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研究生:陳慧珊
研究生(外文):Hui-Shan Chen
論文名稱:鈷鐵/鈷鉑雙層薄膜之結構及磁性質研究
論文名稱(外文):The studies of structures and magnetic properties in CoFe/CoPt bilayers
指導教授:林克偉林克偉引用關係
指導教授(外文):Ko-Wei Lin
口試委員:孫安正張晃暐
口試日期:2016-05-26
學位類別:碩士
校院名稱:國立中興大學
系所名稱:材料科學與工程學系所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2016
畢業學年度:104
語文別:中文
論文頁數:99
中文關鍵詞:鈷鐵鈷鉑雙層薄膜
外文關鍵詞:CoPtCoFemagnetic bilayer
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本實驗以超高真空濺鍍系統及雙離子束濺鍍系統製備鈷鐵/鈷鉑/鉑/玻璃薄膜(CoFe/CoPt/Pt/glass),藉由改變鈷鐵軟磁材料及鈷鉑硬磁材料厚度,鈷鐵層所使用鍍膜時間參數為5、10、15 min,鈷鉑厚度參數為5、20 nm研究薄膜微結構及磁性質。
X-TEM結果可知鈷鐵鍍膜參數5分鐘為11 nm;鍍膜參數10分鐘為26 nm;鍍膜參數15分鐘為39 nm。XRD結果中鈷鉑為四方晶系結構,晶格常數a=3.8 Å, c=3.68 Å;鈷鐵為面心立方結構,晶格常數a=3.54 Å;鉑為立方結構,晶格常數a=3.9 Å。XPS分析結果顯示鈷鐵層,鈷鐵含量為90:10 at%;鈷鉑層,鈷:鉑含量為49:51 at%。AFM結果鈷鐵(11 nm)/鈷鉑(5 nm)/鉑(20 nm)/玻璃Rq=0.96、Ra=0.70;鈷鐵(26 nm)/鈷鉑(20 nm)/鉑(20 nm)/玻璃Rq=1.68、Ra=1.35:鈷鐵(39 nm)/鈷鉑(5 nm)/鉑(20 nm)/玻璃Rq=0.91、Ra=0.73;鈷鐵(39 nm)/鈷鉑(20 nm)/鉑(20 nm)/玻璃Rq=1.85、Ra=1.47。鈷鉑層厚度為20 nm之樣品其磁滯曲線呈現明顯的分段(step),並且於分段的位置劇烈的變化,而鈷鉑層厚度為5 nm之樣品分段(step)則不明顯,本研究最佳參數(11 nm)/鈷鉑(5 nm)/鉑(20 nm)/玻璃具有最高的矯頑磁力HC┴=464.4 Oe; HC//=541.0 Oe,分段(step)最為顯著。


第一章 緒論 1
1-1 前言 1
1-2 研究動機 3
1-3 基礎理論 4
1-3-1磁性物質基本種類 4
1-3-2永磁物質 11
1-3-3交換彈性 12
1-4 材料選用 13
1-5 文獻回顧 15
第二章 實驗方法 32
2-1實驗設計 32
2-2實驗流程 33
2-3基材前處理 34
2-4薄膜製備及實驗參數 34
2-5雙離子束濺鍍系統簡介 35
第三章 儀器原理及分析原理 38
3-1 X光繞射儀(X-RAY DIFFRACTION, XRD) 38
3-2 穿透式電子顯微鏡(TRANSMISSION ELECTRON MICROSCOPY, TEM) 40
3-3 化學分析電子儀能譜儀(ELECTRON SPECTROSCOPY FOR CHEMICAL ANALYSIS, ESCA) 43
3-4 震動樣品磁力計(VIBRATING SAMPLE MAGNETOMETER, VSM) 44
3-5 原子力顯微鏡(ATOMIC FORCE MICROSCOPE, AFM) 45
第四章 實驗結果與討論 46
4-1、XRD繞射分析 47
4-2、DEPTH PROFILE分析(XPS) 55
4-3、AFM表面分析 66
4.4、TEM分析 70
4.5、震動樣品磁力計(VSM)分析 76
第五章結論 96
參考文獻 97



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