本文使用電腦輔助機械製圖軟體，繪圖設計X-Y 運動平台。透過公式計算選
擇可微步的步進馬達作為運動平台的驅動馬達。X-Y 運動平台的驅動軸，是選擇
螺桿作為驅動軸因為成本低且符合本文所需的驅動方法。PLC 可程式控制編輯器
作為X-Y 運動平台的控制器，經由編輯路徑所產生不同的脈衝電壓訊號，驅動運
動平台的移動。結合固定在龍門架上的CCD 攝影機與高倍率鏡頭，垂直拍攝X-Y
運動平台的水平位移。CCD 攝影機擷取固定在平台上方的微型尺標影像，其微型
尺標上印有最小刻度0.025mm 的尺標。透過擷取影像取得X-Y 運動平台實際位移
量，代替了光學尺量測平台的位移距離。本量測方式相較使用光學尺量測的成本
較低。透過自己設計的噴頭搭配市售的霧化片系統，製造一個能持續噴霧5 分鐘
以上的噴頭裝置，與網版或遮罩片及平台的結合，實際應用於噴印奈米薄膜材料
上，並於噴印後觀察奈米材料表面粗糙度與燒結變化。本文的實驗結果，能更進
一步瞭解自己所設計研發的，X-Y 運動平台的位移誤差與實際應用性。達到能有
效控制X-Y 運動平台的位移定位，並成功的應用在噴印奈米薄膜材料上，因此可
作為新型噴印機的參考。

In the study, the X-Y motion platform was designed by using a CAD
(Computer-Aided Design) software. The step motor was selected after analytical
calculations for dynamically driving this platform. Besides, the crew drivers were used
because it low cost. The X-Y motion platform was controlled via PLC (Programmable
Logic Controller), in which the motion of platform moving was produced by different
pulse signals. Utilizing the CCD-camera and the low-cost micro-meter-scale with a
resolution of 25μm. The displacement of platform was measured at X-Y axies. Liquid
spraying for more than 5 minutes was achieved by using a commercially available
atomizer. The atomizer was combined with the platform and screen masks to print
nano-materials of thin films onto substrates. In summary, the mobile X-Y platform was
achieved for positioning control and printing nano-materials of films. Hence, it is
expected that the X-Y motion platform will be useful for feature devlopment of the new
printing machine.

摘要................................................................................................................................... I
Abstract.............................................................................................................................II
誌謝................................................................................................................................ III
目錄................................................................................................................................ IV
圖目錄............................................................................................................................ VI
表目錄............................................................................................................................ IX
附圖目錄........................................................................................................................ IX
符號表..............................................................................................................................X
第一章 緒論.................................................................................................................... 1
1-1 研究動機........................................................................................................... 1
1-2 研究目標........................................................................................................... 2
1-3 創新構想........................................................................................................... 3
1-4 內容架構........................................................................................................... 4
第二章 文獻回顧............................................................................................................ 6
2-1 噴印技術........................................................................................................... 6
2-2 機械式平台....................................................................................................... 9
2-3 驅動系統......................................................................................................... 13
2-4 定位檢測系統................................................................................................. 16
2-5 薄膜材料應用................................................................................................. 21
2-6 結論................................................................................................................. 22
第三章 平台設計.......................................................................................................... 23
3-1 設計流程......................................................................................................... 23
3-2 平台機構設計................................................................................................. 26
3-3 驅動系統設計................................................................................................. 29
3-3-1 設計需求............................................................................................. 29
3-3-2 驅動條件計算..................................................................................... 33
3-4 霧化系統......................................................................................................... 39
第四章 實驗結果與討論............................................................................................... 40
4-1 運動平台製作................................................................................................. 40
4-2 驅動控制......................................................................................................... 42
4-3 CCD 攝影機..................................................................................................... 45
4-4 雙軸位移量測................................................................................................. 48
4-5 薄膜材料應用.................................................................................................. 50
第五章 結論與未來展望............................................................................................... 57
參考文獻........................................................................................................................ 58
作著簡介........................................................................................................................ 66

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