臺灣博碩士論文加值系統

本研究旨在開發一套四自由度自動化光學量測系統，可量測一線性滑台之水平/垂直直線度(horizontal/vertical straightness)、角度(pitch、yaw)幾何誤差，量測系統主要包括運動機構、光學、電控與軟體四大模組的整合。依據使用者設定的系統參數，系統可以自動量測直線度與角度。
此套四自由度量測系統的光路由一紅光雷射(laser diode)、擴束鏡、反射鏡、聚焦透鏡、分光鏡及位置感測器(DL-10、DL-20)所組成。利用自動視準儀的原理，藉由一平面反射鏡的偏擺，使雷射光源聚焦於位置感測器(DL-20)上，因平面反射鏡的偏擺，雷射光點會有位移的變化，由位置感測器(DL-10)讀取並反推回角度變化量，再者，藉由分光技術使系統在共用一個光源的情況下形成直線度量測架構，根據直線法的雷射量測直線度，可以由位置感測器(DL-10)計算位移量。
為了驗證本研究所提出的四自由度量測系統的可行性及其量測性能，我們使用單軸精密定位滑台進行多項實驗，將系統量測結果與實驗室之雷射干涉儀(LDDM)做比較。由實驗結果證明，水平直線度精度可達5μm、垂直直線度精度為4μm，而yaw error不超過±0.4 arc sec，pitch error不超過±1 arc sec。，位移及角度五分鐘之量測穩定度分別為±0.6μm及±1 arc sec。

This study aims to develop a simple 4-degree-of-freedom (DOF) automatic optical measuring system which is capable of measuring the horizontal/vertical straightness error and pitch/yaw angular error of a linear stage. The developed measuring system consists of 4 main modules, namely, the motion mechanism module, the optical path unit module, the electrical signal processing and control module and a set of software to integrate the measuring system and to execute the measurement analysis. Based on the user-input measurement parameters, this system can detect the desired straightness and angular deviation simultaneously. Our experimental optical path includes laser diode, beam expander, mirror, focusing lens, beamsplitter and location sensor (DL-10, DL-20). Following the principle of automatic alignment collimator, we can deflect a plane mirror and make laser resource to focus on the location sensor DL-20. Because of the deflection, the laser spot will have change in movement and get the angle difference received by location sensor DL-10. And then, based on the beam-split technique, our system can work on using the same light resource to measure the straightness, for using laser straight-line method to measure the straightness by DL-10. In order to verify the feasibility and performance of our system, we apply a single-axis precise positioning table in several experiments, and compared the result with the counterparts generated by LDDM. The result prove that the horizontal and vertical straightness is and , and the yaw and pitch angular error is less than and , respectively. During 5 minutes operating time, the movement and angle stability is ±0.6μm and ±1 arc⁄sec.

摘要
Abstract
誌謝
目錄
圖索引
表索引
第一章 緒論
1.1研究動機與目的
1.2文獻回顧
1.3論文架構
第二章 量測系統的工作原理
2.1布萊恩原則
2.2 Autocollimator量測原理
2.3直線度量測
2.3.1最小平方法之線性迴歸
2.4光軸校準
2.4.1 雷射校準
2.4.2 透鏡校準
2.4.3 反射鏡與分光鏡校準
第三章 系統架構
3.1機台規格
3.2運動機構模組
3.3光學模組
3.3.1光學元件介紹
3.3.2雷射光源
3.3.3位置感測器
3.4光路設計
3.4.1 角度量測實驗架構
3.4.2 直線度量測實驗架構
3.5電控模組
3.6軟體控制模組
3.7系統整合
第四章 研究方法與實驗結果
4.1位置感測器的校驗
4.1.1直線度校驗
4.1.2角度校驗
4.2量測結果
4.3 雷射干涉儀比對驗證
4.3.1直線度比對
4.3.2雙角度比對
4.4直線度與角度誤差比較
4.5直線度與角度穩定性
第五章 結論與未來展望
5.1結論
5.2未來展望
參考文獻
附件一
附件二
附件三
附件四

[1]K.C. Fan，「Advanced Optical Technologies」，DE GRUYTER，2014。
[2]K.C. Fan, M.J. Chen, W.M. Huang, “A six-degree-of-freedom measurement system for the motion accuracy of linear stages”, International Journal of Machine Tools and Manfacture, 38, p.155-164, 1998.
[3]Kuang-Chao Fan, Mu-Jung Chen, “A six-degree-of-freedom measurement system for the accuracy of X-Y stages”, Precision Engineering, 24, p.15-23, 2000.
[4]Cuifang Kuang, Qibo Feng, Bin Zhang, Bin Liu, Shiqian Chen,Zhifeng Zhang, “A four-degree-of-freedom laser measurement system (FDMS) using a single-mode fiber-coupled laser module”, Sensors and Actuators, 125, p.100-108, 2005.
[5]Chin-Tao Tzeng, Juti Rani Deka and Ming Chang, “Development of Six-degrees-of-freedom Motion Errors Measurement System for Micro-scale Machine Tools”, CSME, p.4710-4713, 2007.
[6]Wen-Yuh Jywe, Chien-Hung Liu, W. H. shien, Lih-Horng Shyu, Te- Hua Fang, Yung-Hou Sheu, Tung-Hui Hsu, Chi-Chen Hsieh, “Developed of a Multi-Degree of Freedoms Measuring System and an error compensation Technique for Machine Tools”, Journal of Physics, 48, p.761-765, 2006.
[7]Chien-Hung Liu, Wen-Yuh Jywe, Cheng-Chung Hsu,“Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage” , Review of Scientific Instruments, 76, 2005.
[8]H-L Huang, C-H Liu, W-Y Jywe, M-S Wang, “High-resolution three-degrees-of-freedom motion errors measuring system for a single-axis linear moving platform”, Journal Engineering Manufacture, Vol. 223 Part B, 2008.
[9]T-H Wang, “Development of an abbé error compensator for NC machine tools”, Master Thesis, National Taiwan University, 2011.
[10]Qianghua Chen, Dejiao Lin, Jian Wu, Juqun Yan and Chunyong Yin, “Straightness/coaxiality measurement system with transverse Zeeman dual-frequency laser”, Meas. Sci. Technol. , 16, p.2030-2037, 2005.
[11]O. Sasaki, C. Togashi and T. Suzuki, “Two-dimensional rotation angle measurement using a sinusoidal phase-modulating laser diode interferometer”, Opt. Eng, 42, p.1132-1136, 2003.
[12]J.S. Oh, E.D. Bae, T. Keem and S.W. Kim, “Measuring and compensating for 5-DOF parasitic motion errors in translation stages using Twyman-Green interferometry”, Int. J. Mach Tool, 46, p.1748-1752, 2006.
[13]S.W. Lee, R. Mayor, J. Ni, “Development of a six-degree-of-freedom geometric error measurement system for a meso-scale machine tool”, J. Manuf. Sci. E, 127, p.857-865, 2005.
[14]Xinghui Li, Wei Gao, Hiroshi Muto, Yuki Shimizu, So Ito, Songyi Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage”, Precision Engineering, 37, p.771-781, 2013.
[15]F. Qibo, Z. Bin, C. Cunxing, K. Cuifang, Z. Yusheng and Y. Fenglin, “Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide”, Opt. Express, 21,p.25805-25819, 2013.
[16]智泰科技，http://www.3dfamily.com.tw/Default.aspx，2015。
[17]王志雄，「三軸數控工具機阿貝誤差補償器之研製」，國立台灣大學，機械工程學研究所，2012。
[18]維基百科，http://www.twwiki.com/wiki/，2015。
[19]修芳仲，「高等精密量測學」教學講義，國立台灣科技大學，2014。
[20]謝牧樵，「微光致螢光量測系統之研製」，國立台灣科技大學，機械工程系，2011。
[21]日本三洋，http://www.sanyodenki.com.tw/，2015。
[22]泰映科技股份有限公司，http://www.troy.com.tw/，2015。
[23]先鋒科技，http://www.teo.com.tw/，2015。
[24]銓州光電股份有限公司，http://www.onset.com.tw/，2015。
[25]Edmund，http://www.edmundoptics.com/，2015。
[26]研華科技，http://www.advantech.tw/，2015。
[27]美商國家儀器，http://taiwan.ni.com/，2015。