本文提出一種新型的剪切干涉儀之斜率輪廓量測。採用新的條紋辨識方法和五步相移技術並搭配Savart剪切干涉儀使用，因此，干涉條紋的相位圖可以無需使用傳統的相位展開技術而得到，且缺點(例如：錯誤與雜訊)也可藉由此技術加以解決。實驗架設包含一個光源模組、Savart剪切干涉儀和圖像處理系統，從使用的架設，最後得到的實驗結果。實驗結果證明此干涉儀的可行性。

An innovative shearing interferometer for slope contour measurements is proposed in this paper. It incorporates a novel fringe identification method and the five-step phase-shifting technique with the Savart shearing interferometer, so the phase map of the interferogram can be obtained without using the conventional phase-unwrapping technique, and the disadvantage (i.e., the error and noise propagation) due to this technique can therefore be eliminated. The measurement theory is first introduced, a setup comprising a light-source module, the Savart shearing interferometer, and an image processing system is then demonstrated, and the experimental results from the uses of the setup are finally presented. The results agree the feasibility of the proposed interferometer.

摘 要 i
ABSTRACT ii
致 謝 iii
目 錄 iv
表目錄 vi
圖目錄 vii
第一章 緒論 1
1.1 前言 1
1.2 文獻探討 1
1.2.1 橫向剪切干涉儀 2
1.2.1.1 麥克森剪切干涉儀 2
1.2.1.2 平行玻璃式剪切干涉儀 3
1.2.1.3 循環剪切干涉儀 4
1.2.1.4 Savart稜鏡剪切干涉儀 5
1.2.2 相移式橫向剪切干涉儀 6
1.2.2.1 平移反射鏡法 6
1.2.2.2 移動楔型稜鏡法 7
1.2.2.3 LC的相位延遲量法 8
1.2.2.4 旋轉雙折射稜鏡法 9
1.3 研究動機 9
1.4 論文架構 10
第二章 量測原理 11
2.1 Savart剪切干涉儀 11
2.2 解相位之方法 13
2.2.1 五步相移術 13
2.2.2 對比度計算 15
2.2.3 相位展開 16
第三章 實驗架設 18
3.1 實驗架設 18
3.1.1 光源模組 18
3.1.2 干涉儀模組 19
3.1.3 影像擷取與控制系統 21
3.1.4 解相位系統 23
3.1.4.1條紋辨識 24
3.1.4.2定義條紋階數 25
3.1.4.3 相位展開 26
第四章 實驗量測與結果 28
4.1 實驗量測 28
4.2 實驗結果 30
4.2.1應用性驗證 30
4.2.2 正確性驗證 34
第五章 討論 36
5.1 應用性之討論 36
5.2正確性之討論 36
5.3 計算誤判 36
第六章 結論 38
6.1 結論 38
參考文獻 39

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