本研究主旨以脈衝雷射沉積法(Pulsed Laser Deposition，PLD)製備中低溫(500℃~700℃)Ce1-xBixO2-y(x=0.05~0.2)SOFC電解質，以此取代傳統YSZ(ytria stabled zirconia)電解質材料。鉍摻雜氧化鈰電解質層製備是藉由CeO2與Bi2O3兩相混合的陶瓷靶材，經波長355nm，脈衝能量70mJ/pulse的Nd：YAG高能量脈衝雷射束轟擊，形成羽毛狀電漿態重新排列沉積於Si/Ti/Pt基板，透過改變基板溫度、鍍膜時間、摻雜濃度控制其成長變因，期望得到高離子導電率之薄膜。
所製備之薄膜，優選方向皆為(111)，藉由XRD測量結果證明(111)峰值往低角度偏移，顯示CeO2晶格有擴張現象，Ce4+有被離子半徑大的Bi3+取代置換。將所有摻雜組成晶交流阻抗分析結果計算導電率，以Ce0.95Bi0.05O1.975 (B5DC)鍍膜10小時(膜厚1490nm)，工作溫度700℃的離子導電率最高，約為4.13×〖10〗^(-8) S/cm，活化能為0.6041eV。在同濃度不同鍍膜時間條件下，皆以本實驗鍍膜最長參數10小時有最高的導電率，B20DC(1303nm)、B15DC(1165nm)、B10DC(1624nm)，分別為9.27×10^(-9) S/cm、9.95×10^(-9) S/cm、6.18×10^(-9) S/cm。

This aim of this study is to prepare Ce1-xBixO2-y(x=0.05~0.2) solid electrolytes by pulsed laser deposition (PLD),which is operating at intermediate temperature (500℃~700℃) for solid oxide cells (SOFC).This study hope to develop BDC and expect to replace the traditional YSZ. Bi-doped CeO2 was prepared by the ceramic target, which contain the CeO2 and Bi2O3.The pulse laser source wavelength of 355nm Nd：YAG laser. The high energy laser interact on target surface and become ionzed gas, the CeO2 and Bi2O3 will form a solid solution and deposit on Si/Ti/Pt substrates. Bi-doped CeO2 thin film growth is controlled by changing the substrate temperature, deposition time and doping concentration.
The results showed all BDC thin film with (111) preferred orientation at pulse energy 70mJ/pulse. The XRD (111) peak shift to low angle, it means the lattice of CeO2 expand, the Ce4+ is replaced by Bi3+(Ionic radius：Bi3+ > Ce4+).Among the doping concentration, the Ce0.95Bi0.05O1.975 (B5DC) thin film which deposit 10 hours(1490nm) exhibited the highest conductivity about 4.13×〖10〗^(-8) S/cm at 700℃ and the activation energy is found to be 0.6041eV. At the same doping concentration, the thin film which deposit 10 hours exhibited highest conductivity, B20DC(1303nm)、B15DC(1165nm)、B10DC(1624nm), 9.27×10^(-9) S/cm、9.95×10^(-9) S/cm、6.18×10^(-9) S/cm.

目錄
致謝 I
摘要 II
Abstract III
目錄 i
圖目錄 vi
表目錄 x
第一章、 緒論 1
1-1 前言 1
1-2 研究動機 2
1-3 研究目的 3
第二章、 理論基礎與文獻回顧 5
2-1 燃料電池概述 5
2-1-1 熔融碳酸鹽燃料電池(MCFC) 7
2-1-2 鹼性燃料電池(AFC) 8
2-1-3 磷酸型燃料電池(PAFC) 9
2-1-4 質子交換型燃料電池(PEMFC) 10
2-1-5 直接甲醇燃料電池(DMFC) 12
2-1-6 固態氧化物燃料電池(SOFC) 13
2-2 固態氧化物燃料電池各部分材料介紹 15
2-2-1 陽極功能與特性 15
2-2-2 電解質功能與特性 17
2-2-3 陰極功能與特性 20
2-3 CeO2基固體氧化物系統 21
2-3-1 CeO2摻雜氧化物 22
2-4 選擇摻雜化合物 23
2-4-1 Bi2O3相 23
2-4-2 Bi2O3系統 24
2-6 陶瓷靶材製備工藝 27
2-6-1 球磨原理 27
2-6-2 煅燒原理 28
2-6-3 造粒原理 28
2-6-4 乾壓成型 28
2-6-5 燒結原理 29
2-6-6 燒結各階段 30
2-6-7 燒結方法 31
2-7 脈衝雷射沉積原理 31
2-8 薄膜成長理論 33
第三章、 實驗藥品、方法與設備 35
3-1 符號說明 35
3-1-1 B20DC_C800_S900 35
3-2 實驗藥品 35
3-2-1 陶瓷粉體/高分子黏著劑 35
3-2-2 基板 35
3-2-3 溶劑 36
3-3 靶材製備 36
3-3-1 粉末製備 36
3-3-2 靶材製備 39
3-4 鍍電解質薄膜 39
3-5 製程設備 40
3-5-1 脈衝雷射沉積系統 40
3-6 分析儀器 42
3-6-1 X光繞射儀(X-ray Diffraction,XRD) 42
3-6-2 場發射型掃描式電子顯微鏡(Field Emission of Scanning Electron Microscope, FE-SEM) 43
3-6-3 3D表面輪廓儀 44
3-6-4 交流阻抗 45
第四章、 結果與討論 49
4-1 Bi2O3-CeO2靶材製備 49
4-1-1 球磨對混合粉末之影響 49
4-1-2 煅燒溫度對粉體之影響 50
4-1-3 煅燒時間對粉體之影響 51
4-1-4 燒結溫度對粉體之影響 53
4-1-5 燒結時間對靶材之影響 54
4-1-6 添加黏著劑對圓錠相對密度之影響 57
4-1-7 鍍膜靶材之製備 60
4-2 電解質薄膜分析 62
4-2-1 以玻璃基板製備BDC電解質薄膜 62
4-2-2 Si/Ti/Pt導電基板薄膜性質探討 68
第五章、 結論 95
第六章、 參考文獻 97

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