(3.235.25.169) 您好!臺灣時間:2021/04/20 18:17
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果

詳目顯示:::

我願授權國圖
: 
twitterline
研究生:許俊榮
研究生(外文):Chun-Jung Hsu
論文名稱:光波前表面變形量測系統之設計與開發
論文名稱(外文):Design and Development of Shack-Hartmann Surface Deformation Measuring System
指導教授:黃光裕
口試委員:林沛群蔡得民廖先順
口試日期:2016-06-07
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:機械工程學研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2016
畢業學年度:104
語文別:中文
論文頁數:58
中文關鍵詞:Shack-Hartmann光波前感測器反射式量測表面變形量測壓電元件變形
外文關鍵詞:Shack-Hartmann wavefront sensorreflective measurementsurface deformation measurementdeformation of piezoelectric components
相關次數:
  • 被引用被引用:0
  • 點閱點閱:94
  • 評分評分:系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
隨著精密技術的發展,高解析度的量測方法已成為近年來發展的重點之一。其中光學量測技術具有非接觸與高解析度的優點,因此近年來已被廣泛應用於精密量測上。Shack-Hartmann光波前感測器是藉由量測光波前的變化,精準地感測光束在傳遞過程中產生的光程差,可利用透射式光路量測透鏡與大氣的像差變化,亦可配合反射式光路量測物體表面變形。
本論文設計開發出可微調式Shack-Hartmann光波前感測器,並建構一套高解析度的Shack-Hartmann光波前表面變形量測系統,用以量測壓電元件在致動時的表面變形。藉助光學模擬軟體對系統光路進行分析,以最佳化系統光路,並藉由實驗結果驗證系統光路之量測特性。本文採用反射式光路進行表面變形量測,藉由量測反射光束之光波前變化,可反推被測物之表面變形輪廓,使用準直平行光作為量測之參考光束,分別對壓電蜂鳴片與積層式壓電塊輸入電壓使其產生變形,並利用設計系統進行量測,操作電壓範圍為-50 V至50 V。經由實際量測,得以利用光波前重建壓電元件之變形輪廓。本論文設計開發之感測器的量測精密度為0.203 λ,精準度達0.032 λ,解析度則可達0.033 λ。


With the development of precision technologies, measuring methods with high resolution have become more and more important for the past few years. Due to the advantages of non-contact and high resolution of optical measurement, it has been applied to precision engineering for several years. Shack-Hartmann wavefront sensor (SHWS) can precisely detect the optical path difference of the light beam. By using the transmissive optical setup, it can measure the wavefront aberration caused by lens and atmosphere. Also, it can measure the surface topography by applying the reflective optical setup.
A tunable SHWS with high resolution is designed in this paper. Shack- Hartmann deformation measuring system is also constructed to measure the surface topography of the piezoelectric components. The optical setup of the system is analyzed by the optical simulation software. The components of the system are optimized by the simulation results, which are also used to compare with the experimental results. Reflective optical setup is applied in this paper to measure the surface deformation, and a collimated beam is used as a reference beam. Providing voltage, from -50 V to 50 V, is applied to piezoelectric components to make them deform. The designed system is applied to measure the deformation of the surface. The profile of the deformed surface can be obtained by measuring the change of wavefront of the reflective beam. Finally, the accuracy of tunable sensor is obtained to 0.203 λ by experiments. The precision reaches 0.032 λ, and the resolution reaches 0.033 λ.


口試委員審定書 I
誌謝 II
中文摘要 III
Abstract IV
目錄 V
圖目錄 VII
表目錄 IX
符號表 X
第一章 緒論 1
1.1 研究背景與動機 1
1.2 文獻回顧 2
1.3 研究目標 5
1.4 內容簡介 5
第二章 光波前變形量測系統原理與架構 7
2.1 量測光源與光路 8
2.2 量測裝置 11
2.3 資料擷取與處理裝置 13
第三章 光波前理論與解析運算法 19
3.1 光波前與像差 19
3.2 光波前重建運算法 21
第四章 光波前變形量測特性分析 25
4.1 擴束光源分析 26
4.2 光強度分布分析 30
4.3 光點大小分析 34
4.4 量測面變形重建分析 38
第五章 光波前變形量測系統總體性能測試 42
5.1 實驗架構 42
5.2 參考光校正 43
5.3 可微調式SHWS測試 45
5.4 光波前表面變形量測 49
第六章 結論與未來展望 56
參考文獻 57



[1]Binnig G. and Rohrer H., “Scanning Tunneling Microscopy”, IBM Journal of Research and Development, Vol. 44, 2000, pp. 279-293.
[2]Michael J. B., Shahal I., Charles M. M., and Paul L. M., “Electrical Transport in Single-Wall Carbon Nanotubes “, Topics Application Physics, Vol. 111, 2008, pp. 455-493.
[3]Lalwani G., Kwaczala A. T., Kanakia S., Patel S. C., Judex S., and Sitharaman B., “Fabrication and characterization of three-dimensional macroscopic all-carbon scaffolds”, Carbon, Vol. 53, Mar. 2013, pp. 90-100.
[4]Michelson A. A., “The Relative Motion of the Earth and the Luminiferous Ether”, American Journal of Science, Vol. 34, 2003, pp. 333-345.
[5]Mach L., “Ueber einen Interferenzrefraktor”, Zeitschrift für Instrumentenkunde, Vol. 12, 1892, pp. 1289-1293.
[6]Zehnder L., “Ein neuer Interferenzrefraktor”, Zeitschrift für Instrumentenkunde, Vol. 11, 1891, pp. 275-285.
[7]Malacara D., Twyman-Green interferometer, Wiley, New York, 1992.
[8]Asundi A., “Moiré Interferometry for Deformation Measurement”, Optics and Lasers in Engineering, Vol. 11, 1989, pp. 281-292.
[9]Hartmann J., “Bemerkungen über den Bau und die Justirung von Spektrographen”, Zeitschrift für Instrumentenkunde, Vol. 22, pp. 17-24 and pp. 47-58.
[10]Platt B. and Shack R., “History and Principles of Shack-Hartmann Wavefront Sensing”, Journal of Refractive Surgery, Vol. 17, October 2001, pp. 573-577.
[11]Shack R. and Smith F., “Production and use of a lenticular Hartmann screen”, Journal of the Optical Society of America, Vol. 61, pp. 656.
[12]Hamam H., “A direct technique for calculating the profile of aberration of the eye measured by a modified Hartmann–Shack apparatus”, Optics Communications, Vol. 173, 2000, pp. 23-36.
[13]Brown M., Gong T., Neal D., Roller J., Luanava S., and Urey H., “Measurement of the dynamic deformation of a high frequency scanning mirror using a Shack-Hartmann wavefront sensor”, Proceedings of SPIE, Vol. 4451, 2001, pp. 480-488.
[14]張哲維,2015,光波前多軸位移量測系統之設計與開發(Shack-Hartmann Wavefront Sensor for Multiaxial Actuation Measurement),國立台灣大學機械工程學研究所碩士論文。
[15]Thorlabs官方網站參考型錄介紹,http://www.thorlabs.com/
[16]Chia C. M., Huang K. Y., and Chang E., “Hough transform used on the spot-centroiding algorithm for the Shack–Hartmann wavefront sensor”, Optical Engineering, Vol. 55, January 22 2016.
[17]Duda R. O. and Hart P. E., “Use of the Hough Transformation to Detect Lines and Curves in Pictures,” Communications of the ACM, Vol. 15, January 1972, pp. 11-15.
[18]Hudgin R. H., “Wavefront reconstruction for compensated imaging,” Journal of the Optical Society of America, Vol. 67, 1977, pp. 375-378.


QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top
系統版面圖檔 系統版面圖檔