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研究生:呂啟揚
研究生(外文):Chi-Yang Lu
論文名稱:原子層沉積與薄膜封裝應用於可撓式有機發光二極體
論文名稱(外文):Atomic Layer Deposition and Thin Film Encapsulation for Flexible Organic Light-Emitting Diodes
指導教授:莊賦祥莊賦祥引用關係
指導教授(外文):Fuh-Shyamg Juang
學位類別:碩士
校院名稱:國立虎尾科技大學
系所名稱:光電與材料科技研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2014
畢業學年度:102
語文別:中文
論文頁數:48
中文關鍵詞:可撓式有機發光二極體原子層沉積水蒸氣滲透二氧化鈦
外文關鍵詞:Flexible organic light-emitting diodesAtomic layer depositionThin film encapsulationWVTRTiO2
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本論文研究採用真空蒸鍍方式,製作可撓式綠光磷光有機發光二極體。首先利用PEN作為可撓式元件之基板,PEDOT:PSS作為電洞注入層,WHT-215作為電洞傳輸層(hole transport layer),主發光層(emitting layer)為TCTA、並摻雜綠光磷光材料Ir(ppy)3,搭配TPBi作為電子傳輸層(electron transport layer),接著蒸鍍陰極材料為LiF/Al,即可得到可撓式綠光磷光有機發光二極體。接下來採用原子層沉積方法沉積ALD薄膜作為元件之封裝阻水膜。本研究使用之元件結構為:PEN /ITO/PEDOT:PSS(55nm) /WHT-215(5nm) /TCTA:Ir(ppy)3(30nm:15%)/ TPBi(30nm)/ LiF(1nm)/Al(100nm),綠光元件在電流密度5 mA/cm2下,亮度可達2200 cd/m2,電流效率可達44 cd/A,功率效率可達23 lm/W。經由原子層沉積系統沉積阻水阻氣膜當作封裝薄膜,封裝薄膜結構 [ZnO/Al2O3]19,由鈣測試量測19對阻水膜之水蒸氣滲透率(Water Vapor Transmission Rate,WVTR): 5.2x10-3 g / m2/ day,經過壽命量測儀,在初始亮度1000cd/m2下測得封裝後延長之壽命為150小時相較於裸片增加了37.5倍。以PECVD(plasma enhanced chemical vapor deposition)系統沉積TiO2薄膜,改變氧氣流量、電漿功率,可以得到不同折射率之TiO2薄膜,未來可應用於OLED的光萃取實驗。

The study of vacuum deposition methods, production of flexible green phosphorescent organic light-emitting diodes. First, the use of PEN as the substrate of the flexible device, WHT-215 as a hole transport layer, the main light-emitting layer of CBP, a green phosphorescent dopant material and Ir (ppy) 3, with an electronic transporting layer TPBi, followed by evaporation of the cathode material LiF / Al, can be obtained by the flexible green phosphorescent organic light emitting diodes. Next, using atomic layer deposition ALD thin film deposition method as encapsulated water-blocking film on device.In this study we used device structure: PEN / ITO PEDOT:PSS(55nm)/ WHT-215 (5nm) / TCTA: Ir (ppy) 3 (30nm, 15%) / TPBi (30nm) / LiF (1nm) / Al (100nm), green device of the current density 50 mA/cm2, the brightness of 2200 cd/m2, the current efficiency of 44 cd / A, power efficiency up to 23 lm / W .As packaging films deposited by atomic layer deposition system water blocking gas barrier, Package film structure [ZnO/Al2O3] 19, Measured by the amount of calcium test water Vapor Transmission Rate (WVTR): 5.2x10-3 g / m2 day .After a lifetime measuring instrument, in the initial brightness 1000cd/m2, measured after encapsulation to extend the life of 150 hours compared to the 37.5-fold increase in the die. By PECVD (plasma enhanced chemical vapor deposition) system deposited TiO2 film, changing the oxygen flow, plasma power, TiO2 films with different refractive indices can be obtained, the future can be applied to the OLED light extraction experiments.

摘要......i
Abstract......ii
誌謝......iv
目錄......v
表目錄......vii
圖目錄......viii
第一章 緒論......1
1.1有機發光二極體之簡介......1
1.2有機發光二極體之優點與驅動方式......2
1.3研究動機......5
第二章 有機發光二極體原理與文獻探討......6
2.1有機發光二極體發光原理......6
2.2有機發光二極體劣化機制......7
2.2.1陽極、陰極介面......7
2.2.2有機層......7
2.3 有機發光二極體之封裝......8
2.4 原子層沉積系統原理(Atomic layer deposition)......9
2.5 電漿增強化學氣象沉積原理......10
2.5.1 電漿原理......10
2.5.2 電漿碰撞原理......10
2.5.3 平均自由路徑......10
2.6 本研究參考之文獻......11
2.6.1綠色有機發光元件......11
2.6.2 ALD製程......11
第三章 實驗方法與步驟......12
3.1 可撓式有機發光二極體製作流程圖......12
3.2元件有機材料......13
3.3可撓式有機發光二極體元件製作流程......13
3.3.1 ITO可撓基板圖案化......13
3.3.2可撓式基板清洗......14
3.3.3可撓基板表面處理......14
3.3.4旋轉塗佈......14
3.3.5有機/金屬薄膜蒸鍍......15
3.3.6元件封裝......17
3.3.7特性及壽命量測......18
3.4 MOCON阻水氣滲透率量測......19
3.5 鈣測試阻水氣滲透率量測......20
3.6 PECVD製程......20
第四章 結果與討論......21
4.1 調整電洞注入層厚度對可撓式綠光元件光電特性之影響......21
4.2 調整電洞傳輸層厚度對可撓式綠光元件光電特性之影響......24
4.3 調整電子傳輸層厚度對可撓式綠光元件光電特性之影響......27
4.4 電阻式鈣測試......31
4.5 鈣測試量測與分析......33
4.6 以不同參數之ALD薄膜封裝對可撓式綠光元件之影響......37
4.7 以不同參數製作不同折射率之TiO2薄膜......41
第五章 結論......42
第六章 參考文獻......43
Extended Abstract......45
簡歷......48



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