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研究生:謝亦喬
研究生(外文):YI-CHIAO HSIEH
論文名稱:雙光子光致聚合微製造系統之研發
論文名稱(外文):Research and Development of Two-photon Photopolymerization Micro-fabricationSystem
指導教授:廖昭仰
指導教授(外文):Chao-Yaug LIAO
學位類別:碩士
校院名稱:國立中央大學
系所名稱:機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2013
畢業學年度:101
語文別:中文
論文頁數:75
中文關鍵詞:雙光子光致聚合體素奈秒雷射伺服馬達驅動之線性運動平台
外文關鍵詞:Two-Photon PolymerizationVoxelNanosecond LaserLinear Stage Drived by Servo Motor
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雙光子聚合(Two-Photon Polymerization, TPP)微製造技術可以製作出解析度小於10μm任意複雜形狀之立體微結構,隨著科技的進步許多產業所需之產品愈來愈小,製作微小構件之設備需求性普遍提高,又TPP為製造技術可滿足現今客製化製作3D(Three Dimensional)產品的主流技術快速原型(Rapid Prototyping)解析度不足之缺憾。本研究將以TPP微製造技術為基礎,著重在微製造系統的建立,以製造出業界實際應用要求,其尺寸達毫米等級且精度達到微米等級之產品。因此在本研究之TPP微製造系統中使用伺服馬達驅動之線性運動平台(Linear Stage Drived by Servo Motor)滿足產品尺寸可達毫米之需求,及利用樣品承載台之水平校正法及對雷射光輸出之光功率進行分析以求精度達到微米等級之水準。經過研究成果顯示本研究已成功研發TPP微製造系統且已聚合出初步產品雛形。
Two-photon polymerization micro manufacturing technology can produce less than 10μm resolution of any complex shape stereo microstructure, with advances technology required for many industrial products that become smaller, the production of small components for equipment a general increase in demand for sex, but also the manufacturing technology TPP customized to the needs of in the present production Three Dimensional mainstream technology products Rapid Prototyping insufficient resolution flaw. This research use TPP technology for focusing on the establishment of micro-manufacturing systems to produce the industry's requirements of practical application, the size of millimeter precision micron grade level and the product. Therefore, in this study TPPmicro-fabrication system using linear stage drived by servo motor products to meet the demand for sizes up to mm, Sample mounting platform using the right level of correction method and the laser light output analysis of the optical power to reached the level of accuracy of micron ratings. After research shows, this study has successfully developed TPPmicro-fabricationsystems and have been polymerization product of a preliminary prototype.
中文摘要 ……………………………………………………………… ii
ABSTRACT ……………………………………………………………… iii
目錄 ……………………………………………………………… iv
圖目錄 ……………………………………………………………… v
表目錄 ……………………………………………………………… vii
第一章 緒論………………………………………………………… 1
1-1 研究背景…………………………………………………… 1
1-2 文獻回顧…………………………………………………… 4
1-3 研究動機與目的…………………………………………… 11
第二章 理論說明…………………………………………………… 12
2-1 雙光子吸收之光致聚合反應……………………………… 12
2-2 雙光子聚合微製造技術…………………………………… 14
2-3 雙光子微製造技術系統分析……………………………… 18
2-4 無限遠光學系統…………………………………………… 22
2-5 繞射極限…………………………………………………… 24
2-6 聲光調變器………………………………………………… 25
第三章 研究方法…………………………………………………… 27
3-1 雙光子光致聚合微製造技術系統之光路設計…………… 27
3-2 系統硬體設備介紹………………………………………… 30
3-3 系統硬體及設備空間配置………………………………… 36
3-4 樣品乘載台之水平校正…………………………………… 41
3-5 雷射光輸出功率穩定度分析……………………………… 43
第四章 結果與討論………………………………………………… 48
4-1 雙光子光致聚合微製造技術系統之校正成果…………… 48
4-2 雙光子光致聚合微製造初步聚合成果…………………… 56
第五章 結論與未來研究方向……………………………………… 59
5-1 結論………………………………………………………… 59
5-2 未來研究方向……………………………………………… 59
參考文獻 ……………………………………………………………… 60


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