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研究生:林志偉
研究生(外文):Chih-WeiLin
論文名稱:利用鹵素摻雜之氧化鋁製作增強型氮化鎵高電子移動率場效電晶體之研究
論文名稱(外文):Study of Halogen Doping Aluminum Oxide Deposition on Enhancement-Mode AlGaN/GaN MOS-HEMT
指導教授:許渭州江孟學劉漢胤
指導教授(外文):Wei-Chou HsuMeng-Hsueh ChiangHan-Yin Liu
學位類別:碩士
校院名稱:國立成功大學
系所名稱:奈米積體電路工程碩士學位學程
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2016
畢業學年度:104
語文別:英文
論文頁數:66
中文關鍵詞:氮化鋁鎵/氮化鎵增強型元件高電子遷移率電晶體超音波霧化熱裂解氧化層摻雜掘入式閘極氟離子佈植。
外文關鍵詞:AlGaN/GaNenhancement modehigh electron mobility transistorultrasonic spray pyrolysisdoping oxidegate recessfluorine ion implantation.
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本論文主要探討利用超音波霧化熱裂解法沉積摻雜氯離子之氧化鋁於增強型氮化鋁鎵/氮化鎵高電子遷移率電晶體之研究。並探討不同的製程方式將掘入式閘極與氟離子佈植應用於氮化鋁鎵/氮化鎵高電子遷移率電晶體,以獲得臨界電壓(Vth)為正之元件及其特性。
為瞭解超音波霧化熱裂解法所形成之氧化層的組成,在本論文中使用了原子力顯微鏡、穿透電子顯微鏡、化學分析電子儀進行探討。在原子力顯微鏡量測中,可以驗證成長的薄膜相當的均勻。在穿透電子顯微鏡中,觀察成長的薄膜厚度為20奈米。在化學分析電子儀中的縱深分析,可得知氧化層中的化學成分組成確認是氧化鋁。在瞭解薄膜之材料分析後,進一步研究氧化鋁及摻雜氯離子之氧化鋁技術應用於增強式之氮化鋁鎵/氮化鎵高電子遷移率電晶體上。我們發現使用摻雜技術在臨界電壓上可正偏至1.5伏特與未摻雜之元件臨界電壓1.2伏特相較有較正之特性表現。此外,使用氟離子佈植技術的元件與掘入式閘極元件相比有更大的操作電流以及更低之漏電流。
而超音波霧化熱裂解法沉積氧化鋁於金氧半高電子遷移率電晶體上,先利用比較不同厚度找出最佳的元件特性,同時也發現在厚度為20奈米的氧化層之元件有最佳的特性改善。在電流電壓特性可操作至3伏特閘極電壓,崩潰電壓可承受至180伏特。除此之外,在臨界電壓表現上,正偏表現提升25%,且閘極漏電流下降,因此超音波霧化熱裂解法沉積氧化鋁摻雜氯離子之元件具有同時提升元件臨界電壓及降低漏電流之潛力。

This thesis proposes the halogen doping of aluminum oxide (Al2O3) stacked on the e-mode AlGaN/GaN high electron mobility transistors (HEMTs) by using ultrasonic spray pyrolysis deposition (USPD). We found that the doping oxide deposit on the enhancement mode AlGaN/GaN HEMTs can achieve more positive threshold voltage shift.
In order to analyze the oxide layer composition, we utilized the atomic force microscopy (AFM), transmission electron microscopy (TEM), electron spectroscopy for chemical analysis (ESCA), and Hall measurement in the research. We observe that the surface roughness is quite uniform by AFM. Then, we confirm that the thickness of oxide layer is 20 nm through TEM. Besides, in ESCA analysis, the results show the oxide layer is exactly Al2O3. In addition, the decreased oxide layer trap density is confirmed by the hysteresis and interface state density.
Gate recess, fluorine ion implantation and doping oxide are applied to the fabrication of AlGaN/GaN HEMTs. We found that threshold voltage of doping oxide device can shift to 1.5V, which is more positive 0.3V than only Al2O3 device. In addition, fluorine ion implantation device has larger drain current and reliability than gate recess device.
Finally, we propose that the Al2O3 oxide layer applied to metal-oxide-semiconductor MOSHEMT by using ultrasonic spray pyrolysis technique is studied the optimal thickness of the oxide layer is 20 nm. Gate voltage of device can be operated up to 3V and the breakdown voltage is over 180 V. Moreover, threshold voltage of device with doping oxide achieves 25 % positive shift. Therefore, the device which deposited Al2O3 on AlGaN/GaN HEMTs by using ultrasonic spray pyrolysis technique with halogen doping is suitable for modulate threshold voltage and reduce gate leakage.

摘 要II
Abstract IV
Contents IX
Figures XI
Table Captions XIV
Chapter 1 Introduction 1
1-1 Background and Motivation 1
1-2 Organization of Thesis 5
Chapter 2 Characterization of AlGaN/GaN 6
2-1 Group III-Nitride Semiconductors 6
2-2 GaN-based Device 6
2-3 Principle of AlGaN/GaN 8
Chapter 3 Material Growth and Devices Fabrication 10
3-1 Epitaxy Structure 10
3-2 Fabrication Process 10
3-2-1 Mesa Isolation 12
3-2-2 Source and Drain Ohmic Contact 13
3-2-3 Fluorine Ion Implantation 14
3-2-4 Gate Recess Process 14
3-2-5 Ultrasonic Spray Pyrolysis Deposition (USPD) 15
3-2-6 Gate Metallization 15
3-3 Metal-Oxide-Semiconductor (MOS) Diode Fabrication 16
Chapter 4 Results and Discussion 17
4-1 Materials Analysis 17
4-1-1 Atomic Force Microscopy 17
4-1-2 Transmission Electron Microscopy 18
4-1-3 Electron Spectroscopy for Chemical Analysis 18
4-2 Capacitance-Voltage Characteristics 19
4.2.1 Dielectric Constant 19
4-2-2 Hysteresis 20
4.2.3 Interface State Density 21
4-3 DC Characteristics 21
4-3-1 Output Characteristics 21
4-3-2 Transfer Characteristics 22
4-3-3 Off-state Breakdown Voltage Characteristics 23
4-4 Temperature-Dependent DC Characteristics 25
4-4-1 Temperature-Dependent Output Characteristics 25
4-4-2 Temperature-Dependent Transfer Characteristics 26
4-4-3 Temperature-Dependent Breakdown Characteristics 26
Chapter 5 Conclusion 28
References 29
Figures 34
References
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