臺灣博碩士論文加值系統

由於市場與產品功能需求，工業界正逐漸發展使用銀合金線替代部份以往打線接合製程(Wire Bonding)使用之金線與銅線，相關研究指出銀鈀合金線可靠度壽命佳，本研究試著探討銀鈀合金線與鋁打線接合經不同可靠度測試環境界面反應行為。
本研究分析不同鈀含量之銀鈀合金線在打線初成階段(As-bonded)、時效以及經過壓力鍋測試(Pressure Cook Test) 、溫度循環測試(Temperature Cycling Test)和無偏壓高加速溫濕試驗(un-bias Highly Accelerated Temperature and Humidity Stress Test)不同測試環境下界面反應行為。研究過程觀察不同測試下銀鈀合金線接點形貌，比對結果顯示當鈀含量大於3.5%時，隨著鈀含量增加介金屬化合物成長較快。介金屬化合物藉由電子顯微鏡及能量分散能譜(SEM-EDX)分析其組成，分析結果顯示當合金線中鈀含量較高時，接點介面生成之介金屬化合物中鋁含量較低之(Ag,Pd)2Al。經過壓力鍋測試，界面受腐蝕影響且在鋁墊上方形成富銀相(Ag,Pd)3Al；溫度循環測試中，鈀含量較低其接點易形成(Ag,Pd)3Al2，該介金屬化合物熱膨脹係數與銀鈀合金線差異較大，易於界面形成裂縫；無偏壓高加速溫濕測試中，受到濕氣影響程度較壓力鍋測試小，且當鈀含量較高，其接點界面較無腐蝕行為發生。

The industry is trying to replace part of gold and copper wire bond with silver wires. Ag-Pd alloy wire was reported as a potential candidate because of its high reliability. This study investigated the interfacial reaction of Ag-xPd wire bonding on Al pad under various testing conditions.
Aging, pressure cook test (PCT), temperature cycling test (TCT) and un-biased accelerated and humidity stress test (u-HAST) were applied on As-bonded AgxPd(1~6%) wire bonding samples to study the interfacial reaction. The SEM images of wire bond under different test conditions were analyzed. The results indicated that the growth of the intermetallic compound (IMC) was enhanced when the content of Pd is more than 3.5%. The composition of IMC was analyzed by SEM-EDX. It shows that the contents of Al in IMC decrease when the Pd content of alloy wire increases. An increase in the content of Pd in alloy wire leads to promote the formation of (Ag,Pd)2Al rather than (Ag,Pd)3Al2. After PCT test, the corrosion behavior occurred at the interface and Ag-rich IMC (Ag,Pd)3Al formed above the Al-pad. Under TCT test, the (Ag,Pd)3Al2 formed at the interface. The (Ag,Pd)3Al2 exhibits larger difference the coefficient of thermal expansion (CTE) with alloy wire. It tends to induce the crack formation during TCT test. The increasing Pd content inhibits the corrosion of the wire bond under u-HAST test.

中文摘要 I
Extended Abstract II
誌謝 XI
總目錄 XIII
表目錄 XVI
圖目錄 XVII
第壹章 簡介 1
1-1 打線製程 1
1-1-1放電結球製程(Electrical Flame-Off process, EFO) 4
1-1-2熱音波接合(Thermosonic bonding) 4
1-2 打線接合界面反應 7
1-2-1 金鋁界面反應 7
1-2-2 銅鋁界面反應 9
1-2-3 銀鋁界面反應 16
1-3銀打線材料 16
1-3-1 純銀打線 20
1-3-2銀鈀合金線 20
1-3-3 銀金鈀合金線 23
1-4 打線接合的可靠度測試 23
1-4-1溫度對界面之影響 25
1-4-2濕度對界面之影響 25
1-4-3接合性質測試 27
1-5研究動機與目的 27
第貳章 實驗方法與步驟 29
2-1 實驗構想 29
2-2 打線製程試片 29
2-3熱時效處理條件 31
2-4可靠度測試種類及條件 31
2-5試片分析 31
第參章 結果與討論 37
3-1 As-bonded銀鋁界面微結構觀察 37
3-2時效後銀鋁界面微結構觀察 41
3-2-1介金屬化合物成長 41
3-2-2界面反應行為 52
3-2-3鈀含量對於介金屬化合物組成的影響 54
3-3 PCT 可靠度測試 57
3-3-1 PCT銀鋁界面微觀組織觀察 57
3-3-2 PCT測試銀鋁界面反應行為 62
3-3-3 介金屬化合物的腐蝕 68
3-4 TCT可靠度測試 69
3-4-1 TCT銀鋁界面微結構 71
3-4-2 TCT界面裂縫之探討 78
3-5 u-HAST可靠度測試 80
3-5-1 u-HAST銀鋁界面微觀組織 80
3-5-2 u-HAST與PCT界面反應比較 80
3-6 銀鋁界面反應在不同環境下的差異 85
第肆章 結論 90
參考文獻 91

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