臺灣博碩士論文加值系統

本論文提出一個具有1  2分光能力的矽基光連接模組。此模組利用45微反射面達成光訊號垂直耦合，並透過高分子聚合物波導和擁有3個45微反射面的矽基板整合，實現垂直耦合、分岔光路雙輸出的矽基光學平台。利用覆晶封裝製程，在發射端和兩個輸出端封裝主動元件，完成具有收發端的光連接模組。此光連接模組具有垂直光學耦合能力、1  2雙輸出分光器、發射端和接收端，為一完整的晶片上光連接模組。
此光連接模組的光學耦合效率兩輸出通道分別是23.73%和23.53%，模組總損耗為-3.26dB。輸入訊號10GHz的高頻量測結果，雙輸出通道的眼高皆約有250mV，並且通過誤碼率測試，皆低於10-12等級，證明本研究架構具有雙輸出通道單晶片20-Gbps的資料傳輸能力。

In this thesis, A polymer waveguide monolithically integrated with three Si-based 45° reflectors realized on a Si substrate is proposed to form a 1 × 2 vertically optical splitter. A VCSEL chip at the input port and two PD chips at two output ports are flip-chip assembled.
In this thesis, we propose an intra-chip 10-Gbps optical interconnect module using a silicon optical bench (SiOB) integrated with polymer waveguides and silicon-based 45˚ micro-reflector.
This optical connection module optical coupling efficiency at two output channels of 23.73% and 23.53%, and the total optical insertion loss of 3.26 dB with a splitting ratio of 1:1 is obtained for the proposed splitter. The clear eye patterns with a transmission rate of 10 Gbps at two output ports are demonstrated and verify that the 1 × 2 vertical splitter is suitable for the optical interconnects with multiple output ports. The 10-Gbps error-free performance of receiver side is also achieved at the level of 10-12 even the VCSEL is biased at 5 mA.

摘要 i
目錄 iii
圖目錄 iv
表目錄 ix
第一章 緒論 1
1-1 研究動機與目的 1
第二章 垂直耦合分岔雙輸出光學連接模組設計 11
2-1 垂直耦合分岔光學連接模組結構尺寸以及光學設計 12
2-2 高頻傳輸線設計模擬與分析 18
第三章 垂直耦合分岔雙輸出光學連接模組設計製作開發 24
3-1　具45°微反射面矽基光學平台製程與開發 24
3-1.1 矽基光學平台製程開發 25
3-1.2 45°微反射面金屬製程開發 27
3-2 具分光結構之高分子聚合物波導製作 29
3-3.1 高頻傳輸線金屬製作 34
3-3.2 焊料銦金屬製作 36
3-3.3 元件覆晶封裝製程 37
第四章 垂直耦合分岔雙輸出光學連接模組之量測與分析 40
4-1 具分光結構高分子聚合物波導之光學與元件特性量測 40
4-1.1面射型雷射與光檢測器特性量測 40
4-1.2高分子聚合物波導光學特性量測 44
4-2 垂直分岔雙輸出光連接模組高頻特性量測 46
4-2.1 高頻傳輸線特性量測 46
4-2.2 雙輸出光學連接模組頻率響應量測 50
4-2.3 雙輸出光學連接模組眼圖量測 53
第五章 結論與未來展望 63
參考文獻 65

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