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研究生:陳宏彥
研究生(外文):Chen, Hung Yen
論文名稱:利用腔體尺寸設計機器人手部觸覺感測器之剪力感測靈敏度
論文名稱(外文):Designing Shear Force Sensing Sensitivity of Tactile Sensors in Robot Hand through Cavity Size
指導教授:陳榮順陳榮順引用關係方維倫
指導教授(外文):Chen, RongShunFang, WeiLeun
學位類別:碩士
校院名稱:國立清華大學
系所名稱:奈米工程與微系統研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2016
畢業學年度:104
語文別:中文
論文頁數:90
中文關鍵詞:觸覺感測器機器人手部剪力感測感測靈敏度
外文關鍵詞:Tactile sensorRobot handShear force sensingSensing sensitivity
相關次數:
  • 被引用被引用:1
  • 點閱點閱:264
  • 評分評分:
  • 下載下載:8
  • 收藏至我的研究室書目清單書目收藏:1
在機器人逐漸發展為取代照護人力的趨勢下,為了要使機器人手部抓取或是操控的動作更為順利,使用的觸覺感測器需要具備剪力感測的能力。在機器人的手部執行任務時,不同手的部位需要承受不同大小的力量,因此具有不同的感測靈敏度的需求。以往在設計感測靈敏度上,通常會設計感測結構的尺寸,但是若是要更改光罩,可能所有製程的光罩都要跟著變更,因此本研究提出一個新的設計參數:利用設計感測結構週遭的腔體尺寸,製作不同剪力感測靈敏度的元件。
Following the trend where many robots have begun replacing the nursing needs, in order to make the movement of robot hand more fluent in grasping and manipulation, there is a requirement that the tactile sensors in their hands should possess the ability to sense shear force. When a robot hand carries out its job, there is a different need of sensing sensitivity on each zone of hand depending on the quantity of force applied. Previous work usually regards size of the sensing structure as a parameter of designing the sensing sensitivity. However, if the design has to be modified, all of the photomasks in fabrication process may be redrawn or disposed. We will propose a new parameter as we make use of the size of the cavity surrounding the sensing structure, and aim to fabricate tactile sensors with different sensing sensitivity.
中文摘要 I
Abstract II
誌謝 III
目錄 V
表目錄 VIII
圖目錄 IX
第一章 緒論 1
1-1 前言 1
1-2 文獻回顧 3
1-2.1 感測機制 3
1-2.2 機器人手部觸覺感測器之需求及規格 6
1-2.3 機器人手部觸覺感測器之設計 8
1-3 研究動機與目標 11
第二章 元件分析與模擬 23
2-1 壓阻效應 23
2-2 離子佈植 27
2-3 硼離子佈植電學特性 28
2-4 惠斯同電橋 30
2-5 接觸面的力學特性 30
2-6 元件設計與模擬 31
2-6.1 結構設計及感測能力分析 32
2-6.2 力量耦合分析 35
2-6.3 剪力感測靈敏度設計 36
第三章 製作流程與結果 52
3-1 製程步驟 52
3-2 問題討論與製程結果 55
3-2.1 問題討論 55
3-2.2 製程結果 58
第四章 元件量測結果 67
4-1 性能量測 67
4-1.1 力量施加方式及性能量測架設 67
4-1.2 性能量測結果 69
第五章 結論與未來工作 82
5-1 結論 82
5-2 未來工作 82
參考文獻 86


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