臺灣博碩士論文加值系統

在本研究中，我們利用了多步驟法製備1 um的非晶型二氧化銥以符合應用於生物電極之需求厚度。配方改良自原實驗室開發的無電鍍液配方，探討其在不同溫度和不同pH情況下沉積的效率，進而調整出最佳的鍍液環境。在製備同時，我們也觀察到隨著鍍層增加，其表面粗糙度正相關；而和水的接觸角有負相關。另外也探討了關於NaNO2效應和預先配位法如何影響鍍膜效率，以期能配置效率更高的鍍液。
另外，1 um的二氧化銥亦做了XPS的定性與定量分析來確認銥的氧化態與雜質的存在性。XRD則鑑定了剛沉積的二氧化銥薄膜為非晶型，可藉由熱處理轉成晶型。最後，藉由電化學測量來得知1 um二氧化銥的電化學特性、極限電壓、電荷儲存能力等，以期能應用於生物相容性電極上。

In this study, a 1μm amorphous IrO2 film is successfully fabricated by a multi-step chemical bath deposition and the IrO2 film is expected to be used as a biocompatible electrode. We modify the recipe that developed earlier in our laboratory and explore the deposition efficiency at different pH values and temperatures. We identify that the optimized condition is for bath with pH 12 and 25 °C. When the deposited layer was increased, the surface roughness was also increased, but the contact angle of water was decreased. Also, we discuss the effect of the NaNO2 and pre-coordination on the deposition efficiency.
In addition, we identify the Ir oxidation state and the existence of impurities by XPS, and then use the XRD to identify the phase transition of the 1μm IrO2 film from amorphous state to crystalline one by thermal treatment. Lastly, we carry out the electrochemical measurements to determine the limit potentials and charge storage capacity of the IrO2 film.

摘要 i
Abstract ii
Acknowledgements iii
Contents v
List of Tables viii
List of Figures ix
Chapter 1 Introduction 1
Chapter 2 Literature review 3
2.1. Physical and chemical properties of Ir and IrO2 3
2.2. Principle and structure of retinal prosthesis 4
2.2.1 Principle 4
2.2.2 Materials for neural stimulation electrode 6
2.3 Fabrications of IrO2 films 8
2.3.1 Sputtering 8
2.3.2 Thermal decomposition 8
2.3.3 Electrodeposition 9
2.3.4 Chemical bath deposition 9
Chapter 3 Experimental 15
3.1 Experimental design 15
3.2 Materials 16
3.2.1 Chemicals 16
3.2.2 Substrates 16
3.3 Chemical bath deposition 17
3.3.1 Temperature effect 17
3.3.2 pH effect 19
3.3.3 Deposition on different substrates 21
3.4 Thin film characterization 23
3.4.1 Scanning electron microscopy (SEM) & Energy dispersive spectrometer (EDS) 23
3.4.2 X-ray diffraction (XRD) 24
3.4.3 Atomic force microscope (AFM) 24
3.4.4 X-ray photoelectron spectroscopy (XPS) 25
3.4.5 Contact angle 25
3.4.6 Hall effect 25
3.4.7 Electrochemical workstation 26
3.5 Solution characterization 27
3.5.1 UV-Vis absorption spectra 27
3.5.2 Zeta potentials (ζ-potential) 27
Chapter 4 Results and discussion 28
4.1 Chemical bath deposition 28
4.1.1 Temperature effect 28
4.1.2 pH effect 29
4.1.3 Deposition on different substrates 32
4.2 Multi-step deposition 35
4.2.1 Process and heat treatment 35
4.2.2 Characterization of processing steps 37
4.3 Fine tuning recipe 43
4.3.1 NaNO2 effect 43
4.3.2 Pre-coordination 44
4.4 Materials characterization 47
4.4.1 Biocompatibility evaluation (ISO-10993) 47
4.4.2 Electrical property 51
Chapter 5 Conclusion 54
References 55

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