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研究生:尤姿予
研究生(外文):Tzu-Yu Yu
論文名稱:銻砷化鎵/砷化銦鎵穿隧式場效電晶體 之導通電流研究
指導教授:辛裕明
指導教授(外文):Yue-Ming Hsin
學位類別:碩士
校院名稱:國立中央大學
系所名稱:電機工程學系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2016
畢業學年度:104
語文別:中文
論文頁數:102
中文關鍵詞:穿隧式場效電晶體銻砷化鎵/砷化銦鎵導通電流
外文關鍵詞:TFETGaAsSb/InGaAsOn-state current
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隨著未來在半導體產業上電晶體元件的微縮發展,穿隧式場效電晶體以能帶穿隧方式產生電流,該電晶體僅需低的操作電壓即可使元件運作,且擁有低的次臨限斜率、極好的開關切換特性、在關閉時低的漏電流與低功率損耗等優點,有別於傳統金氧半場效電晶體其載子以飄移-擴散方式來傳導電流,次臨限斜率會被kT/q所限制。III-V族材料的穿隧式場效電晶體因具有比傳統矽材料還低的能隙寬度,而有較高的穿隧機率,達到高的元件導通電流及更低的操作偏壓,固本論文著重於開發III-V族化合物半導體之穿隧式場效電晶體。
本論文使用了同質結構與兩種不同異質結構之III-V族p-i-n摻雜材料磊晶,為了達到穿隧機制需有p+重摻雜的源極與n+重摻雜的汲極。同質結構為砷化銦鎵材料之銦的成分比例佔53%,鎵的比例佔47%;而第一種異質結構為銻砷化鎵/砷化銦鎵,此能隙排列擁有較小的有效穿隧能障,使之能產生較大的導通電流,源極為p+型銻砷化鎵;第二種異質結構為在第一種異質結構的p-i接面處加入6-nm 砷化銦鎵材料形成具口袋式異質結構穿隧式場效電晶體,此能隙排列能使導通電流更加提升。
藉由光學曝光進行微米尺寸穿隧式場效電晶體元件圖形定義,探討不同磊晶材料之導通電流特性。成功製作出具砷化銦鎵口袋式銻砷化鎵/砷化銦鎵之穿隧式場效電晶體元件在汲極長度LD = 2 μm的元件,氧化鋁/氧化鉿EOT為2 nm,閘極電壓VG = 2 V,汲極電壓VD = 0.5 V時,汲極導通電流為11.98 μA/μm。

As transistors are scaled-down in the semiconductor industry, it is important to replace MOSFETs for low power application due to the ability to make device work with a lower supply voltage, without increase in OFF state currents. Unlike the MOSFET which uses thermal carrier injection, the TFET utilizes band-to-band tunneling as a source carrier injection mechanism. Advantages of TFETs include excellent switching characteristics, small operating voltage and low power consumption. Since the TFET has a different source carrier injection mechanism than does the MOSFET, it can achieve sub-60-mV/dec subthreshold slope. III-V material based devices with high ON current have been considered. The high tunneling probability due to the narrow and direct bandgap. Therefore, III-V material based TFETs are studied in this thesis.
There are three different epitaxy structures used in this study, one homo-junction structure and two different hetero-junction structures. In order to achieve the tunneling operation of n-type TFET, a heavily doped In0.53Ga0.47As is dedicated for source, n+- In0.53Ga0.47As is for drain, and undoped In0.53Ga0.47As is for channel in In0.53Ga0.47As homo-junction structure. The first hetero-junction TFET has a p+ GaAs0.51Sb0.49 source with an intrinsic In0.53Ga0.47As channel and a n+ In0.53Ga0.47As drain. The second hetero-junction TFET is similar to the hetero-junction TFET, with the exception that a 6-nm In0.7Ga0.3As “pocket” is grown next to the source to provide a smaller tunneling barrier.
In this study, we use optical lithography and wet etching method to fabricate the micron dimension TFETs. Different epi structures involve in on-stated current were studied for insulators including Al2O3/HfO2 (EOT of 2 nm) by ALD. At room temperature, the characteristics of the hetero-junction TFET with pocket could obtain the maximum on current (Ion) 11.98 μA/μm.

摘要 I
致謝 III
目錄 IV
圖目錄 VI
表目錄 XI
第一章 導論 1
1.1 穿隧式場效電晶體研究發展 1
1.2 研究動機 17
1.3 論文架構 17
第二章 穿隧式場效電晶體介紹 19
2.1 前言 19
2.2 穿隧電流與穿隧理論 19
2.3 穿隧式場效電晶體元件特性的重要參數 22
2.4 穿隧式場效電晶體能帶圖與導通電流關係 23
2.5 結論 29
第三章 砷化銦鎵及銻砷化鎵/砷化銦鎵之穿隧式場效電晶體製程與特性比較 30
3.1 前言 30
3.2 Silvaco模擬砷化銦鎵及銻砷化鎵/砷化銦鎵之穿隧式場效電晶體特性 30
3.3 砷化銦鎵同質磊晶及銻砷化鎵/砷化銦鎵異質磊晶結構 35
3.4 穿隧式場效電晶體製程流程 37
3.5 複合薄膜氧化層之不同磊晶結構穿隧式場效電晶體特性與分析 44
3.5.1 砷化銦鎵同質磊晶之穿隧式場效電晶體特性 45
3.5.2 銻砷化鎵/砷化銦鎵異質磊晶之穿隧式電晶體特性 49
3.5.3 不同磊晶結構之穿隧式場效電晶體特性比較 52
3.6 結論 58
第四章 銻砷化鎵/砷化銦鎵及具砷化銦鎵口袋式銻砷化鎵/砷化銦鎵之穿隧式場效電 晶體製程與特性比較 59
4.1 前言 59
4.2 Silvaco模擬銻砷化鎵/砷化銦鎵及具砷化銦鎵口袋式銻砷化鎵/砷化銦 59
鎵之穿隧式場效電晶體特性比較 59
4.3 具砷化銦鎵口袋式銻砷化鎵/砷化銦鎵異質磊晶結構 63
4.4 複合薄膜氧化層之不同磊晶結構穿隧式場效電晶體特性與分析 64
4.4.1 具砷化銦鎵口袋式銻砷化鎵/砷化銦鎵之穿隧式電晶體特性 65
4.4.2 不同磊晶結構之穿隧式場效電晶體特性比較 68
4.5 脈衝量測 76
4.6 結論 80
第五章 總結與未來展望 83
參考文獻 85


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