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研究生:吳華逸
研究生(外文):Hua-Yi Wu
論文名稱:保證連通層可分解性之三圖樣微影感知細部繞線
論文名稱(外文):Triple Patterning Lithography-aware Detailed Routing Ensuring Via Layer Decomposability
指導教授:方劭云
指導教授(外文):Shao-Yun Fang
口試委員:方劭云
口試委員(外文):Shao-Yun Fang
口試日期:2016-07-27
學位類別:碩士
校院名稱:國立臺灣科技大學
系所名稱:電機工程系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2016
畢業學年度:104
語文別:英文
論文頁數:72
中文關鍵詞:實體設計三圖樣微影技術繞線佈局分割同構圖
外文關鍵詞:physical designtriple patterning lithographyroutinglayout decom- posabilitygraph isomorphism
相關次數:
  • 被引用被引用:0
  • 點閱點閱:116
  • 評分評分:
  • 下載下載:1
  • 收藏至我的研究室書目清單書目收藏:0
由於下一代微影技術的延遲,對於現今10 奈米的製程節點,多
圖樣微影技術仍然是突破微影極限的主要方案。在本篇論文中,我們
提出一個保證連通層可分解性之三圖樣微影感知的細部繞線器。在此
研究中,繞線器並不同時執行繞線和電路圖案著色以讓提供最大的繞
線彈性。為了保證佈局可分解性,我們證明在衝突圖中只避免K4 的
產生是不夠的。因此在我們的繞線流程中,我們利用同構圖的概念,
建構一個不可被三著色圖庫。由於這個同構圖演算法的高複雜性,我
們使用多種圖形簡化技術和提出平面分割方法,以加速繞線執行時間。
最後使用以整數線性規畫為基礎的佈局分解演算法,來證明我們的繞
線器可保證佈局可分解。實驗結果驗證了我們所提出的繞線演算法的
必要性和有效性。
For sub-10 nanometer technology nodes, multiple patterning technologies are still the major solutions for pushing the limit of lithography due to the delay of next generation lithography technologies. In this thesis, we propose a triple patterning lithography (TPL)-aware router that guarantees the layout decomposability of via layers. In the research, the router does not perform simultaneous routing and coloring to maximize routing flexibility. To guarantee layout decomposability, we show that considering $K4$ forbidance in the conflict graph alone is not sufficient. We therefore adopt the idea of graph isomorphism and construct a 3-uncolorable graph library in our routing flow. To tackle the high complexity of the graph isomorphism algorithm, we use several graph reduction techniques and propose a via plane division method to minimize the runtime overhead. Finally, an optimal integer linear programming (ILP)-based layout decomposition algorithm is used to show that layout decomposability is ensured by our router. Experimental results show the necessity and effectiveness of our router.
Abstract (Chinese) iv
Abstract vi
List of Tables x
List of Figures xi
Chapter 1. Introduction
Chapter 2. Preliminaries
Chapter 3. Our TPL-Aware Routing Algorithm
Chapter 4. Experimental Results
Chapter 5. Conclusions
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