specific magnetic hysteresis as a means for studying heteromagnetic multilayers", Phys. Rev. B,48,642 (1993).
〔54〕B. D. Cullity, C. D. Graham,Introduction to Magnetic Materials 2nd Edition,WILEY,2009
〔55〕Gordon F. Hughes,"Magnetization reversal in cobalt–phosphorus films",J. Appl. Phys.54,9,5306,1983
〔56〕K. Tagami, M. Aoyama, K. Nishimoto , F. Goto.,"Magnetism and Fe Mössbauer effect in amorphous fe-base alloys: Significance of charge transfer and short-range atomic ordering", Magnetics, IEEE Transactions on,20,5,1284,1984
〔57〕Kh. M. S. Youssef,C. C. Koch,P. S. Fedkiwb,"Influence of Additives and Pulse Electrodeposition Parameters on Production of Nanocrystalline Zinc from Zinc Chloride Electrolytes",. Electrochem. Soc.,151,2,C103,2004
〔58〕C. M. Liu,Y. C. Tseng,C. Chen,M. C. Hsu,T. Y. Chao,Y. T. Cheng, "Superparamagnetic and ferromagnetic Ni nanorod arrays fabricated on Si substrates using electroless deposition", Nanotechnology, 20, 41, 5703, 2009
〔59〕R. RANJAN ,S. KAJA, "Effect of ferromagnetic NiP on the properties of longitudinal recording media ",Journal of Magnetism and Magnetic Materials,79,2,242,1989
〔60〕J. Kameda, R. Ranjan, "Nondestructive evaluation of steels using acoustic and magnetic barkhausen signals—I. Effect of carbide precipitation and hardness", Acta Metallurgica, 35,7,1515,1987
〔61〕D. A. Bozanic, D. Mergerian, R. W. Minarik ,"Electron Spin-Echo Measurements of E1’ Centers in Crystalline Quartz", Phys. Rev. Lett.,21,8,541,1968
〔62〕J.D. Livingston, "A review of coercivity mechanisms (invited)",J. Appl. Phys,52,2544,1981
〔63〕S. B. Ren, C. J. Lu, J. S. Liu, H. M. Shen,Y. N. Wang, "Size-related ferroelectric-domain-structure transition in a polycrystalline PbTiO3 thin film", Phys. Rev. B,54,20,54,1996
〔64〕J. Garcia-Otero,M. Porto,J. Rivas,A. Bunde, "Influence of the cubic anisotropy constants on the hysteresis loops of single-domain particles: A Monte Carlo study",J. Appl. Phys., 85, 4,1999
〔65〕E.Goering,J.Geissler, "X-ray magnetic circular dichroism — a universal tool for magnetic investigations",Journal of Alloys and Compounds, 328, 1, 14, 2001
〔66〕C. T. Chen, Y. U. Idzerda, H.-J. Lin, N. V. Smith, G. Meigs, E. Chaban, G. Ho, E. Pellegrin, and F. Sette, "Experimental Confirmation of the X-ray Magnetic Circular Dichroism Sum Rules for Iron and Cobalt, " Phys. Rev. Lett. 75, 152,1995

連結至畢業學校之論文網頁點我開啟連結
註: 此連結為研究生畢業學校所提供,不一定有電子全文可供下載,若連結有誤,請點選上方之〝勘誤回報〞功能,我們會盡快修正,謝謝!
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top