本論文利用溶膠-凝膠製程沉積壓電薄膜在可撓之不鏽鋼基板上並開發可撓式之觸覺感測器，不鏽鋼可撓基板優點有應用範圍大、具彎曲性、耐高溫、輕和薄。另外，可撓式觸覺感測器可應用在人體脈搏、脈搏波速、血流速度及中醫脈診上。在陶瓷薄膜之觸覺感測器可分別製作於矽基板與可撓式不鏽鋼基板上。根據本次研究結果，鋯鈦酸鉛薄膜沉積在可撓不鏽鋼基板之靈敏度為0.085~0.110mVg-1mm-2，且高於鋯鈦酸鉛薄膜沉積於矽基板之靈敏度0.017mVg-1mm-2。
在製作以三氟乙烯共聚物薄膜為感測材料之觸覺感測器，於過程中使用電解水解離法能夠改善不鏽鋼基板之表面能。電解水處理製程其優點有低成本、低汙染，製成簡單與非破壞製程等等。實驗結果顯示以三氟乙烯共聚物薄膜沉積在不鏽鋼基板上之觸覺感測器之靈敏度為0.067mVg-1mm-2。
可撓式之觸覺感測器使用來量測人體不同之動脈脈搏處，包括頸動脈、肱動脈、足背動脈、橈動脈和二尖脈之動脈脈搏，並且克服人體之各種動脈區域及檢測人體之動脈輸出之脈搏信號，測量到之動脈脈搏波形可用於診斷患者動脈之相關疾病。量測人體不同動脈處之脈搏波速度(Pulse Wave Velocity, PWV)分別有二尖脈到橈動脈、肱動脈到橈動脈及橈動脈到足背動脈之脈搏波速度。而量測人體之血流速度(Blood Flow Velocity, BFV)分別有頸動脈及橈動脈之區域。最後，可撓之觸覺感測器應用在中醫脈診上，中醫醫學之脈診最主要為橈動脈之脈位處分別有寸、關、尺之脈位，藉由寸、關、尺之脈位及不同之脈診深度來獲得不同之脈搏波形之輸出，量測到在不同之脈位上之脈搏波形並且由脈搏波形能夠提供其人體之器官之健康狀況之相關資訊。

This dissertation presents the development of tactile sensors using the sol-gel process to deposit a piezoelectric thin-film on a flexible stainless steel substrate. Ceramic-based tactile sensors using both silicon and stainless steel substrates were demonstrated and excellent ferroelectric properties were demonstrated. It is characterized that the sensitivity of our PZT-based tactile sensor was approximately 0.085~0.110mVg-1mm-2 on a stainless steel substrate while the sensitivity of the PZT-based tactile sensor was approximately 0.017 mVg-1mm-2 on a silicon substrate.
A polymer-based tactile sensor using P(VDF-TrFE) material was also demonstrated with the developed deionized (DI) water dissociation technique. The deionized (DI) water dissociation technique has several advantages, such as low cost, minimal pollution, easy fabrication and non-destructive processing. It is characterized that the sensitivity of the P(VDF-TrFE) tactile sensor was approximately 0.067mVg-1mm-2.
The developed flexible tactile sensors can be used to measure human pulses at several areas, including carotid, brachial, ankle, radial artery, and apical regions. Flexible tactile sensors can overcome the diverse topology of various human body regions and sense the corresponding signals. The measured arterial pulse waveforms can be used to diagnose hypertension and cardiac failure of patients. Pulse wave velocity (PWV) was demonstrated based on human pulse measurements from apical to radial, brachial to radial, and radial to ankle. In addition, the tactile sensor was utilized to measure blood flow velocity (BFV) of human body such as carotid and radial artery. Finally, our tactile sensor was used to monitor the pulse waveforms of Cun, Guan, and Chi acupoints located at the radial artery region of the human body in Traditional Chinese Medicine (TCM).

誌謝 i
中文摘要 ii
ABSTRACT iii
目錄 v
圖目錄 ix
表目錄 xvii
第一章 緒論 1
1.1 前言 1
1.2 研究背景 4
1.2.1 人體動脈相關位置介紹 4
1.2.2 心血管疾病相關影響因素之介紹 8
1.2.3 人體之動脈硬化指標評估與量測方法 9
1.3 可撓式壓電感測器文獻回顧 10
1.4 觸覺感測器文獻回顧 18
1.4.1 觸覺感測器種類 18
1.4.2 觸覺感測器應用 21
1.4.3 觸覺感測器在人體脈搏之應用 23
1.4.4 觸覺感測器在人體脈搏波速傳遞之應用 25
1.4.5 觸覺感測器在中醫脈診感測之應用 26
1.5 論文架構 30
第二章 相關之理論 31
2.1 壓電式觸覺感測原理 31
2.1.1 鐵電材料介紹 31
2.1.2 正、逆壓電效應 32
2.1.3 Piezoelectric Potential Effect 33
2.2 溶膠-凝膠薄膜沉積技術 34
2.3 電解水表面改質系統之解離原理 35
2.4 基板之表面能相關理論 36
2.5 脈搏訊號相關理論 36
2.5.1 動脈脈搏波形 36
2.5.2 水鎚理論(Water Hammer) 38
2.5.3 中醫脈診學 41
第三章 觸覺感測器實驗設計與製作 44
3.1 實驗架構 44
3.2 材料之選擇 45
3.3 基板之選擇 46
3.4 Polymer-based 觸覺感測器製作 47
3.4.1 實驗設計 47
3.4.2 材料溶液製備 48
3.4.3 電解水系統處理 49
3.4.4 薄膜極化流程 50
3.5 Ceramic-based 觸覺感測器製作 50
3.5.1 實驗設計 50
3.5.2 材料溶液製備 53
第四章 結果與討論 54
4.1 Solution Deposition Process &; Lift-off Patterning 54
4.2 Polymer-based on Stainless Steel 63
4.2.1 接觸角(Contact Angle)與表面輪廓之分析 63
4.2.2 附著力(Adhesion)測試 67
4.2.3 X光繞射(XRD)分析 68
4.2.4 傅立葉轉化紅外光光譜儀(FTIR)分析 72
4.2.5 電滯曲線(DE Loop)分析 73
4.2.6 電子顯微鏡(SEM)分析 76
4.3 Ceramic-based on Silicon Substrate 78
4.3.1 接觸角(Contact Angle)之分析 78
4.3.2 電子顯微鏡(SEM)分析 80
4.3.3 電滯曲線(DE Loop)、漏電流(J-E)曲線分析之電性分析 83
4.4 Ceramic-based on Stainless Steel Substrate 84
4.4.1 X光繞射(XRD)分析 84
4.4.2 二次離子質譜儀(SIMS)分析 86
4.4.3 電滯曲線(DE Loop)分析 89
4.4.4 電子顯微鏡(SEM)分析 93
4.4.5 壓電薄膜沉積在不同基板之比較 101
4.5量測模組架構與設計 102
4.5.1量測模組架構 102
4.5.2電路設計 103
4.6觸覺感測器相關測試 104
4.6.1 串擾(Cross-Talk)測試 104
4.6.2 可撓(Flexibility)測試 105
4.6.3 靈敏度(Sensitivity)測試 109
4.6.4 可靠度(Reliability)測試 111
4.6.5 安全性(Safety)測試 112
4.7人體相關量測 113
4.7.1 Piezoelectric Potential Effect 113
4.7.2各動脈脈搏量測 115
4.7.3 人體之脈搏波速(Pulse Wave Velocity)量測 123
4.7.4 人體之血流速度(Blood Velocity Flow)量測 125
4.7.5 人體之中醫脈診(Traditional Chinese Medicine)量測 130
第五章 結論與未來展望 140
5.1 結論 140
5.2 未來展望 144
參考文獻 147

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