(3.215.183.251) 您好!臺灣時間:2021/04/23 14:22
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果

詳目顯示:::

我願授權國圖
: 
twitterline
研究生:張奕威
研究生(外文):Yi-Wei Chang
論文名稱:多波長差動共焦顯微三維形貌量測技術之研究
論文名稱(外文):Research on Multi-wavelength Differential Confocal Surface Profilometry
指導教授:陳亮嘉林世聰林世聰引用關係
指導教授(外文):Liang-Chia ChenShyh-Tsong Lin
口試委員:葉勝利林士傑章明范光照
口試委員(外文):Sheng-Lih YehShih-Chieh LinChang MingKuang-Chao Fan
口試日期:2012-07-19
學位類別:博士
校院名稱:國立臺北科技大學
系所名稱:機電科技研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2013
畢業學年度:101
語文別:中文
論文頁數:132
中文關鍵詞:共焦量測技術差動共焦量測技術多波長共焦量測技術表面輪廓量測三維形貌量測
外文關鍵詞:Automatic optical inspection (AOI)confocal measurementdifferential confocalchromatic confocalsurface profilometry
相關次數:
  • 被引用被引用:4
  • 點閱點閱:442
  • 評分評分:系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:1
本研究主要為研究多波長差動共焦三維形貌量測技術,系統以線型連續多波長光源進行量測,並結合軸向色散物鏡與兩組彩色線型CCD裝置取像,並建立出多波長差動共焦系統之數學模型,研發出一即時線型掃描共焦量測技術。為了使系統達到即時線型掃描量測,使用軸向色散物鏡將連續多波長光源的各個波長聚焦至不同的深度位置上,產生一大深度的即時量測範圍,避免費時的垂直掃描過程;物體之反射光則由兩組彩色線型CCD裝置進行取像,以消除物體反射率對量測之影響。為了達成即時量測,首先,系統以垂直掃描的方式對平面鏡進行Z軸掃描,並透過差動運算式演算得到一組R、G與B顏色比值與深度的對映曲線,由此曲線與兩組彩色線型CCD取得之資訊即可進行快速三維形貌重建量測而不需要任何的垂直掃描。同時,差動運算還可將物體表面反射率的參數消除,量測重建時可有效抑制物體表面反射率的影響。本研究提出之量測方法,其線量測範圍為89.6µm,深度量測解析可達到0.3 µm,並且最大量測誤差可小於全高量測範圍的0.6%以內。此量測方法可達成快速線型掃描量測無需任何垂直掃描,並可獲到高精度量測結果,驗證此量測系統可有效地達成快速即時多波長差動共焦三維形貌量測。

This study presents a novel Multi-wavelength Differential Confocal surface profilometer using broadband light source, dispersion chromatic objective and two color line CCD devices. Optical confocal microscopy for surface profilometry has become extremely important due to its high longitudinal measurability range and excellent vertical resolution. In this study, the system was developed to establish a multi-wavelength line chromatic confocal mathematical model and generate accurate wavelength-to-depth conversion for in-situ 3-D profile measurement without the need for time-consuming vertical scanning. In this method, two CCD are configured at two different designated focusing positions, which are controlled by CCD focus position. A depth-focus response curve can be established by two colors CCD with Red, Green and Blue ratio curve. In addition, using the principle of differential confocal, an output function is reestablished as the ratio of subtraction and sum values of the two color detectors’ responses to reduce the surface reflectance influence. To test the performance of the developed system, an accurate step-height target and some industrial micro semiconductor components were measured to verify measurement accuracy and repeatability. The depth measurement resolution can reach up to 0.3 µm and the maximum measurement error was verified to be within 0.6% of the overall measuring range without vertical scan.

中文摘要 i
ABSTRACT ii
誌謝 iv
目錄 v
表目錄 vii
圖目錄 viii
第一章 緒論 1
1.1 研究背景 1
1.2 研究動機與目的 4
1.3 論文架構 9
第二章 文獻回顧 11
2.1 共焦量測技術之介紹 11
2.2 共焦量測系統之文獻 11
2.2.1 點掃描共焦量測系統 12
2.2.2 線掃描共焦量測系統 34
2.2.3 線型彩色共焦原理 39
2.2.4 面形共焦量測系統 44
2.3 結論 49
第三章 系統量測原理與技術 51
3.1 多波長差動共焦量測系統原理與架構 51
3.1.1 軸向色散物鏡模擬與設計之原理 51
3.1.2 量測系統原理 60
3.1.3 系統架構 69
第四章 系統校正與實驗結果 73
4.1 光源與彩色CCD裝置之光強響應誤差校正 73
4.2 CCD裝置之移動距離與量測之深度範圍測試 79
4.3 量測系統之空間解析 90
4.4 傾斜度量測測試 94
4.5 重覆性量測之測試 98
4.6 粗糙度量測測試 106
4.7 工業樣品量測 109
4.7.1 微凸塊的量測結果比較 114
4.7.2 各種量測系統之量測結果比較 119
4.8 透鏡量測 122
4.9 透明多層膜待測物之量測問題 123
4.10 實驗結論 124
第五章 結論與未來展望 125
5.1 結論 125
5.2 未來展望 126
參考文獻 128

[1]A. K. Ruprecht, K. Korner, T. F. Wiesendanger, H. J. Tiziani and W. Osten, “Chromatic confocal detection for high speed micro topography measurements,” Proc. of SPIE, vol. 5302, 2004, pp. 53-60.
[2]J. B. Tan and F. S. Wang, “Theoretical analysis and property study of optical focus detection based on differential confocal microscopy,” Meas. Sci. Technol. 13, 2002, pp.1289-1293.
[3]高偉傑,白光共焦顯微三維表面輪廓量測系統之研發,碩士論文,國立臺北科技大學自動化科技研究所,台北,2005。
[4]張奕威,即時共焦顯微三維輪廓量測技術之研發,碩士論文,國立臺北科技大學自動化科技研究所,台北,2007。
[5]陳昭男,彩色共焦顯微三維形貌量測術之研發,碩士論文,國立臺北 科技大學自動化科技研究所,台北,2009。
[6]C. J. R. Sheppard and X. Q. Mao, “Confocal microscopes with slit apertures,” Journal of Modern Optics, no. 35, 1988, pp.1169-1185.
[7]T. Wilson, S. J. Hewlett and C. J. R. Sheppard, “Use of objective lenses with slit pupil functions in the imaging of line structures,” Applied Optics, vol. 29, no. 31, 1990, pp.4705-4714.
[8]T. Tanaami, S. Otsuki, N. Tomosada, Y. Kosugi, M. Shimizu and H. Ishida, “High-speed 1-frame_ms scanning confocal microscope with a microlens and Nipkow disks,” APPLIED OPTICS, vol. 41, no. 22,2002.
[9]C. H. Lee and J. Wang, “Noninterferometric differential confocal microscopy with 2-nm depth resolution,” Optics Communications, volume 135, issue 4-6, 1998, pp.233-237.
[10]J. B. Tan, J. Liu and Y. H. Wang, “Differential confocal microscopy witha wide measuring range based on polychromatic illumination,” Meas. Sci. Technol. 21, 054013, 2010.
[11]W. Zhao, Q, Jiang, L, Qiu and D. Liu , “Dual-axes differential confocal microscopy with high axial resolution and long working distance ,” Optics Communications , vol. 284,2011, pp.15-19.
[12]F. Bitte, G. Dussler and T. Pfeifer, “3D micro-inspection goes DMD”, Optics and Lasers in Engineering, vol. 36, 2001, pp.155–167.
[13]S. Cha, P. C. Lin, L. Zhu, P. C. Sun and Y. Fainman , “Nontranslational three-dimensional profilometry by chromatic confocal microscopy with dynamically configurable micromirror scanning,” Applied Optics, vol. 39, issue 16 ,2000, pp.2605-2613.
[14]L. C. Chen, C. N. Chen and Y. W. Chang, “Development of a new multi-wavelength confocal surface profilometer for on-line automatic optical inspection (AOI),” Asian Symposium for Precision Engineering and Nanotechnology, 2009.
[15]G. Molesini, G. Pedrini, P. Poggi and F. Quercioli, “Focus-wavelenght encoded optical profilometer,” Opt. Comm. 49, 1984, pp.229-233.
[16]G. J. Tearney, R. H. Webb and B. E. Bouma, “Spectrally encoded confocal microscopy, ” Optics Letters, vol. 23 ,1998, pp.1152-1154.
[17]L. C. Paul, S. P. Chen, Z. Lijun and F. Yeshaiahu, “Single-shot depth-section imaging through chromatic slit-scan confocal microscopy, ” Applied Optics, vol. 37, no. 28 ,1998, pp.6764-6770.
[18]H. J. Tiziani, R. Achi and R. N. Kramer, “Chromatic confocal microscopy with microlenses,” J. of Mod. Opt. 43, 1996, pp.155-163.
[19]M. A. Browne, O. Akinyemi, F. Crossley and Duncan T.B. Stacey , “Stage-Scanned Chromatically Aberrant Conlocal Microscope for 3D Surface Imaging,” Proc. of SPIE, vol. 1660 ,1992, pp.532-541.
[20]H. Perrin, P. Sandoz and G. Tribillon, “Profilometry spectral encoding of the optical axis,” Proc. of SPIE, vol. 2340, 1994, pp.366-374.
[21]H. J. Tiziani and H. M. Uhde, “Three-dimensional image sensing by chromatic confocal microscopy ,” APPLIED OPTICS, vol. 33, no. 10, 1994, pp.1838-1843.
[22]R. J. kaitis and T. Wilson, “A method for characterizing longitudinal chromatic aberration of microscope objectives using a confocal optical system,” Journal of Microscopy, vol. 195, 1999, pp.17-22.
[23]P. M. Lane, R. P. Elliott and C. E. MacAulay, “Confocal Micro- endoscopy with Chromatic Sectioning, ” Proc. of SPIE, vol. 4959, 2003, pp.23-26.
[24]J. Garzón Reyes, J. Meneses, A. Plata, G. Tribillon and T. Gharbi, “Axial resolution of a chromatic dispersion confocal microscopy,” Proc. of SPIE, vol. 5622, 2004, pp.766-771.
[25]J. Garzón R, J. Meneses, A. Plata, G. Tribjilon and T. Gharbi, “Chromatic confocal method for determination of the refractive index and thickness,” Proc. of SPIE, vol. 5622, 2004, pp.805-810.
[26]K. Shi, P. Li, S. Yin and Z. Liu, “Chromatic confocal microscopy using supercontinuum light,” Applied Optics, vol. 12, no. 10, 2004, pp.2096-2101.
[27]K. Shi, P. Li, S. Yin, and Z. Liu, “Surface profile measurement using chromatic confocal microscopy,” Proc. of SPIE, vol. 5606, 2004, pp.124-131.
[28]A. K. Ruprecht, C. Pruss, H. J. Tiziani, W. Ostena, “Confocal micro- optical distance sensor: principle and design,” Proc. of SPIE, vol. 5856, 2005, pp.128-135.
[29]P. Lücke, A. Last, J. Mohr, A. K. Ruprecht, C. Pruss, H. J. Tiziani, W. Osten, P. Lehmann, S. Schönfelder , “Confocal microoptical distance sensor: realization and results,” Proc. of SPIE, vol. 5856, 2005, pp.136-142.
[30]G. Berkovic, E. Shafir, M. A. Golub, M. Bril and V. Shurman, “Multi wavelength fiber-optic confocal position sensor with diffractive optics for enhanced measurement range,” Proc. of SPIE, vol. 6619, 2007, pp.66190U.
[31]E. Behroodi, A. Mousavian and H. Latifi, “Simulation and fabrication of white light confocal microscope to attain the surface profile using CCD and image processing techniques,” Proc. of SPIE, vol. 7389, 2009, pp.73892U.
[32]A. Ishii, “3-D Shape Measurement Using a Focused-Section Method”, Proc. 15th International Conference , vol.4, 2000, pp.828-832.
[33]A. Ishii, J. Mitsudo and Y. Fujinaka, “Three-dimensional shape sensor based on lateral focused-plane sectioning”, Proc. of the SPIE, vol. 5602, 2004, pp.99-106.
[34]A. Ishii, M. Shimizu, and Y. Imoto, “Optical Tomography Using Confocal Fan-Beam Illumination and Its Application to LCD Panel Inspection”, Proc. of SPIE, vol. 4902, 2002.
[35]陳聖函,橫向掃描式共焦顯微三維輪廓量測技術之研發,碩士論文,國立臺北科技大學自動化科技研究所,台北,2009。
[36]李智凱,創新式具線上抗振能力共焦顯微三維形貌量測系統之研發,碩士論文,國立臺北科技大學自動化科技研究所,台北,2010。
[37]P. S. Toh, “Confocal Imaging,” U.S. Patent, No.:6,838,650, 2005.
[38]P. C. Lin, P.C. Sun, L. Zhu, and Y. Fainman, “Single-shot depth-section imaging through chromatic slit-scan confocal microscopy,” APPLIED OPTICS, vol. 37, no. 28, 1998, pp.6764- 6770.
[39]S. K. Nayar and Y. Nakagawa, “Shape from focus: an effective approach for rough surfaces”, Proc. IEEE International Conference on robotics and automation, 1990, pp.218-225.
[40]S. K. Nayar, “Shape and Reflectance from Image Intensities,” Proc. Third Annual Conference on Intelligent Robotic Systems for Space Exploration, 1991, pp.81-98.
[41]M. Subbarao and T. Choi, “Accurate Recovery of Three-Dimensional Shape from Image Focus,” IEEE Transactions on Pattern analysis and machine intelligence, vol. 17, no. 3, 1995, pp.266-274.
[42]S. Cha, P. C. Lin, L. Zhu, P. C. Sun and Y. Fainman , “Nontranslational three-dimensional profilometry by chromatic confocal microscopy with dynamically configurable micromirror scanning, ” Applied Optics, vol. 39, issue 16, 2000, pp.2605-2613.
[43]A. M. Raighne, J. Wang, E. M. Cabe and T. Scharf, “Variable focus microlenses: Issues for confocal imaging,” Proc. of SPIE, vol. 5827, 2005, pp.12-22.
[44]H. J. Tizianl, R. Achi and R. N. Kramer, “Chromatic confocal microscopy with microlenses,” Journal of Modern Optics, Vol. 43, no. 1, 1996, pp.155-163.
[45]E. F. Robert and T. G. Biliana, Modern Optical design, The McGraw Hill Companies, 2001, pp.12-22.
[46]E. Hecht, Optics : Chapter 6, 4th Edition, Addison Wesley, 2002, pp.102-120.
[47]戴文智,三維輪廓影像視覺掃描量測技術之研究,博士論文,中原大學機械工程研究所,桃園,1996。
[48]http://www.raylase.com/de/product_subhome.php?n1=2&n2=2.


電子全文 電子全文(本篇電子全文限研究生所屬學校校內系統及IP範圍內開放)
連結至畢業學校之論文網頁點我開啟連結
註: 此連結為研究生畢業學校所提供,不一定有電子全文可供下載,若連結有誤,請點選上方之〝勘誤回報〞功能,我們會盡快修正,謝謝!
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top
無相關期刊
 
系統版面圖檔 系統版面圖檔