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研究生:梁庭毓
研究生(外文):Ting-Yu Liang
論文名稱:發展精密噴霧成型技術製作可撓式塑膠電子元件
論文名稱(外文):Development of Precise Spraying coating Process for Fabrication of Flexible electronic Device
指導教授:張致遠張致遠引用關係
指導教授(外文):Chih-Yuan Chang
口試委員:張致遠吳政憲莊承鑫
口試委員(外文):Chih-Yuan ChangCheng-Hsien WuCheng-Hsin Chuang
口試日期:2014-06-30
學位類別:碩士
校院名稱:國立高雄應用科技大學
系所名稱:模具工程系碩士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2014
畢業學年度:102
語文別:中文
論文頁數:142
中文關鍵詞:噴霧成型導電微結構
外文關鍵詞:spraying coatingPEDOT:PSS
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有機導電微結構元件是應用於可撓式電子元件、平面顯示器、光電醫療產品等領域的關鍵零組件,雖然傳統的半導體製程(曝光、顯影與蝕刻技術),可以進行導電微結構元件的複製量產,但是製程牽涉高溫與高真空的過程且步驟複雜耗時,也需要昂貴的生產設備。因此,本研究提出了一套微結構模具遮罩與噴霧塗佈的整合技術來製作導電微結構陣列元件,以達到降低設備成本、簡化製程步驟與適合大量生產之目標。本研究所使用的噴霧材料為有機導電高分子PEDOT/PSS溶液,並且自行研發三軸移動式噴霧塗佈設備,以探討噴霧壓力、噴霧距離、移動速度,以及不鏽鋼微結構模具與基材的表面改質特性,對於導電微結構元件的影響。進而找出較佳的製程參數,來製作有機導電微結構元件。
In recent years, the organic conductive micro-structure device has been widely used in various applications such as flexible electronic devices, flat panel displays and Bio-sensor field. In the traditional processes, photo-lithography and wet etching are regarded as the best mass-production methods to fabricate conductive micro-structure devices. However, these processes involve high temperature, high vacuum and require expensive facilities. Therefore, this paper reports an innovative technique for fabrication of organic conductive micro-structure device based on precision spraying with metal mask. In this study, the effects of processing conditions on the shape and quality of formed organic conductive micro-structure devices are investigated. Under the proper processing conditions, the perfect organic conductive micro-structure device can be rapidly fabricated.

摘要
Abstract
誌謝
目錄
表目錄
圖目錄
第一章 緒論
1-1 前言
1-2 研究動機
1-3 文獻回顧
1-3-1 導電微結構元件製作方法
1-3-2 光微影技術
1-3-3 軟微影技術
1-3-4 精密噴墨法
1-3-5 網印成型法
1-3-6 精密噴霧法
1-4 總結比較
1-5 本文架構
第二章 實驗設備與材料介紹
2-1 噴霧系統設備之整體結構
2-1-1 精密流體噴霧閥
2-1-2 桌上型點膠機
2-1-3 噴霧調節器
2-1-4 調壓閥
2-1-5 教導盒
2-2實驗設備介紹
2-3 實驗材料介紹
2-3-1 高分子導電材料(PEDOT/PSS)
2-3-2 導電材料之底層黏著劑(DDK-2)
2-3-3 基板(substrate)
2-3-4 改質表面(PDMS)
2-3-5 改質表面(潤滑脫模劑)
第三章 實驗流程與方法
3-1 實驗準備
3-1-1 不鏽鋼微模具遮罩
3-1-2 基板與材料備製
3-2 噴霧介紹
3-2-1 噴嘴 (Nozzle)
3-2-2 噴霧距離 (Spray Distance)
3-2-3 噴霧角度 (Spray Angle)
3-2-4 噴霧流量分佈 (Spray Flow)
3-2-5 影響噴霧性能的因素 (Factor)
3-3 實驗流程
3-3-1 噴霧成型微結構之實驗設計
3-3-2 噴霧成型步驟
3-4 實驗參數規畫
3-5 人機介面控制程式
3-6 陣列噴霧方式與單次流量
3-6量測規劃
第四章 實驗結果與討論
4-1 初步成型形貌探討
4-2 表面改質成型探討
4-2-1 PEDOT/PSS
4-2-2 改質成型探討
4-3 噴霧製程探討
4-3-1 點性與線性噴霧方式
4-3-2 噴霧壓力
4-3-3 噴霧距離
4-3-4 噴霧速度
4-3-5 噴霧次數
4-3-6 加熱溫度與時間
4-3-7 模具尺寸
4-4 導電性探討
4-4-1 結構厚度影響電阻率
4-4-2 加熱溫度影響電阻率
4-4-3 空氣與真空加熱影響電阻率
4-4-4 不同型號PEDOT/PSS影響電阻率
4-5 大面積陣列噴霧成型
4-5-1 最佳參數製程
4-5-2 大面積陣列噴霧成型與其均勻性
第五章 結論與未來方向
參考文獻
作者簡介

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