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研究生:江振華
研究生(外文):CHIANG, CHEN-HUA
論文名稱:探討添加有機酸以電泳沉積法製備氧化鎢薄膜之研究
論文名稱(外文):A Study on The Effect of Adding Organic Acid During The Electrophoretic Deposition of Tungsten Oxide Thin Films
指導教授:翁文彬翁文彬引用關係宋蕙伶
指導教授(外文):WENG, WEN-PINGSUNG, HUI-LING
口試委員:翁文彬宋蕙伶何澤民韋孟育
口試委員(外文):WENG, WEN-PINGSUNG, HUI-LINGHER, TZE-MINWEI, MON-YU
口試日期:2014-06-17
學位類別:碩士
校院名稱:龍華科技大學
系所名稱:機械工程系碩士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2014
畢業學年度:102
語文別:中文
論文頁數:76
中文關鍵詞:電泳沉積法氧化鎢電致色變有機酸
外文關鍵詞:Electrophoresis DepositionWO3ElectrochromicOrganic Acid
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使用電泳沉積法製備氧化鎢薄膜,有製程設計簡單、設備成本低廉、可披覆各種表面形狀複雜之基材、披覆效率高與前驅物配置容易的優點,故電泳沉積法已開始被大家探討與應用。電致色變材料是近年來被廣泛研究的薄膜光學應用,它可以被利用在建築物與汽車的玻璃建材上,以製作調節光源、控制熱負荷的智慧型窗戶。
本實驗使用鎢粉為溶質,過氧化氫為氧化劑,混合後經過濾形成一個透明的溶液。再添加醋酸作為螯合劑,經由迴流裝置去除多餘的過氧化氫,並添加不同比例有機酸形成前驅體鍍液。
實驗結果指出,添加3 wt.% 檸檬酸鍍液並增加攪拌反應時間熱處理300℃退火之鍍膜,具有較優異的薄膜光學特性,在波長560 nm時的穿透率改變最大,穿透率差可達52%,光學密度差為0.72;薄膜於500℃退火後,在波長560 nm時的穿透率可達52.8%,光學密度差為0.73,但是薄膜著色不易,故非結晶態的氧化鎢薄膜有較優異的光學性質。
Recently, there has been growing interest in discussing and applying electrophoretic deposition. The advantage of using electrophoretic deposition to produce tungsten oxide thin films can make the process simple, lower the cost, cover different kinds of complicated surface materials, enhance coating efficiency, and arrange the precursor easily. Many recent studies have focused on the application of optical films via using electrochromic materials. This technique can be used on the car and building glasses to adjust light and control thermal loads and become smart windows.
In this experiment, we use tungsten powder as solute and hydrogen peroxide as oxidant; mix and filter them to become a transparent solution. After that, we add acetic acid as chelate to remove superfluous hydrogen peroxide via using reflux device. Last, we add different proportion of organic acid to produce precursor liquid.
The results indicate that the tungsten oxide thin films of adding 3 wt.% of citric acid liquid and increasing the stir reaction time after 300℃ of thermal treatment has the superior optical films characteristics. In a wavelength of 560 nm, the transmittance is the greatest. The transmittance can reach to 52%, and the optical density difference is 0.72. However, it is not easy to color the film. Thus, the amorphous state of tungsten oxide thin films has the most superior optical characteristics.
摘要 i
ABSTRACT ii
誌謝 iv
目錄 v
表目錄 vii
圖目錄 viii
第一章 緒論 1
1.1 前言 1
1.1 研究動機與目的 2
第二章 文獻回顧 4
2.1 電致色變 4
2.2 電泳沉積(Electrophoresis deposition, EPD) 8
2.2.1 膠體電荷動力及電泳原理 8
2.3 氧化鎢性質 10
2.3.1 氧化鎢前驅物 10
第三章 實驗步驟及研究方法 12
3.1 實驗步驟 12
3.1.1 前驅體鍍液配置 13
3.1.2 ITO試片清洗 15
3.2 研究方法 16
3.2.1 前驅體粉末分析 16
3.2.2 薄膜性質分析 16
第四章 結果與討論 19
4.1 氧化鎢前驅體粉末成分分析 19
4.1.2 熱重量分析 26
4.1.3 熱示差掃描熱量分析 26
4.2 未添加有機酸對薄膜的影響 28
4.2.1 氧化鎢薄膜微觀組織分析 28
4.2.2 氧化鎢薄膜光學性質分析 31
4.3 添加不同wt.%有機酸對薄膜的影響 34
4.3.1 氧化鎢薄膜光學性質分析 35
4.3.2 氧化鎢薄膜微觀組織分析 42
4.3.3 X光繞射分析 49
4.3.3 能量散射光譜分析 51
4.4 電致變色性質提升 58
4.4.1 改變電泳沉積鍍液攪拌時間 58
4.4.2 氧化鎢薄膜光學性質分析 58
第五章 結論 70
參考文獻 71
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