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目錄
指導教授推薦書…………………………………………………………………
口試委員會審定書………………………………………………………………
誌謝…………………………………………………………………………………..iii
中文摘要…………………………………………………………………………….iv
英文摘要………………………………………………………………………….v
目錄……………………………………………………………………………….vi
圖目錄……………………………………………………………………………….vii
表目錄……………………………………………………………………………….ix
第一章 緒論...........................................................................1
第二章 聲表SAW元件簡介與基本工作原理......................................................4
2.1 歷史與簡介........................................................................4
2.2 壓電效應及表面聲波................................................................6
2.2.1 壓電效應.......................................................................6
2.2.2 表面聲波.......................................................................9
2.3 表面聲波元件工作原理...............................................................10
第三章 SAW元件的製作過程及量測.........................................................14
3.1 表面聲波濾波器的製作過程............................................................14
3.2 SAW濾波器的量測..................................................................15
3.2.1 向量網路分析儀Vector Network Analyzer...........................................15
3.2.2 S參數基本原理..................................................................16
3.2.3 校正與量測....................................................................18
第四章 聲表的應用及常見問題............................................................21
4.1 應用聲表諧振器在FSK發射電路.........................................................21
4.2 SAW諧振器的溫度飄移...............................................................25
4.3 SAW元件常見的失效模式與改善方法.....................................................27
第五章 結論與未來展望.................................................................30
參考文獻.................................................................................31
圖目錄
圖1.1 濾波器類型、應用及適合頻率..........................................................2
圖2.1 正壓電效應.......................................................................4
圖2.2 逆壓電效應.......................................................................4
圖2.3 雷利波..........................................................................6
圖2.4 插指IDT結構....................................................................10
圖2.5 聲波傳導.......................................................................11
圖2.6 波長與插指結構示意圖.............................................................11
圖2.7 插指結構尺寸示意圖...............................................................12
圖2.8 諧振型濾波器....................................................................13
圖2.9 反射柵電極......................................................................13
圖2.10 諧振型濾波器等效元件.............................................................13
圖3.1 晶圓前段製作過程.................................................................15
圖3.2 晶圓後段製作過程(切割與封裝)......................................................15
圖3.3 向量網路分析儀..................................................................16
圖3.4 入射波與反射波示意圖.............................................................16
圖3.5 雙埠網路，入射波(a1, a2), 反射波(b1,b2)...........................................17
圖3.6 網路分析儀測試實際訊號示意圖.......................................................19
圖3.7 網路分析儀標準校正件.............................................................19
圖3.8 微帶線與共平面帶線...............................................................20
圖3.9 待測物參考平面..................................................................20
圖4.1 類比與數位調變..................................................................21
圖4.2 考畢茲震盪電路..................................................................22
圖4.3 利用聲表諧振器設計的考畢茲震盪電路..................................................22
圖4.4 利用聲表諧振器設計FSK調變電路......................................................24
圖4.5 用頻譜分析儀量到的FSK調變發射訊號：m=2, ∆fT =25 kHz, fs=12.5kHz....................25
圖4.6 震盪頻率vs.工作溫度..............................................................26
圖4.7 Quartz Temperature Effect.....................................................27
圖4.8 正常的插指結構(左)與被靜電損壞的插指結構(右).........................................28
圖4.9 靜電防護電路....................................................................28
圖4.10 靜電防護電路示意圖..............................................................29
圖4.11 防護電路靜電擊穿測試結果.........................................................29
表目錄
表1.1 行動通訊所需頻段..................................................................1
表4.1 聲表材料的特性參數...............................................................27
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