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研究生:沈煒凱
研究生(外文):Wei-kai Shen
論文名稱:高電流氮化鎵場效電晶體之直流與動態特性研究
論文名稱(外文):Study of Direct Current and Dynamic Characteristics on High Current GaN Field Effect Transistors
指導教授:綦振瀛
學位類別:碩士
校院名稱:國立中央大學
系所名稱:電機工程學系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2013
畢業學年度:101
語文別:中文
論文頁數:80
中文關鍵詞:氮化鎵場效電晶體閘極絕緣層動態電阻
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近年來環保意識抬頭,綠能產業已成為工業發展趨勢,利用氮化鎵功率元件應用在開關電路中將可大幅降低能源的損耗。本論文主要探討大電流氮化鎵電晶體之製作,及使用不同的閘極絕緣層材料對於單根指叉元件特性的影響。為了實現大電流電晶體元件,實驗中採用多根指叉的光罩設計,在元件總閘極寬度為20 mm、閘極偏壓為0 V、汲極偏壓10 V且pulse width為200 μs時,成功的達成8.3安培的電流特性,且正規化後的開啟電阻為3.6 mΩ-cm2。其動態電阻約為直流電阻的1.67倍。
本實驗亦設計與探討了多種閘極絕緣層材料,分別為二氧化矽、氮化矽和氧化鋁,以及二氧化矽/氧化鋁和氮化矽/氧化鋁的複合式絕緣層結構。發現使用氧化鋁和氮化矽為絕緣層的元件具有較低的開啟電阻為3.4 mΩ-cm2和3.1 mΩ-cm2。但在截止特性方面,惟具有二氧化矽為絕緣層材料的元件崩潰電壓能超過200 V,而其他種元件皆有提早崩潰的現象。此外,不同閘極絕緣層之元件在動態特性上也有不同的表現,藉由C-V量測後可以發現主要由於半-絕接面的深層缺陷能階密度不同所導致。

This thesis focuses on the fabrication of high current GaN transistors and the influence of different gate insulator materials on the single finger devices. In order to achieve high current transistors, this study designed the multi-finger type layout with the total gate width of 20 mm. High current AlGaN/GaN MISFETs grown on 6” Si substrate were successfully demonstrated. When the device is under gate bias of 0 V, drain bias of 10 V and pulse width of 200 μs, the maximum current and specific on-state resistance (Ron) reached 8.3 A and 3.6 mΩ-cm2, respectively. In addition, the measured dynamic Ron is about 1.67 times magnitude of the static Ron.
This study designed a variety of gate insulator materials, including Al2O3、SiO2、Si3N4 and SiO2/Al2O3 composite layer, and found out that the devices with Al2O3 and Si3N4 gate insulator had lower Ron of 3.4 mΩ-cm2 and 3.1 mΩ-cm2. In the off-state characteristics, the devices with SiO2 and SiO2/Al2O3 composite layer have higher breakdown voltage over 200 V, while the other two devices have the problem of early breakdown. In addition, devices with different insulators have different performances on the dynamic Ron. By C-V measurement, the density of deep level trap between insulator and semiconductor could be obtained to analyze the difference of dynamic characteristics.

論文摘要 IV
Abstract V
誌謝 VI
目錄 VII
圖目錄 IX
表目錄 XII
第一章 緒論 1
1.1前言 1
1.2 氮化鎵材料特性 3
1.3 氮化鎵高功率元件發展現況 6
1.4 研究動機與論文架構 10
第二章 常開型多根指叉元件之製作和電性分析 11
2.1 多根指叉元件之光罩設計 11
2.2多根指叉元件製程流程 13
2.3 多根指叉元件之電流-電壓特性 20
2.3.1 元件結構及簡易電性量測 20
2.3.2 多根指叉元件之直流電性量測 23
2.4 本章總結 29
第三章 閘極絕緣層材料對MIS-FET之電性影響 30
3.1 實驗設計與製程流程 30
3.2不同閘極絕緣層材料之元件順向電流-電壓特性與分析 35
3.3不同閘極絕緣層材料之元件逆向電流-電壓特性與分析 41
3.4本章總結 46
第四章 動態特性分析 47
4.1 動態電阻原理介紹 47
4.2 多根指叉元件動態特性分析 48
4.3 閘極絕緣層對動態特性之影響 52
4.3.1不同閘極絕緣層之動態特性 52
4.3.2不同閘極絕緣層之電容-電壓特性分析 57
4.4 本章總結 61
第五章 結論 62
參考文獻 64


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