臺灣博碩士論文加值系統

本論文之研究目的在於利用低成本奈米球自我組裝(Self-Assembly)技術，將奈米球塗佈在氮化矽與二氧化矽粗糙面金字塔結構上，並以微影蝕刻技術形成一具有斜面的次波長(Tilted Sub-wavelength Structure，TSWS)抗反射層，來改善傳統雙層抗反射層(DLAR)的反射率，以其能使反射率曲線更加平坦化，並使用相同元件材料實際作出太陽電池來探討，對於太陽電池改善光學特性的部分是否有效增加光子數目，而提升太陽電池轉換效率之效果。
而在本論文的中段與後段，會隨之探討電漿處理對於水滴與薄膜接觸角的影響及奈米球附著於金字塔表面上的效果。再來改變製程參數與薄膜堆疊次序觀察其對於TSWS形貌、抗反射效果及太陽電池元件的電性改進。

This research aims to investigate the useage of low cost nanometer ball's self assembly skills. Use the nanometer balls sperad over rough surface of pramidical sturctures with SiNx and SiO2, and use the Nanosphere lithography . it may form into a "Tilted Sub-wavelength Structure, TSWS" anti-reflex layer with rough surface,which may improve reflex efficient of traditional "Double Layer Anti-reflex, DLAR". An prototype of solar cell with TSWS is bulit totestify whether numbers of photons were increased to enhance the transfer efficiencies of solar cell.
Following with the experiment, the medium and final paragraphs will discuss how different density and diameter of nanometer balls accompany with defferent thickness of SiNx affect the efficiencies of TSWS.
In the middle and rear sections of this paper will explore the plasma treatment along with the film for the contact angle of water droplets impact and effect of nanospheres attached to the surface of the pyramid. Again changing the process parameters and film stacking order to observe the electrical improvements for TSWS morphology, anti-reflective effect and solar components.

Contents

Acknowledgement I
Abstract(English) II
Abstract(Chinese) III
Contents IV
Table captions VI
Figure captions VII
Chapter 1 Introduction 1
1.1 Recent solar cell development 1
1.2 Motivation 2
1.3 Paper Architecture 4
Chapter 2 Theoretical 5
2.1 Solar cell work 5
2.1.1 Photovoltaic effect 5
2.1.2 Structure and function of the solar cell 6
2.1.3 Recombination 7
2.2 The equivalent circuit of the solar cell 7
2.3 Back Surface Field，BSF 10
2.4 About antireflective structure 11
2.4.1 Texture 11
2.4.2 Anti-Reflection Coating (ARC) 11
2.4.3 Sub-wavelength Structure，SWS) 12
2.5 Nanosphere lithography 13
2.6 Low-temperature plasma surface modification technology 14
Chapter 3 Experimental Process 20
3.1 Solar cell production process and TSWS 20
3.2 Experimental Architecture 21
Chapter 4 Results and Discussion 24
4.1 Film hydrophilic modification treatment on adhesion effect 24
4.2 Tilted Sub-wavelength Structure，TSWS 30
4.2.1 By adjusting the process parameters to identify the three-dimensional structure of the pyramid shaped trend 30
4.2.2 SiO2 thickness of the observed increase in the surface structure of the pyramid morphology 39
4.2.3 Changes affecting the strength and import of secondary etching mask pyramid shape of the surface of SWS 42
4.2.4 Find lowest SiO2 thickness by changing the reflectivity of the trend．． 49
4.2.5 For the change in the reflectance of the solar cell element is electrically affect 51
Chapter 5 Conclusion 55
Reference 56

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