臺灣博碩士論文加值系統

石墨烯是一種二維材料，由於其特殊的能帶結構，因此為發展新穎的兆赫波光電元件的熱門材料。本研究以化學氣相沉積法製作大面積品質優良的石墨烯，以拉曼光譜探討銅箔純度對石墨烯膜薄品質的影響；以及以變溫兆赫輻射時析頻譜探討不同溫度下石墨烯薄膜之光電導率，接著利用理論擬合分析獲得材料的散射率和電漿頻率，藉由擬合結果得知載子濃度和載子遷移率。藉此我們得知在可觀測溫度範圍內，其散射率為一常數，因此我們認為其貢獻主要不是由聲子散射，而是由雜質散射…等受溫度影響有限之散射機制，導致其對溫度改變沒有影響。

Graphene is a two-dimensional material. Due to its unique energy band structure, is considered a promising material for THz optoelectronic devices. In this work, we report our measurements with Raman spectroscopy and THz optical conductivity of graphene, is deposited on fuse silica substrates by CVD processes, by temperature-dependent terahertz time-domain spectroscopy. The impurity of copper and its treatments can affect the quality of graphene. The intraband scattering rate and plasma frequency can be obtained by fitting with theoretical models. Other physical parameters, including carrier density and carrier mobility, can be deduced from the theoretical fitting. Here, we obtain the scattering rate is a constant with different temperature. This implies the scattering mechanism might be independent of phonon scattering, dependent of impurity scattering.

中文摘要 i
英文摘要 ii
誌謝 iii
目錄 iiv
表格目錄 viii
圖目錄 ix
第1章 第一章　緒論 1
1.1 簡介 1
1.1.1 石墨烯的介紹 1
1.1.2 石墨烯的原子結構 2
1.1.3 石墨烯的電子特性 4
1.1.4 石墨烯的聲子色散特性 5
1.1.5 石墨烯的光學特性 6
1.2 兆赫時域解析頻譜 7
1.2.1 兆赫波的介紹 7
1.2.2 兆赫波的發展 8
1.3 研究動機 8
第2章 第二章　儀器原理及介紹 10
2.1 化學氣相沉積系統 10
2.2 光學顯微鏡 11
2.3 拉曼光譜術 12
2.3.1 拉曼光譜術的原理 13
2.3.2 石墨烯之一階和二階拉曼散射 15
2.4 兆赫時域解析頻譜 16
2.4.1 兆赫輻射的產生機制 17
2.4.2 兆赫輻射的偵測原理 21
2.4.3 實驗系統的架設 21
2.4.4 變溫系統的架設 25
第3章 第三章　樣品製備與實驗方法 27
3.1 石墨烯的製備簡介 27
3.1.1 膠帶黏法和微機械劈離法 27
3.1.2 碳化矽表面熱裂解磊晶成長法 28
3.1.3 氧化石墨烯還原法 29
3.1.4 化學氣相沉積法 31
3.2 實驗方法 34
3.2.1 銅箔前置處理 35
3.2.2 化學氣相沉積製程 35
3.2.3 轉移製程 36
3.2.4 薄膜分析 38
第4章 第四章　電磁理論分析 39
4.1 傅立葉轉換 39
4.2 透射係數比 39
4.2.1 基板複數折射率之理論計算 39
4.2.2 薄膜穿透率之理論計算 41
4.2.3 複數介電函數與複數折射率 43
4.2.4 光學電導率 43
4.3 石墨烯之光電導率理論模型 44
4.4 介電函數模型 49
第5章 第五章　實驗結果分析與討論 50
5.1 化學氣相沉積法製程參數對石墨烯之影響 50
5.1.1 銅箔純度對成長石墨烯之影響 50
5.1.2 銅箔前置處理－冰醋酸的作用 52
5.2 光學顯微鏡量測結果 53
5.3 拉曼光譜量測結果 54
5.4 兆赫波經空氣之量測結果和基本參數 56
5.5 兆赫波經基板量測結果 58
5.5.1 兆赫波時域訊號 58
5.5.2 兆赫波頻域訊號 59
5.5.3 基板複數折射率分析結果 60
5.6 兆赫波經石墨烯之變溫量測結果 61
5.6.1 石墨烯薄膜之時域和頻域訊號 61
5.6.2 複數電導率 64
5.6.3 光電導率理論模型擬合結果 66
5.6.4 複數介電函數 68
5.6.5 載子濃度、散射率和電子遷移率 68
第6章 第六章　結論與展望 70
第7章 參考文獻 71

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