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研究生:陳麒文
研究生(外文):Chi-Wen Chen
論文名稱:以Co/ZnO介面為背電極層CIGS薄膜太陽能電池的表面結構研究
論文名稱(外文):Studies of CIGS thin film solar cells with Co/ZnO back contact
指導教授:蘇炯武
指導教授(外文):Chiung-Wu Su
學位類別:碩士
校院名稱:國立嘉義大學
系所名稱:電子物理學系光電暨固態電子研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
畢業學年度:102
語文別:中文
論文頁數:112
中文關鍵詞:鈷氮薄膜熱蒸鍍
外文關鍵詞:CIGSAES
相關次數:
  • 被引用被引用:0
  • 點閱點閱:55
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  • 下載下載:5
  • 收藏至我的研究室書目清單書目收藏:0
本篇論文探討鈷氮薄膜應用在CIGS太陽能電池背電極層,實驗分為兩個部份:第一部份為成長4 nm的鈷氮薄膜在氧化鋅(002)基板上,再成長150 nm的鋅層,目的為保護鈷氮薄膜。完成後接著沉積80 nm的CdS緩衝層,2 μm的CIGS吸收層,250 nm的鋁電極;最後量測I-V曲線。第二部份為在氧化鋅(002)基板上成長2 nm的鈷氮薄膜以及2 nm的鋅層,鋅層主要的目的為隔開鈷氮薄膜與CIGS,探討鈷氮薄膜與CIGS之間對太陽能電池效率的影響,此實驗結構增加了鉬層及氧化鋅層來增加導電率,元件效率為0.1%。
In this study, cobalt nitrogen thin films substitution molybdenum back electrode , and manufacture CIGS thin film solar cells. The experiments divide into two parts: The first part is grow 4 nm cobalt nitrogen thin films on the zinc oxide (002) substrate, and grow 150 nm zinc thin films for protect the cobalt nitrogen thin films. Then deposit 80 nm CdS buffer layers, 2 μm CIGS absorption layers, and 250 nm aluminum electrodes. The second part is grow 2 nm cobalt nitrogen thin films on the zinc oxide (002) substrate and 2 nm zinc layers for separate the cobalt nitrogen thin films and CIGS, then discussion cobalt nitrogen thin films and CIGS to solar cell influence. As a esult, the CIGS solar cell device efficiency is 0.1%.
中文摘要 I
Abstract II
關鍵字與縮寫 III
誌謝 IV
目錄 V
圖表目錄 VIII
第一章 緒論 1
第二章 太陽能電池原理與設計 4
2-1 太陽能電池的發展 4
2-2 太陽能電池種類 6
2-2-1 單晶矽/多晶矽太陽能電池 6
2-2-2 矽薄膜型太陽能電池 6
2-2-3 III-V化合物太陽能電池 7
2-2-4 II-VI化合物太陽能電池 7
2-2-5 染料敏化太陽能電池 7
2-3 太陽能電池原理 8
2-4 CIGS太陽能電池 10
2-4-1 基板 12
2-4-2 背電極層 13
2-4-3 吸收層 14
2-4-4 緩衝層 16
2-4-5 窗口層 17
2-5 量測及分析儀器 18
2-5-1 原子力顯微鏡 18
2-5-2 X光繞射分析儀 19
2-5-3 四點探針 20
2-5-4 霍爾量測 21
2-5-5 I-V量測 22
第三章 超高真空系統儀器與原理 23
3-1 超高真空系統(UHV) 23
3-1-1 為何需要超高真空 23
3-1-2 真空分類 24
3-1-3 抽氣系統 25
3-1-4 破真空、抽真空與烘烤腔體步驟 26
3-2 歐傑電子能譜術 30
3-2-1 歐傑效應 30
3-2-2 RFA-AES 32
3-2-3 RFA-LEED 35
3-3 鍍膜系統 37
3-3-1 薄膜沉積技術 37
3-3-2 薄膜成長方式 38
3-3-3 薄膜厚度計算 39
3-4 實驗儀器操作原理 45
3-4-1 離子槍 45
3-4-2 超高真空紅外線快速熱退火系統 47
3-4-3 歐傑電子能譜儀 48
3-4-4 低能量電子繞射儀 49
3-4-5 直熱式熱蒸鍍 51
3-4-6 分子束磊晶 51
第四章 實驗結果與討論 52
4-1 CIGS/CdS結構 52
4-1-1 實驗流程 52
4-1-2 實驗結構 54
4-1-3 樣品清潔 55
4-1-4 熱退火 56
4-1-5 薄膜成長 57
4-1-6 法拉第磁性量測 61
4-1-7 AFM量測 62
4-1-8 CdS緩衝層 63
4-1-9 CIGS吸收層 64
4-1-10鋁電極 66
4-1-11 I-V量測 67
4-2 CdS/CIGS結構 68
4-2-1 實驗流程 68
4-2-2 實驗結構 68
4-2-3 歐傑電子能譜與低能量電子繞射圖 69
4-2-4 AFM量測 73
4-2-5 CIGS製程 76
第五章 結論與未來工作 79
參考資料 80
附錄 TACT 2013研討會心得 92
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