臺灣博碩士論文加值系統

本文分為兩部分，在模擬部分我們模擬了高低折射率材料的反射光譜及反射相位，比較了使用反射光譜和反射係數去擬合光學常數的準確性，成功的證明藉由量測反射係數可提高基因演算法在計算上的準確性。在實驗部分我們藉由掃描式白光干涉儀量測光學膜的干涉條紋，再經由傅利葉轉換求得反射振幅及反射相位，在量測上我們比較量測樣品四個不同區域的結果，確定實驗上的穩定性，接著利用兩者資訊搭配基因演算法擬合出折射率和厚度，實驗的結果和橢偏儀做比較，其計算結果和橢偏儀相近，証明了此實驗方法的可行性。

The thesis consists two parts. In first part, the reflection amplitude and reflection phase of high and low refractive index material are simulated. The accuracy of using reflectance and reflection coefficient to calculate optical constant are compared. It proves that using reflection coefficient can improve the accuracy. In the second part, we measure the interferogram of thin film by using white light scanning interferometer. The reflection amplitude and phase are calculated by transforming the interference information. In order to confirm the stability of our method, we measure four different parts of the sample. And then, we use reflection coefficient and genetic algorithms to fit the optical thickness and refractive index. The measure results are close to that measured by ellipsometry. It indicates our method is feasible.

第一章 緒論 1
1-1 前言 1
1-2 研究動機 2
1-3 本文架構 3
第二章 薄膜光學基本理論 4
2-1電磁波與光學導納 4
2-2 單層膜的反射與透射理論和膜矩陣 5
2-3 多層膜的反射和透射理論 9
第三章 光學常數量測法 11
3-1破壞性量測技術 11
3-2光學量測方法 12
3-2-1 光度法 12
3-2-2 橢圓偏振儀 16
3-2-3 白光干涉技術 19
第四章 白光干涉技術 20
4-1 干涉原理 20
4-2 干涉量測技術 21
4-2-1相移干涉術 21
4-2-2 垂直掃描干涉技術 22
4-3 白光干涉理論 23
第五章 實驗原理與架構 27
5-1 白光MICHELSON干涉儀 27
5-2 實驗原理與模擬 29
5-2-1靈敏度定義和模擬 29
5-3 基因演算法 35
5-4 實驗量測結果與討論 36
第六章 結論 45
參考文獻 46

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