臺灣博碩士論文加值系統

專利申請中，暫不公開

摘 要 i
Abstract ii
致 謝 iii
目 錄 iv
圖目錄 vii
表目錄 ix
第一章　緒論 1
1.1　研究動機 1
1.2　本文架構 3
第二章　薄膜應力介紹 4
2.1　前言 4
2.2　薄膜應力定義 4
2.3　薄膜應力的計算 6
2.3.1　硬性基板薄膜應力 6
2.3.2　軟性基板薄膜應力 7
2.4　軟性基板薄膜應力相關測量法 7
2.4.1　陰影疊紋法 8
2.4.2　雙光束陰影疊紋干涉法 10
2.5　小結 12
第三章　外差疊紋干涉術之相關理論 13
3.1　前言 13
3.2　外差干涉術之基本原理 13
3.3　外差干涉術之相位解析方法 14
3.4　相位校正與相位解纏繞 16
3.5　光柵自成像效應 18
3.6　光柵疊紋效應 18
3.7　小結 21
第四章　測量原理與實驗結果 23
4.1　前言 23
4.2　測量原理 23
4.2.1　重建表面形貌原理 23
4.2.2　求得曲率半徑與薄膜應力的量測 27
4.3　實驗結果 29
4.4　討論 39
4.5　小結 41
第五章　結論 42
參考文獻 43

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