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研究生:張廉楷
研究生(外文):Lien-KaiChang
論文名稱:新型壓電振動子應用於超音波馬達之研究
論文名稱(外文):Research on Novel Piezoelectric Vibrators for Ultrasonic Motors
指導教授:蔡明祺
指導教授(外文):Mi-Ching Tsai
學位類別:博士
校院名稱:國立成功大學
系所名稱:機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2016
畢業學年度:104
語文別:中文
論文頁數:61
中文關鍵詞:彎張式超音波馬達蠕動式超音波馬達
外文關鍵詞:flextensional ultrasonic motorsquiggle ultrasonic motor
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隨著攜帶式裝置於近年的蓬勃發展,越來越多電子產品需要小型馬達來運作。在小型化的裝置需求下,超音波馬達的重要性已與日俱增。本研究主要探討兩種以共振模式驅動的超音波馬達,分別為彎張式與蠕動式超音波馬達。彎張式超音波馬達為共振驅動馬達裡具最大出力與速度的類型,馬達以積層式壓電致動器運作,所以通常僅以低電壓驅動。若需提升馬達出力與速度,增加驅動電壓為常見的方式,然而對彎張式超音波馬達而言,加大電壓可能會導致積層式壓電致動器退極化。因此本研究提出星型彎張超音波馬達設計,可避免彎張超音波馬達由於提高驅動電壓導致壓電致動器退極化而損壞的問題。蠕動式超音波馬達為現有共振驅動馬達裡體積最小的類型,為了更容易內嵌於應用裝置內,除了馬達本體外,其驅動電路亦需要小型化。因此本研究提出可單相驅動的馬達設計,令驅動電路可進一步簡化,達到縮減體積的目的。為了降低馬達製作成本,本研究以常見的壓電陶瓷片製作單相驅動馬達,於是高驅動電壓是必需的。但驅動電路內使用高頻變壓器會令電路體積過大,故本研究以壓電式變壓器取代高頻變壓器,並成功驅動單相馬達。馬達以此驅動架構進行定位控制,藉由合適地設計比例控制器,馬達可控制定位的穩態誤差於6微米下。
This dissertation develops two types of novel piezoelectric vibrators for ultrasonic motors. The flextensional ultrasonic motors can provide high thrust force and speed, but there is a risk of internal multilayer piezoelectric ceramic depolarization when the higher voltage is applied. Thus the star-shaped flextensional stator is proposed to increase the operating voltage range of the flextensional ultrasonic motors. The squiggle ultrasonic motors have compact size in motor body, but the required two driving voltage sources causes their driving circuit larger compared with the motor body. For the purpose of reducing driving circuit volume, a single phase squiggle ultrasonic motor is proposed in this study.
摘要 I
Extended Abstract II
誌謝 XII
目錄 XIII
圖目錄 XV
表目錄 XIX
符號表 XIX
第一章 緒論 1
1.1 研究背景 1
1.2 文獻回顧 7
1.2.1 彎張式超音波馬達 7
1.2.2 蠕動式超音波馬達 11
1.3 研究動機與目標 16
第二章 星型彎張式超音波馬達設計 17
2.1 馬達工作原理 17
2.2 積層式壓電致動器介紹 18
2.3 馬達設計 20
2.4 靈敏度分析 26
2.5 實驗與量測結果 29
2.6 討論 32
第三章 單相蠕動式超音波馬達設計 33
3.1 馬達工作原理 33
3.2 馬達分析與設計 37
3.2.1 工作頻率分析 37
3.2.2 固定點設計 39
3.3 實驗與量測結果 40
3.4 討論 42
第四章 超音波馬達驅動與控制 43
4.1 壓電變壓器之超音波馬達驅動應用 43
4.2 超音波馬達定位控制 45
4.3 定位控制實驗 54
4.4 討論 56
第五章 結論與展望 57
5.1 結論 57
5.2 未來工作 58
參考文獻 59
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