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研究生:陳乙誠
研究生(外文):I-Cheng Chen
論文名稱:簡易雷射量測系統應用於線性滑台之四自由度幾何誤差量測之研究
論文名稱(外文):Development of a Simple Laser Measurement System for The Four-Degree-of-Freedom Geometric Errors Measurement of a Linear Stage
指導教授:修芳仲
指導教授(外文):Fang-Jung Shiou
口試委員:修芳仲
口試委員(外文):Fang-Jung Shiou
口試日期:2015-07-16
學位類別:碩士
校院名稱:國立臺灣科技大學
系所名稱:機械工程系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2015
畢業學年度:103
語文別:中文
論文頁數:90
中文關鍵詞:自動化光學量測直線度直線度誤差角度誤差
外文關鍵詞:4-DOF automatic optical measuring systemStraightness errorAngular errorLDDM
相關次數:
  • 被引用被引用:0
  • 點閱點閱:304
  • 評分評分:
  • 下載下載:17
  • 收藏至我的研究室書目清單書目收藏:1
本研究旨在開發一套四自由度自動化光學量測系統,可量測一線性滑台之水平/垂直直線度(horizontal/vertical straightness)、角度(pitch、yaw)幾何誤差,量測系統主要包括運動機構、光學、電控與軟體四大模組的整合。依據使用者設定的系統參數,系統可以自動量測直線度與角度。
此套四自由度量測系統的光路由一紅光雷射(laser diode)、擴束鏡、反射鏡、聚焦透鏡、分光鏡及位置感測器(DL-10、DL-20)所組成。利用自動視準儀的原理,藉由一平面反射鏡的偏擺,使雷射光源聚焦於位置感測器(DL-20)上,因平面反射鏡的偏擺,雷射光點會有位移的變化,由位置感測器(DL-10)讀取並反推回角度變化量,再者,藉由分光技術使系統在共用一個光源的情況下形成直線度量測架構,根據直線法的雷射量測直線度,可以由位置感測器(DL-10)計算位移量。
為了驗證本研究所提出的四自由度量測系統的可行性及其量測性能,我們使用單軸精密定位滑台進行多項實驗,將系統量測結果與實驗室之雷射干涉儀(LDDM)做比較。由實驗結果證明,水平直線度精度可達5μm、垂直直線度精度為4μm,而yaw error不超過±0.4 arc sec,pitch error不超過±1 arc sec。,位移及角度五分鐘之量測穩定度分別為±0.6μm及±1 arc sec。
This study aims to develop a simple 4-degree-of-freedom (DOF) automatic optical measuring system which is capable of measuring the horizontal/vertical straightness error and pitch/yaw angular error of a linear stage. The developed measuring system consists of 4 main modules, namely, the motion mechanism module, the optical path unit module, the electrical signal processing and control module and a set of software to integrate the measuring system and to execute the measurement analysis. Based on the user-input measurement parameters, this system can detect the desired straightness and angular deviation simultaneously. Our experimental optical path includes laser diode, beam expander, mirror, focusing lens, beamsplitter and location sensor (DL-10, DL-20). Following the principle of automatic alignment collimator, we can deflect a plane mirror and make laser resource to focus on the location sensor DL-20. Because of the deflection, the laser spot will have change in movement and get the angle difference received by location sensor DL-10. And then, based on the beam-split technique, our system can work on using the same light resource to measure the straightness, for using laser straight-line method to measure the straightness by DL-10. In order to verify the feasibility and performance of our system, we apply a single-axis precise positioning table in several experiments, and compared the result with the counterparts generated by LDDM. The result prove that the horizontal and vertical straightness is and , and the yaw and pitch angular error is less than and , respectively. During 5 minutes operating time, the movement and angle stability is ±0.6μm and ±1 arc⁄sec.
摘要
Abstract
誌謝
目錄
圖索引
表索引
第一章 緒論
1.1研究動機與目的
1.2文獻回顧
1.3論文架構
第二章 量測系統的工作原理
2.1布萊恩原則
2.2 Autocollimator量測原理
2.3直線度量測
2.3.1最小平方法之線性迴歸
2.4光軸校準
2.4.1 雷射校準
2.4.2 透鏡校準
2.4.3 反射鏡與分光鏡校準
第三章 系統架構
3.1機台規格
3.2運動機構模組
3.3光學模組
3.3.1光學元件介紹
3.3.2雷射光源
3.3.3位置感測器
3.4光路設計
3.4.1 角度量測實驗架構
3.4.2 直線度量測實驗架構
3.5電控模組
3.6軟體控制模組
3.7系統整合
第四章 研究方法與實驗結果
4.1位置感測器的校驗
4.1.1直線度校驗
4.1.2角度校驗
4.2量測結果
4.3 雷射干涉儀比對驗證
4.3.1直線度比對
4.3.2雙角度比對
4.4直線度與角度誤差比較
4.5直線度與角度穩定性
第五章 結論與未來展望
5.1結論
5.2未來展望
參考文獻
附件一
附件二
附件三
附件四
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