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研究生:蘇郅鈞
研究生(外文):Chih-Chun Su
論文名稱:CMOS製程奈米碳管改質之氣體感測元件與光敏感測元件
論文名稱(外文):Functionalized Carbon Nanotube Gas Sensor and Photosensitive Sensor with CMOS Process
指導教授:黃榮堂黃榮堂引用關係
指導教授(外文):Jung-Tang Huang
口試委員:莊賀喬施文彬
口試委員(外文):Ho-Chiao ChuangWen-Pin Shih
口試日期:2013-07-24
學位類別:碩士
校院名稱:國立臺北科技大學
系所名稱:機電整合研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2013
畢業學年度:101
語文別:中文
論文頁數:86
中文關鍵詞:奈米碳管自我組裝單分子層官能基化甲醛氣體感測器光敏感測器
外文關鍵詞:Carbon Nanotubes (CNTs)SAM (self-assembled monolayer)FunctionalizationFormaldehydeGas sensorphotosensitive sensor
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本研究主要為發展一種整合於CMOS製程的奈米碳管(CNTs)氣體感測元件之低溫製造方法,其製作方式是以3-aminopropyltriethoxysilane (APTS)修飾經加熱氧化的矽晶圓,使其表面形成具有氨根aminoterminated (–NH2)的自我組裝單分子層(self-assembled monolayer, SAM),而經處理過的表面存在正電荷與氨基群能與CNTs產生化學的吸附作用,使CNTs固定於元件表面形成氣體感測薄膜,接著利用微影製程將梳狀電極結構定義出,並以蒸鍍的方式將電極沉積於其上,利用掀舉法(Lift-off)完成CNTs電極結構之製作,以亞硫醯氯(THIONYL CHLORIDE) 、二甲基甲醯胺與乙二胺改質電極結構之下的奈米碳管完成氨基改質,可偵測出低濃度的甲醛氣體。另外本研究發現奈米碳管在二氧化矽中參雜其他元素,可使感測器具有光敏特質,對於光有非常靈敏之反應。本研究之結果除了將此CNTs氣體感測元件之製程成功的應用於一般晶圓上以達量產之目的外,亦將此結果成功的整合於CMOS製程電路上達成晶片系統化(System on Chip, SoC)之目標,未來此感測元件可透過CMOS訊號處理電路達到可穿戴式(Wearable)單晶片(SoC)的目的。

The study demonstrates the low temperature fabrication of CMOS compatible gas sensor based on CNTs. To begin with, the SiO2 on the silicon wafer was modified by APTS in order to form an aminoterminated (–NH2) self-assembled monolayer (SAM), which could facilitate the chemical bonding between CNTs and amino-groups. By means of it, CNTs were immobilized on SiO2 to be the thin film of gas sensing. Photolithography and Evaporato were then implemented to develop micro parallel electrodes. At last, Lift-off was used to complete the fabrication.Complete amino-modified carbon nanotubes, can detect low concentrations of formaldehyde gas. In addition,we found that nanotubes on silica doped other elements that enable the sensor is very sensitive to light.In this study, we not only successfully apply the fabrication to the purpose of mass production, but also integrate it with CMOS circuits to achieve System on Chip (SoC).

摘 要 i
ABSTRACT ii
誌 謝 iii
目 錄 iv
表目錄 vi
圖目錄 vii
第一章 緒論 1
1.1 前言 1
1.2 研究動機及目的 2
1.3 感測器簡介 3
1.3.1 感測器性能指標 3
1.4 氣體感測器簡介 6
1.4.1 氣體感測器種類 6
1.5 光感測器簡介 8
1.5.1 光電效應種類 8
1.6 奈米碳管之結構與特性 9
1.7奈米碳管氣體感測方法與機制 12
1.8論文架構 14
第二章 文獻回顧 15
2.1 奈米碳管化學感測器之研究 15
2.2 奈米碳管感測器感測原理之研究 16
2.3 以三氧化鎢薄膜修飾奈米碳管之氣體響應研究 17
2.4 奈米碳管高選擇性定位之研究 19
2.5 以化學官能化表面方式控制單壁奈米碳管之研究 21
2.6 沉積於氨根分子層上之單壁奈米碳管氣體感測特性研究 23
2.7 多壁奈米碳管氣體感測特性研究 24
2.8 運用元件分析原理辨別氣體之陣列式奈米碳管氣體感測器 25
2.9 奈米碳管利用電漿改質之研究 26
2.10多璧奈米碳管氨基改質的低濃度甲醛感測器 30
2.11單璧奈米碳管固態有機酸TFQ改質的甲醛感測器 31
2.12光敏聚合物塗於奈米碳管之研究 32
第三章 奈米碳管氣體與光敏感測元件製程與設計 35
3.1氣體感測元件研究設計與流程 35
3.2 奈米碳管自我單分子組裝之原理 36
3.3 奈米碳管之氨基改質 38
3.4 晶圓級奈米碳管氣體感測元件製程 39
3.4.1奈米碳管自我單分子組裝於晶圓表面(第一階段製程) 41
3.4.2 感測元件之梳狀電極製作(第二階段製程) 44
3.5結合CMOS之奈米碳管光敏感測元件製作 52
3.5.1設計流程 52
3.5.2晶片後製程製作流程 53
第四章 實驗結果與討論 62
4.1 氣體感測實驗 62
4.1.1多壁奈米碳管甲醛氣體量測 64
4.1.2單壁奈米碳管甲醛氣體量測 65
4.2 光敏感測實驗 66
第五章 結論與未來展望 80
5.1結論…. 80
5.2建議. 81
5.3未來展望 81
參考文獻 83
作者簡介 86



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