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研究生:范嘉敏
研究生(外文):Chia-min Fan
論文名稱:XXY三軸共平面對位機構之量測校驗
論文名稱(外文):XXY Triaxial Coplanar Amount Measured on the Mechanism of Check
指導教授:李廣齊李廣齊引用關係
指導教授(外文):Kuang-Chyi Lee
學位類別:碩士
校院名稱:國立虎尾科技大學
系所名稱:自動化工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2013
畢業學年度:101
語文別:中文
論文頁數:68
中文關鍵詞:接觸式感測器雷射干涉儀XXY平台運動軸卡
外文關鍵詞:contact sensorslaser interferometerXXY platformmotion axis card
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本文主要發展一種三軸共平面對位機構之量測系統,其中量測方法是使用兩隻接觸式感測器搭配運動軸卡和各式馬達驅動器運用USB通訊連接PC做控制整合,將其程式化使用軟體控制並且應用處理各種量測數據上之即時分析統計,可量測到三軸共平面對位機構的直線運動的重覆性,定位精度和平台的旋轉角度,並且可以迅速產生一份報告結果並列印,此量測系統架設簡單,量測訊速,低成本,可用以取代架設光路麻煩費時且高價位的雷射干涉儀,大大降底成本和時間,增加工作效率,提高生產速度。

This paper the development of a three-axis coplanar mechanism measurement system, the measurement method is to use the
two-contact sensor with motion axis cards and a variety of motor drive using USB communication to connect a PC to do the control integration, program of using the software to control and application processing measurement data on the real-time analysis of statistical measure triaxial coplanar repetitive positioning accuracy of the linear motion of the mechanism, and the angle of rotation of the platform, and can quickly generate a report the results and print measurement system erected
simple measurement news fast, low-cost, can be used to replace the time-consuming and high-priced laser interferometer, significantly lowering the cost and time of the end, increase efficiency, improve production speed erection light road trouble .


摘要...................................i
Abstract...................................ii
誌謝...................................iii
目錄...................................iv
表目錄...................................vi
圖目錄...................................vii
第一章、序論...................................1
1.1前言...................................1
1.2研究方法...................................2
1.3本文架構...................................3
1.4文獻回顧...................................4
第二章、量測工具說明...................................6
2.1接觸式感測器...................................6
2.2軸控卡 ...................................7
2.3原理介紹...................................8
2.3.1系統架構...................................8
2.4精密平台介紹...................................10
2.4.1雷射干涉儀簡介...................................10
2.4.2雷射干涉儀線性量測...................................11
2.5 XXY對位平台介紹...................................13
2.5.1 XXY動作原理說明...................................15
2.5.2量測軟體介紹...................................16
2.5.3量測軟體功能說明...................................18
2.5.4軟體平台驗證功能...................................21
第三章 量測系統...................................28
3.1誤差理論與數據理論...................................28
3.1.1誤差探討...................................28
3.1.2 滾珠導螺桿...................................29
3.1.3 線性滑軌...................................32
3.2平台數據...................................33
3.3精密平台角度變化...................................51
第四章、結論...................................54
參考文獻...................................55
附錄...................................57
Extend Abstract...................................62
簡歷...................................68


表目錄
表一XXY175*175台面X方向A點位移值...................................33
表二XXY175*175台面X方向B點位移值...................................35
表三XXY175*175 Y方向A點位移值...................................36
表四XXY175*175 Y方向B點位移值...................................38
表五XXY300*380 X方向A點位移值...................................39
表六XXY300*380 X方向B點位移值...................................41
表七XXY300*380 Y方向A點位移值...................................42
表八XXY300*380 Y方向B點位移值...................................44
表九XXY500*500 X方向A點位移值...................................45
表十XXY500*500 X方向B點位移值...................................47
表十一XXY500*500 Y方向A點位移值...................................48
表十二XXY500*500 Y方向B點位移值...................................50







圖目錄
圖1.1系統架構...................................2
圖1.2 精密定位平台的結構圖...................................3
圖2.1 GT2感測器...................................6
圖2.2基本配置流程...................................7
圖2.3基本配置流程圖...................................8
圖2.4基本配置流程圖...................................8
圖2.5 位移示意圖...................................9
圖2.6量測系統實體圖...................................10
圖2.7麥克林干涉原理...................................11
圖2.8 雷射干涉儀線性量測原理...................................12
圖2.9 角度量測原理...................................13
圖2.10 XXY平台...................................14
圖2.11 傳統XYθ?跟XXY平台比較圖...................................14
圖2.12 XXY平台作動圖...................................16
圖2.14軟體介面...................................18
圖2.15軟體介面功能...................................20
圖2.16軟體平台驗證功能介面...................................24
圖2.17 軟體平台驗證功能流程...................................24
圖2.18 繪圖功能切換...................................25
圖2.19圖表顯示資料數值圖...................................25
圖2.20即時顯示值...................................26
圖2.21 自動儲存word檔...................................26
圖2.22 自動列印功能...................................27
圖3.1 滾珠螺桿溝槽形式...................................31
圖3.2 滾珠螺桿選定流程...................................32
圖3.4 X方向A點SENSOR1值...................................34
圖3.5 X方向A點SENSOR2值...................................34
圖3.6 X方向平均值...................................34
圖3.7 X方向A點角度變化...................................34
圖3.8 X方向B點SENSOR1值...................................35
圖3.9 X方向B點SENSRO2值...................................35
圖3.10 X方向B點平均值...................................36
圖3.11 X方向B點角度變化...................................36
圖3.12 Y方向A點SENSOR1值...................................37
圖3.13 Y方向A點SENSRO2值...................................37
圖3.14 Y方向A點平均值...................................37
圖3.15 Y方向A點角度變化...................................37
圖3.16 Y方向B點SENSOR1值...................................38
圖3.17 Y方向B點SENSRO2值...................................38
圖3.18 Y方向B點平均...................................39
圖3.19 Y方向B點角度變化...................................39
圖3.20 X方向A點SENSOR1值...................................40
圖3.21 X方向A點SENSOR2值...................................40
圖3.22 A點平均值...................................40
圖3.23 A點角度變化...................................40
圖3.24 X方向B點SENSOR1值...................................41
圖3.25 X方向B點SENSOR2值...................................41
圖3.26 B點平均值...................................42
圖3.27 B點角度變化...................................42
圖3.28 Y方向A點SENSOR1值...................................43
圖3.29 Y方向A點SENSOR2值...................................43
圖3.30 Y方向A點平均值...................................43
圖3.31 Y方向A點角度變化...................................43
圖3.32 Y方向B點SENSOR1值...................................44
圖3.33 Y方向B點SENSOR2值...................................44
圖3.34 Y方向B點平均值...................................45
圖3.35 Y方向B點角度變化...................................45
圖3.36 X方向A點SENSOR1值...................................46
圖3.37 X方向A點SENSOR2值...................................46
圖3.38 X方向A點平均值...................................46
圖3.39 X方向A點角度變化...................................46
圖3.40 X方向B點SENSOR1值...................................47
圖3.41 X方向B點SENSOR2值...................................47
圖3.42 X方向B點平均值...................................48
圖3.43 X方向B點角度變化...................................48
圖3.44 Y方向A點SENSOR1值...................................49
圖3.45 Y方向A點SENSOR2值...................................49
圖3.46 Y方向A點平均值...................................49
圖3.47 Y方向A點角度變化...................................49
圖3.48 Y方向B點SENSRO1值...................................50
圖3.49 Y方向B點SENSOR2值...................................50
圖3.50 Y方向B點平均值...................................51
圖3.51 Y方向B點角度變化...................................51
圖3.52 175台面角度A點...................................51
圖3.53 175台面角度B點...................................52
圖3.54 175台面負角度A點...................................52
圖3.55 175台面負角度B點...................................52
圖3.56 380台面正角度A點...................................52
圖3.57 380台面正角度B點...................................53
圖3.58 380台面A點...................................53
圖3.59 380台面B點...................................53

[1] Kuang-Chao Fan, Mu-Jung Chen,”A 6-degree-of-freedom measurement system for the accuracy of X-Ystages”,Precision Engineering 24,pp,15-23,2000
[2] Youngjoo Yee’,Hyo-Jin Nam,See-Hyung Lee, Jong Uk Bu,Young-Sam Jeon, and Seong-Moon Cho,”PZT ACTUATED
MTCROMTRROR FOR NANO-TRACKING OF LASER BEAM FOR HIGH-DENSITY OPTICAL DATA STORAGE”,IEEE,pp.435-440,2000
[3] ”Laser Doppler Displacement meter:LB-500 Laser Ball bar”,Optodyne Co,1998.
[4] J.C. Ziegert and C.D.Mize,”The Laser Ball Bar:a New Instrument for Machine Tool Metrology,”Precision Engineering, vol.16,NO.4,1994,pp,259-267.
[5] Bryan,J.B.”A Simple Method For Testing Measuring Machines and Machine Tools”,Precision Engineering Vol.4 No2.pp.61-69,1982.
[6] Burdekinand,M.and Jywe,W.”Optimizing the Contouring Accuracy of CNC Machines Using the contisure System,”29 Int’l MATADOR Conference,1992.
[7 ]Donmez,M. A. “A gengral Methodology for Machine Tool Accuracy Enhancement by Error Compensation,”Precision Engineering, Vol.8(4),1986.
[8] “HP5529A Laser Measurement Systems,”Application Notes 325-2, Hewlett Packard Co.,1989.
[9] M.C.Shih, and C.H.Lu,”Fuzzy Sliding Mode Position Control of a Ball Screw Driven by Pneumatic Servomotor”,Mechatronics Vol.5,No.4,pp.421-431,1995.
[10] C.L.Chao,J.Neou, “Model reference adaptive control of air-lubricated capstan drive for precision positioning”,precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology 24,pp.285-290,2000
[11] Mike Holmes,Robert Hocken,David Trumper,”The long-range scanning stage:a novel platform for scanned-probe microscopy”,Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology 24,pp,191-209,2000.
[12] Chien-Hung Liu, Wen-Yuh Jywe and Hau-Wei Lee,”Development using a position sensitive detector”,INSTITUTE OF PHYSICS PUBLISHING MEASUREMENT SCIENCE AND TECHNOLOGY,Meas. Sci.Technol.15,pp.1-9,2004.
[13]王偉麗、范光照、劉玉聖,基於共平面二維工作平台的精密量測系統,中國計量學院學報,2005,16(4):264-267。
[14]施慶隆、李文猶,2002,機電整合控制-多軸運動設計及應用,全華科技圖書股份有限公司,台北。
[15]粘朝益,1994,微奈米影像自動定位系統之研究,國立台灣科技大學機械工程系,博士學位論文。


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