臺灣博碩士論文加值系統

近年來，金屬玻璃薄膜(TFMGs)是相當有前景的工程材料，具有特殊機械性質與熱性質，因而被學術界廣泛研究，然而含鐵的金屬玻璃薄膜材料的研究與開發較少被探討，因此本實驗利用純鐵靶、鋯靶和鈦靶以磁控共濺鍍系統來製備含鐵的金屬玻璃薄膜。
主要分為三個階段，第一階段主要是藉由控制鐵靶濺鍍功率來改變鐵含量，以濺鍍出鋯基(Zr-Ti-Fe)金屬玻璃薄膜，隨著鐵靶功率從100上升至300瓦時，鐵含量也由 13.0 at.%大幅提升至37.6 at.%，薄膜硬度也從5.4 GPa 提升至7.3 GPa，附著性品質也有不錯的性能。第二階段則延續第一階段實驗並持續增加鐵靶功率至500瓦，使薄膜由鋯基轉變成鐵基(Fe-Zr-Ti)金屬玻璃薄膜，當鐵含量為49.8 at.%時，可得到最大硬度9.3 GPa 及最大彈性模數124 GPa。第三階段是將第一階段的鋯靶與鈦靶之濺鍍功率及電源供應模式做改變且鐵靶功率範圍從100至250瓦，以獲得不同鐵含量之鈦基(Ti-Zr-Fe)金屬玻璃薄膜，其中，鐵含量介於17.8至36.0 at.%之間，隨鐵含量越多，硬度從5.5增加至8.2 GPa，且薄膜之附著性品質皆為HF1等級。

Thin films metallic glasses (TFMGs) represent a class of promising engineering materials for structural applications. Despite the effort that has been made in the development of TFMG materials, the Iron-based thin film metallic glasses fabricated by sputtering have gained limited attention. In this work, thin film metallic glasses with different Fe contents were prepared by magnetron co-sputtering system using pure Fe, Zr and Ti targets.
This work can be divided into three parts. In the first part, the Zr-Ti-Fe TFMGs were fabricated by adjusting the target power of Fe. The Fe contents changed from 13.0 to 37.6 at.% and the hardness increased from 5.4 to 7.3 GPa when the target power of Fe increased from 100 to 300 W. The adhesion of Zr-Ti-Fe TFMGs was very good. The second part was the continuity of the first part, in which the target power of Fe increased up to 500 W and became the Fe-based Fe-Zr-Ti TFMGs. The maximum hardness, 9.3 GPa and elastic modulus, 124 GPa were obtained when the Fe content was 49.8 at.%. For the third part, the target power values of Ti, Zr and Fe were changed to fabricate the Ti-Zr-Fe TFMGs. The hardness of Ti-Zr-Fe TFMG increased from 5.5 to 8.2 GPa when the Fe content increased from 17.8 to 36.0 at.%. The adhesion quality level of each Ti-Zr-Fe TFMG was HF1 indicating its excellent adhesion property.

摘　要 i
ABSTRACT ii
誌謝 iv
目錄 v
表目錄 viii
圖目錄 ix
1.1 前言 1
1.2 研究動機 2
第二章 文獻回顧 3
2.1 磁控濺鍍系統之原理 3
2.1.1 脈衝磁控濺鍍系統 4
2.1.2 射頻式(RF)磁控濺鍍系統 5
2.2 塊狀金屬玻璃(Bulk metallic glass, BMGs) 5
2.3 玻璃形成能力(Glass forming ability, GFA) 8
2.3.1 A. Inoue之三項經驗法則 8
2.3.2 簡約玻璃轉變溫度 T?g =Tg/Tl 9
2.3.3 過冷液態溫度區ΔTx=Tx-Tg 10
2.3.4 γ參數γ=Tx/ (Tg+Tl ) 10
2.3.5 非晶態原子堆積模型 11
2.4 金屬玻璃薄膜 (Thin film metallic glass, TFMGs) 13
第三章 實驗方法 16
3.1 實驗流程與簡介 16
3.2 實驗方法與步驟 17
3.2.1 基材試片規格與前處理 17
3.2.2 實驗設備與濺鍍製程 17
3.2.3 實驗進行之步驟 22
3.3 材料分析 23
3.3.1 成份分析實驗 23
3.3.2 表面與截面形貌分析 24
3.3.3 X光繞射分析試驗 24
3.3.4 熱性質分析 24
3.3.5 硬度試驗 25
3.3.6 附著性試驗 27
3.3.6.1 刮痕試驗 27
3.3.6.2 HRC-DB試驗 29
3.3.7 電化學腐蝕檢測 30
第四章 結果與討論 31
4.1 鐵元素對鋯(Zr-Ti-Fe)基金屬玻璃薄膜性質分析 31
4.1.1 A.Inoue三項經驗法則之判定 31
4.1.2 成分分析 32
4.1.3 晶相分析 33
4.1.4 微結構分析 35
4.1.4.1 表面形貌分析 35
4.1.4.2 橫截面結構分析 36
4.1.4.3 TEM微結構分析 38
4.1.5 硬度及彈性係數分析 44
4.1.6 附著性試驗 46
4.1.6.1 刮痕分析 46
4.1.6.2 HRC-DB分析 48
4.1.7 動電位極化試驗 50
4.2 鐵元素對鐵(Fe-Zr-Ti)基金屬玻璃薄膜性質分析 54
4.2.1 成分分析 54
4.2.2 晶相分析 56
4.2.3 熱性質分析 57
4.2.4 微結構分析 59
4.2.4.1 表面形貌分析 59
4.2.4.2 橫截面結構分析 60
4.2.4.3 TEM微結構分析 62
4.2.5 硬度及彈性係數分析 65
4.2.6 附著性試驗 67
4.2.6.1 刮痕分析 67
4.2.6.2 HRC-DB分析 69
4.2.7 動電位極化試驗 71
4.3 鐵元素對鈦(Ti-Zr-Fe)基金屬玻璃薄膜性質分析 76
4.3.1 成分分析 76
4.3.2 晶相分析 78
4.3.3 微結構分析 79
4.3.3.1 表面形貌分析 79
4.3.3.2 橫截面結構分析 80
4.3.3.3 TEM微結構分析 81
4.3.4 硬度及彈性係數分析 86
4.3.5 附著性試驗 88
4.3.5.1 刮痕分析 88
4.3.5.2 HRC-DB分析 90
4.3.6 動電位極化試驗 91
4.4 綜合性比較 95
4.4.1 三元相圖 95
4.4.2 表面粗糙度比較 96
4.4.3 硬度及彈性係數比較 96
4.4.4 附著性比較 98
4.4.5 抗腐蝕性比較 99
第五章 結論 101
參考文獻 103

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