臺灣博碩士論文加值系統

本研究主要開發可撓式不鏽鋼箔基板非晶矽薄膜太陽能電池整體製程技術，並分別應用電化學拋光（EP）及電化學機械拋光（ECMP）技術，於不鏽鋼箔基板製作奈米顯微結構，以提高可撓式矽薄膜太陽能電池效能，完成SS304/Mo/Ag/AZO/p-i-n/AZO電池製程技術開發。研究結果發現，SS304基板經EP與ECMP處理後表面粗糙度分別為Ra 0.052μm; Ra 0.022μm，可得到EP SS304電池開路電壓Voc＝0.64V、短路電流密度Jsc＝10.90mA/cm2、填充因子FF＝55%、轉換效率η＝3.84%，及ECMP SS304電池Voc＝0.77V, Jsc＝11.24mA/cm2, FF＝53%, η＝4.59%，顯示不鏽鋼箔基板經EP與ECMP處理均可有效增加光電流，且ECMP較EP處理之不鏽鋼基板能獲得更高之電池效能。於電池環境測試部份，經-40℃~85℃溫度循環一百次後，電池效率衰退0.33%；經一百次60°反覆撓度測試後，效率衰退0.08%；依ASTM D3359規範，薄膜附著力可達4B等級，百格內脫落率約3%。

This study presents a flexible stainless steel（SS） foil substrate for amorphous silicon（a-Si:H） n-i-p thin-film solar cells. The SS substrates are treated by electrochemical polishing（EP） and electrochemical mechanical polishing（ECMP） respectively to form a nano-scale surface morphology. The rough morphology of SS substrate could result in high diffusion reflection but also cause high density of micro-cracks in the deposited photoelectric layers. Therefore, to get a balance between the light trapping performance and the quality of the deposited photoelectric layers is the focus of this study. An a-Si:H thin-film solar cell with SS304/Mo/Ag/AZO/p-i-n/AZO structure using electrochemical treated flexible SS substrate is developed.
The results show that the center line average roughness（Ra） of 0.063 μm and 0.027 μm are achieved by EP and ECMP processes. Then, the PECVD is utilized to deposit the amorphous silicon p-i-n photoelectric layers on the treated SS304 substrate and the efficiency of solar cells is measured. Open circuit voltage（Voc）of 0.64 V, short-circuit current density （Jsc） of 10.90 mA/cm2, fill factor（FF） of 55%, and conversion efficiency（η） of 3.84% are measured on the cell with EP substrate. Voc of 0.77 V, Jsc of 11.24 mA/cm2, FF of 53%, and η of 4.59% are measured on the cell with ECMP substrate. It shows that the stainless steel foil substrates treated by both EP and ECMP processes can effectively increase the light current of the cells but the cell with ECMP substrate has better cell performance than the cell with EP substrate.
In order to understand the reliability of the cells, an environmental test, such as thermal-cycle test (-40℃ ~ 85℃) is carried for a hundred cycles. The efficiency of the thermal-cycle tested cell is decreased by 0.33%. A 60° bending test is carried for a hundred cycles on a cell. The efficiency of the bending tested cell is decreased by 0.08%. For adhesion test, the deposited film can achieve 4B grade of adhesion according to ASTM D3359 standard with a chipping rate about 3%.

書名頁 ……………………………………………………………… i
論文口試委員審定書 ……………………………………………… ii
授權書 ……………………………………………………………… iii
中文摘要 …………………………………………………………… vii
英文摘要 …………………………………………………………… viii
誌謝 ………………………………………………………………… x
目錄 ………………………………………………………………… xi
圖目錄 ……………………………………………………………… xiv
表目錄 ……………………………………………………………… xvii
符號說明 …………………………………………………………… xix
第一章 緒論 ……………………………………………………… 1
1.1研究背景與目的 …………………………………………… 1
1.2太陽能電池簡介 …………………………………………… 4
1.2.1 太陽能電池分類 …………………………………… 4
1.2.2 可撓式薄膜太陽能電池 …………………………… 8
1.2.3 非晶矽薄膜太陽能電池 …………………………… 11
1.3全球技術/市場發展趨勢分析 …………………………… 14
1.4光捕捉 ……………………………………………………… 19
1.5研究目標與論文架構 ……………………………………… 22
第二章 文獻回顧 …………………………………………………… 26
2.1可撓式不銹鋼箔非晶矽薄膜太陽能電池結構 …………… 26
2.2.1 正面電極 …………………………………………… 27
2.2.2 背面電極 …………………………………………… 30
2.2非晶矽薄膜電池光補捉結構 ……………………………… 31
2.3微結構表面形態量化指標 ………………………………… 34
第三章 研究方法與實驗設備 ……………………………………… 40
3.1實驗材料及試片準備 ……………………………………… 41
3.2沉積原理及實驗設備 ……………………………………… 44
3.2.1 黃光微影、蝕刻及剝離法製程 …………………… 44
3.2.2 ECM ………………………………………………………………………………… 48
3.2.3 連續式多腔體磁控濺鍍系統 ……………………… 55
3.2.4 超高頻電漿輔助化學氣相沉積系統 ……………… 58
3.3量測分析儀具 ……………………………………………… 61
3.3.1 表面輪廓儀 ………………………………………… 61
3.3.2 3D雷射掃描共軛焦顯微鏡 ………………………… 61
3.3.3 紫外光/可見光/近紅外光分光光譜儀 …………… 62
3.3.4 場發射掃描式電子顯微鏡 ………………………… 63
3.3.5 太陽光能模擬器 …………………………………… 63
3.3.6 熱循環試驗 ………………………………………… 64
3.3.7 百格刀附著力試驗 ………………………………… 65
第四章 可撓式不鏽鋼箔基板微結構光學模擬 …………………… 66
4.1 TracePro光線追跡模擬軟體介紹 …………………… 66
4.2 光捕捉微結構研究方法 ………………………………… 67
4.3 光學模擬與實際反射率量測關係 ……………………… 68
4.4 TracePro微結構光學模擬指標與分析規劃 ………… 68
4.4.1微結構光學模擬指標 ……………………………… 68
4.4.2 模型表面形貌與尺寸設計 ………………………… 71
4.5 微結構光學模擬 ………………………………………… 72
4.5.1 微結構對霧度之影響 ……………………………… 72
4.5.2 微結構對漫反射角度分布之影響 ………………… 74
第五章 Etching/ Lift-off可撓式不鏽鋼箔基板微結構研究 … 82
5.1 SS304原始基板電池特性 ………………………………… 82
5.2光捕捉微結構製作 ………………………………………… 84
5.2.1 Etching長條柵狀及井字格狀微結構 …………… 84
5.2.2 Lift-off長條柵狀微結構 ……………………… 85
5.3 光捕捉微結構實際製程與模擬參數修正 ……………… 87
5.4 基板微結構對矽薄膜電池特性之影響 ………………… 89
第六章 具微結構AZO透明導電薄膜研究 ………………………… 93
6.1 電池結構設計與實驗規劃 ……………………………… 93
6.2 AZO蝕刻時間對矽薄膜電池特性之影響 ……………… 93
第七章 EP/ ECMP可撓式不鏽鋼箔基板微結構研究 …………… 99
7.1 EP/ ECMP SS304製程開發 …………………………… 99
7.2 EP/ ECMP SS304表面形貌特性分析 ………………… 99
7.3 EP/ ECMP SS304矽薄膜電池特性 …………………… 102
第八章 可靠度環境試驗 …………………………………………… 105
8.1熱循環測試 ………………………………………………… 105
8.2撓曲測試 …………………………………………………… 108
8.3 膜層附著力測試 …………………………………………… 110
第九章 結論與未來展望 ……………………………………………… 112
9.1 結論 ………………………………………………………… 112
9.2 未來展望 …………………………………………………… 115
參考文獻 ……………………………………………………………… 117
簡歷 …………………………………………………………………… 132

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