臺灣博碩士論文加值系統

本論文研究目標是開發仿生複眼微透鏡陣列並具有多焦點和高景深，可達到改善所選物件區域之影像品質。此開發之仿生複眼微透鏡陣列設計，為七層微透鏡陣列於曲面上，形成共焦點之視覺系統。本研究分為兩大部分，第一部分為計算曲面複眼上各層微透鏡的聚焦點，再以光學軟體ZEMAX去進行光線軌跡模擬，第二部分為仿生複眼微透鏡陣列製作，以黃光微影製程來製作光阻柱陣列，在以熱熔法形成平面微透鏡陣列，再搭配濺鍍技術及具有彈性光學材料PDMS (Polydimethylsiloxane)進行翻模。接著再使用3D列印技術列印製作上方為半球型開孔之PDMS模型，再將翻模後的微透鏡陣列薄膜黏貼於開孔上方，並利用負壓力法使平面微透鏡陣列型變為曲面複眼微透鏡陣列，進而得到曲面仿生複眼微透鏡，再藉由ZEMAX透鏡影像模擬系統得到具有不同景深範圍影像。

This study aims to develop a bionic compound eye microlens array with multifocus and high depth of field to improve a selected vision quality. There are seven layers of microlens array designed in the bionic compound eye. These microlens array will focus on the same point composed a visual system. There are two parts in this study. The first part is the calculation of each layer''s microlens array focus on the same surfaces, Then the light path can be simulate using fabricated by the optic simulation software, ZEMAX. The second part is the bionic microlens array compound eye fabrication. The photoresist column array fabricated by lithography and followed by the thermal reflow can form the microlens array. A plastic replicate by elastic PDMS was used after sputtering. Then 3D printer was used to print the PDMS model which was hemisphere with some openings on the top, attached the replicated microlens array on the openings. The microlens array can from the curvature compound eye microlens array because of the negative pressure resulted in the hemisphere. A curvature with microlens array for the bionic compound eye, can be fabricated. The ZEMAX software can be used to simulate .

目錄
摘要 i
Abstract ii
目錄 iii
圖目錄 v
表目錄 vii
第一章 緒論 1
1.1 前言 1
1.2研究動機與目的 2
1.3研究方法與目標 3
1.4論文架構 4
第二章 文獻回顧 5
2.1 平面微透鏡製程 5
2.1.1熱熔法 5
2.1.2灰階光罩法 6
2.1.3微液滴法 7
2.1.3雷射直寫法 8
2.2曲面複眼製程 9
2.2.1折射式聚合物微透鏡法 9
2.2.2水凝膠法 10
2.2.3聚二甲苯法 12
2.3景深應用 13
2.3.1超廣角複眼相機模擬 13
2.3.2利用光場相機聚焦點不同來提高景深 14
2.4 結語 15
第三章 基礎理論 16
3.1幾何光學的基本定律 16
3.1.1光的直線傳播定律 16
3.1.2光的獨立傳播定律 17
3.1.3反射定律 17
3.1.4折射定律 18
3.2曲率半徑公式 19
3.3景深介紹 20
3.4.1 數值光圈(N.A.) 20
3.4.2 景深(depth of field) 21
3.4 薄透鏡成像公式 21
第四章 實驗製程 24
4.1 實驗流程規劃 25
4.2 實驗製程 28
4.2.1 黃光微影製程 28
4.2.2 光罩設計 28
4.2.3 基板清洗 29
4.2.4 光阻塗佈 29
4.2.5 軟烤(Softbake) 31
4.2.6 UV曝光(Exposure) 32
4.2.7 顯影(Development) 34
4.2.8 熱熔製程(Thermal reflow) 35
4.3 濺鍍與翻模製程 36
4.3.1 銅濺鍍製程(Sputtering) 36
4.3.2 翻模製程 37
4.4 曲面複眼製程 38
4.4.1 半球開孔透明腔體製作 38
4.4.2 曲面複眼微透鏡成形 39
第五章 實驗結果量測與分析 40
5.1 光學顯微鏡量測結果 40
5.2 表面形貌儀(ά-step)量測微透鏡高度結構 44
5.3 ZEMAX影像模擬系統 45
5.4 實驗結果與討論 47
第六章 結論與未來展望 48
6.1 結論 48
6.2 未來展望 48
參考文獻 49
附錄A 製程儀器設備 51
附錄B 量測儀器設備 54

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